Nanotechnology Symposium
5
What is a Linear Shaft Motor?
It is a direct drive linear It is a direct drive linear brushless servomotor!brushless servomotor!
6
Linear Servomotor Classification• Linear Induction Motor (LIM)• Linear Pulse Motor (LPM)• Linear DC Motor (LDM) --- Voice Coil
Motor• Linear Synchronous Motor (LSM)
– Flat type• With core• Coreless
– Cylindrical type• With core• Coreless
---- Linear Shaft Motor
7
0
1000
2000
3000
4000
5000
6000
7000
8000
0 0.5 1 1.5 2 2.5 3 3.5 4VELOCITY (m/ sec)
FORC
E (N
)
0%
10%
20%
30%
40%
50%
60%
70%
80%
F-V定格推力出力効率
Output
Efficiency
F - V
S605Q Specification Curve
Actually, linear F-V curve is a characteristic of DC motor.
Force Velocity Curve
Published Continuous Force
Published Peak Force
13
Design Concept: High Precision– Coreless design
– No iron in forceror shaft
– No cogging
– Stiff design• The coils themselves are the core, thus
the stiffness of an iron core design
14
Design Concept: Non-Contact
Large Air Gap0.5mm to 1.75mm nominal annular air gap
Non-criticalNo variation in force as gap varies over stroke of device
15
CoilMagnetic Flux
(a) Flat type
Ineffective use of flux
(b) Cylindrical type
Effective use of flux
Only upper side flux is effective
All flux is effective
Magnets
Coil
Design Concept: Non-Contact
16
Linear Shaft Motor
NS
SN
NS
SN
NS
SN
Core(Iron )
Back York(Iron)
Coil
Coil Magnet
Magnet Absorption Force
No influence by change of gap
Linear Motor
Cogging by concentration of flux
17
Comparison of Linear MotorsLinear Motor Type
Flat & Cylindrical type with
core
Coreless Flat
Coreless Cylindrical
Linear Shaft Motor
Output High Low High
Stiffness
High Low High
Adsorption force
Very High
Non Non
Result of adsorption force
Need more space for assembly
No effect No effect
Cogging Large Non Non
22
Maximum velocity: 6.3 m/sec
(20.7 ft/sec)
Motor: S435QMaximum velocity: 6.3m/secAcceleration: 13.5GPayload: 20kg (44lbs)Stroke: 800mm 2’7”
High speed drive
Encoder: HeidenhainResolution: 1µmDriver: Servoland SVDM 40PGuide: LM guide
23
μ 低速送り (8 m/s) 移動距離2mm
0
0.005
0.01
0.015
0.02
0.025
0.03
0.035
0.04
0.045
0.05
0 50 100 150 200 250
Time (s)
Velo
city
(mm
/s)
Velocity fluctuation is under 1%.
Slow speed drive
Motor: 2-S160T in parallelMaximum velocity: 8 µm/secPayload: 25kg (55 lbs)
Encoder: HeidenhainResolution: 10 nmDriver: Delta Tau P-MacGuide: Air bearing
24
Acceleration: 20G (198 m/sec2)
Motor: S435QMaximum velocity: 5m/secAcceleration: 20GPayload: 1.7kg (4 lbs)
Encoder: MitsutoyoResolution: 0.5 µmDriver: Servoland SVDM 40PGuide: LM guide
Acceleration
25
Motor: S160TVelocity: 1m/secAcceleration: 1GPayload: 3kg (6.6lbs)Stroke: 800mm
Encoder: HeidenhainResolution: 0.1µmDriver: Servoland SVDM 2PGuide: LM guide
There is no overshoot. And positioning is 0.1 micron.
High speed positioning
26
Stage: GTX 250Motor: S200QVelocity: 100mm/secAcceleration: 1GPayload: 25kg (55 lbs)
2.5 3 .0 3 .5 4 .0T im e (Seconds)
99 .990
99.995
100.000
100.005
100.010
100.015
C hanne l 1 Ve loc ity (M illim eter/sec)
Velocity fluctuation is under 0.006%.
Encoder: HeidenhainResolution: 0.1µmDriver: Servoland SVDM 5PGuide: Air bearing
Velocity fluctuationmedium speed
27
4.994.9914.9924.9934.9944.9954.9964.9974.9984.999
55.0015.0025.0035.0045.0055.0065.0075.0085.0095.01
0 100 200 300 400 500 600 700 800 900 1000 1100
Time (s)
Velo
city (m
m/s))
Velocity fluctuation is under 0.01%.
