HTE System Architecture Proto Product Platform · HTE System Architecture Proto Product Platform | Marcel Grooten COO. ... ODME Toolex Replication Singulus ... Cell testing (flash

8-11-2008

HTE System ArchitectureProto � Product � Platform

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Marcel Grooten COO

8-11-2008 2

OTB Solar

OTB Solar is a leading company in the design, engineering, development

and manufacturing of inline production equipment for the solar industry.

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Solar PV Value Chain

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Company evolution

Philips ODM

Mastering / Molding

Toolex Alpha

OD&ME

ODME

Toolex

Replication

Singulus

OT

B-E

VDL

OT

B-S

OT

B-D

OTB-E

87

89

91

93

95

97

99

01

03

05

07

Worlds 1st inline CD production system: monoliner MKI

Worlds 1st inline CD mastering system: AMS

Worlds 1st inline soft contact lens production system

Worlds 1st inline SOLAR cell production system

Philips PolyLED

Thin film SiN PECVD tool for Solar: DEPx

Worlds 1st inline PLED production system: PCAP

Fully electrical Injection Molding System: MoldPro

inline CD-R production system: Dye-Line

inline DVD-R production system: Profi-Line

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Inline Solar Cell manufacturing equipment

� Fully inline PV production platform

� Integration latest technologies:

• Wet chemical

• SiN deposition,

• Screen printing processes

� Up to 2400 PV Solar Cells / hour

� Capacity up to 80 MWPeak / year

� MONO & MULTI process available

OTB Solar

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Wafer to Cell

1. Unstacking

2. Etching (saw damage & texturisation)

3. Emitter diffusion (p/n junction)

4. Etching phophoric layer (HF)

5. Anti Reflex coating & Passivation (SiNx:H)

6. Printing fingers and back surface field (Ag; Al)

7. Sintering Ag

8. Isolation p/n (laser)

9. Cell testing (flash test)

10.Binning

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LINEx System Overview

BACCINI PRINTER A

BACCINI PRINTER B

T4A*DEPX-1000 CCW*

T4B*

DEPX-1000 CW*RENA INTEXCLEAN DESPATCH DCF-3640

RENA INOXCLEAN

CENTROTHERM FURNACE

* OTB SOLAR

*

*

*

*

*

**

*

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Proto DEPx

First Proto system 2003

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Proto concept LMS

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PECVD, ETP Source:

Ar-NH3-SiH4 plasma expansion

Remote technique

Good uniformity

Ultra-high deposition rates

(>20 nm/s possible)

Ar/NH3 plasma expansion

nozzle with NH3 injection

} cascade plates (4x)

anode plate

electrode

Ar gas inlet

isolating plates

SiH4 injection ring

cathode

Ar/NH3 plasma expansion

nozzle with NH3 injection

} cascade plates (4x)

anode plate

electrode

Ar gas inlet

isolating plates

SiH4 injection ring

cathode

nozzle with NH3 injection

} cascade plates (4x)

anode plate

electrode

Ar gas inlet

isolating plates

SiH4 injection ring

cathode

} cascade plates (4x)

anode plate

electrode

Ar gas inlet

isolating plates

SiH4 injection ring

cathode

Plasma Source

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PECVD reactor

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DEPx 1000 / 1500

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Total overview

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The Product

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DEPx Next Generation Platform

The Need

• At start, the technology oriented market appreciated and accepted a proto and product with distinctive features

• After couple of years market developed into focus on operation. This forced the need for the next step � CAPEX & OPEX reduction:cost reduction, higher productivity and reduced footprint

The Approach

• Load locking the wafers turned out to be limiting constraint � load locking carriers instead of products

• Tool has been optimized for technology and functionality, not for productivity and process control. � use full area for deposition

• Uptime limiting factor vacuum leaks on loadlock� use vertical surfaces to avoid sensitivity for wafer contamination.

Redesign system architecture on acquired knowledge

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DEPx 2100 / 2400

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Competition India

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Competition Asia

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System Architecture

Focus on

• productivity,

• cost reduction

• scalability

• lean design

• competitive

• versatile.

Focus on

• customer needs,

• key features,

• reproducibility and

• reliability.

• process control

• value engineering

Focus on

• Technology

• Market entry,

• Short time to market by common of the shelf parts and modules

• automate key process

PlatformProductProto

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Thank you

for your attention

OTB Group B.V.

Luchthavenweg 10, 5657 EB Eindhoven

P.O. Box 7005, 5605 JA Eindhoven, The Netherlands

phone +31 (0) 40 2581 581 fax +31 (0) 40 2548 921

website www.otb-group.nl

e-mail [email protected]