Velocity fluctuationvery slow speed
Motor: 2-S160T in parallelMaximum velocity: 8 µm/secPayload: 25kg (55 lbs)
Encoder: HeidenhainResolution: 10 nmDriver: Delta Tau P-MacGuide: Air bearing
28
- 5
0
5
10
15
20
25
30
35
40
45
50
55
0 5 10 15 20 25 30 35
A ACT POS
B ACT POS
COMAND POS
[SEC]
[nm]
No overshoot
No backlash
5 nanometer step motion
Motor: 2- S320D in parallelPayload: 25kg (55 lbs)Guide: Air bearing
Encoder: HeidenhainResolution: 1 nmDriver: Delta Tau P-Mac
30
Following error is very small. Maximum following error is under 100 nm.
Red line: command velocityBlue line: actual velocity
Following error
Parabolic moveConstantly changing velocity
Stage: GTX 250Motor: 2-S160T in parallelMaximum Velocity: 3mm/secPayload: 10kg (22 lbs)
Encoder: SONY BS78 TS13Resolution: 0.14nmDriver: P-Mac U-mac systemGuide: Air bearing
31
Summary Linear Shaft motor’s capabilities
• Maximum force 36000N (S1150T)
• Smallest motor S040D 25x10x10mm• Longest stroke 4.6m (15’ 1”)• Fastest speed 6.3m/sec (21ft/sec)• Slowest speed 8 µm/sec• Maximum acceleration 20G• Velocity fluctuation under 0.05%• Finest resolution 70pm
(0.00007µm)
33
TableForcer (coil)
Linear encoder
LinearGuideCable carrier
Shaft Support
How to construct?
Linear Shaft MotorLinear Shaft Motor
37
Calculations
In these equations, “μ” is the coefficient of friction on the guide. "g" is as the acceleration of gravity. g = 9.81 m/sec2
Continuous Force => Feff
Peak Force => larger Fa or Fd
Linear Shaft Motor Selection
-
38
435Q
0
500
1000
1500
2000
2500
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1
DUTY
推
力(
N)
+10℃
+20℃
+30℃
+40℃
+50℃
+60℃
+70℃
+80℃
+90℃
+100℃
•Acceleration time 0.15s
•Const. speed period 0.6s
•Deceleration time 0.15s
•Dwell time 0.1s
•Mass (Load & Forcer) 25kg
•Speed 1.5m/s
•Duty 34 %
•Acceleration 10m/s2
•Acceleration force 250N
Temperature rise is 38℃
Linear Shaft Motor Selection
39
System input
Move input
Motor Selection
Create Data Sheet
Create Move Data
Move data updated
LSMART Motion ProfileMotor
Suggestions
Motion Calculator
Application testing
40
Motion DataMotion & Force
Profile
Linear Shaft Motor Data
Suggested Part numberSuggested
Part numberSuggested
Part number
Amplifier and Encoder
sizing data
LSMART Data Sheet
Force Duty
Force Velocity
41
Advantages of Linear Shaft Motor
• The ability to use commercially available servo drivers.
• Higher speeds are able to be achieved while retaining high precision.– At the same time, extremely high precision low speed
uniformity and high repeatability are possible.• Because of the non-contact design, no lubrication
or adjustment necessary. • Very simple setup and operation time. No need
for extended burn in.• Simple alignment and QC period. • Eco-friendly - no noise, no dust. • Energy efficient, - power requirements are lower
then that of ball screw systems.
( In comparison to types of liner motion )
43
World Wide Markets Served by Linear Shaft Motor
Inspection machines
Machining
Other
Manufacturing
equipment
45
Machining
• Milling Machine• Grinders• Press• EDM• Machining center• Laser machine• Wire cut EDM• Other
46
Manufacturing equipment • LCD• Boiling machine• Injection• Stage• Eject robot• Handling• Semiconductor before process• Semiconductor after process• Bonding• Surface mounter• Organic Electroluminescence (OEL) Display • Robot• Other
47
Other applications • Office Automation• Medical• Printer• Machine parts• Health• Automatic sliding doors • Food handling• Fiber• Research• Other