Greatest challenges of the 21 st Century: To create computing capability that can operate with THz speed with Terabits/cm 2 information storage, and to apply this technology in biotechnology, business, and education •Speed drives technology •Technology drives society
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Greatest challenges of the 21 st Century: To create computing capability that can operate with THz speed with Terabits/cm 2 information storage, and to.
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Greatest challenges of the 21st Century:
To create computing capability that can operate with THz speed with Terabits/cm2 information storage, and to apply this technology in biotechnology, business, and education
•Speed drives technology
•Technology drives society
“Terascale electronics---endless quest for IC speed”
3D heterogeneous systems: bonding, alignment, via etching/filling
GaAs/Si?--killer tech
Opportunities for more Si mainstream technologies:
---Decades beyond the Roadmap
Stacked chip assemblies (logic, memories, interposer for passives);
Heterogeneous systems for sensors and MEMS;
Hard IP core-based SOC designs (including mixed signal);
High speed processors;
LAN architectures (for wireless applications and/or for multiplexed interconnects).
Gutmann et al (2001)
Pictorial Representation of 3D Integration Conceptusing Wafer Bonding,
* Figure adapted from IBM Corporation and used with permission.
Via Plug
Second Level(Thinned Substrate)
First Level
Third Level(Thinned Substrate)
Via Bridge
Bond
DeviceSurface
DeviceSurface
Bond(Face-to-face)
(Face-to-back)
DeviceSurface
Substrate
Substrate
Substrate
J. Lu et al
•Processing issues: bonding-alignmentthrough wafer via etchingbarrier and metallization
•Reliability:thermo and mechanical stabilityelectromigrationheat extraction
Broad band interconnect technology---high speed data transfer
Replacing electrical connection by optics:•Modulators/switches: electro-optic, optic-optic•Optical waveguides•Data compression (software)
Modulators guide
Chip stack
switches
fiber
Or: wireless!
light
from THz source: A
modulating signal: B
read out: C
Mach-Zehnder Ring
B C
0101
0011
0001
A
AB
Cheterostructurelayer
substrate
d
R. Kersting, G. Stasser, and K. Unterrainer, Terahertz phase modulator, Electr. Lett., 36, 1156 (2000)
Electro-optic modulator
Electrical signal
Nonlinear EO
Modulated light
light
Optical switches: •MEMS---mirror switches: D. Bishop et al, Physics Today Oct 2001 (Lucent)•Nanotube switches: Zao et al (2001)---THz speed•Quantum dots switches: Dutta et al (2001)---THz speed
• Bump-bond optoelectronic chip on top of complete CMOS package
• Grow optoelectronic components monolithically; local microphotonic waveguides grown and patterned; polymer waveguide layers for off-chip and longer distance
• Monolithic optoelectronic components; incorporate longer waveguides into metal interconnect package
• Use waveguides within sensor-chip or system-on-a-chip paradigm
waveguide
metal or multilayer dielectric mirror
via
cladding
receiver
Agarwal, Ponoth, Plawsky, Persans: Appl. Phys. Lett. 78, 2294 (2001)
Mainstream computer/communication technology:
•Strong industrial/State/Federal partner support•Enormous employment opportunities•Decades of growth---expected more growth in decades
End of device scaling does not imply end of Si technologies!
Emerging technologies
•Nano-scale electronics: very rich and unexplored science•Strong Government support•Long term benefits (not likely mainstream computing
in at least 20 years)
---The greatest and immediate impact may not be in electronics, but in biomedical applications
“Terascale electronics---endless quest for IC speed”
• ULSI chip divided in tiles • Communicate via plasma wave electronics receiver-transmitter pairs
Michael S. Shurhttp://nina.ecse.rpi.edu/shur/
Receiver-transmitter pairs
Source Drain
Gate2Delectronfluid
GateInsulator
Ug
Plasma wave
Deep sub-0.1
Smalley group (2001)
Room temperature single electrontransistor using nanotube
Oriented & interconnected nanotube networks—Ajayan et al
– Local modification and Junction formation
– Termination (cutting of structures)
Catalyst
Junctions
Focused Ions
Fantastic opportunities in applied and basic science research
Examples:
New materials synthesis: polymers; nitrides, carbidesNovel polymer-metal, polymer-cermic, polymer-polymer composites:Novel phase separation, crystallization, dynamic growth phenomenaNovel interfacial diffusion, reactions, and transformationsNovel nano-structure science; light emitting nano semiconductorsNovel non-linear thin film materials; high electro-optic coefficient materialsNovel opto-electronics materials, layered structuresQuantum effect on narrow linesMaterials response under extreme speed and frequencyReal time atomic scale microscopies
glas
s pl
ate
Nano-Si or nano-C layer
THz gratinghelps coupling
reference chip sample chip
THz Bio-Chip for Sensitive Detection
THz signature or fingerprint of genetic materials: DNA, RNA or Protein attach to nano-layer in sample chip, from 10 GHz to 10 THz frequency range. (Zhang, Kersting)
THz wave
On-Chip
Interconnect
3-Dimensional
Interconnect
3D Chips
Microsystems
•Non-Electronic Chips
•Scalable Systems
Yesterday
Today
Tomorrow“Norton” Facility
(IC Laboratory) 5”-8” 2µ CMOS
MCR(Wafer Processing
R&D) 8” State-of-the-Art Wafer Fab
Terascaleelectronics?Bio-devices?
•Welcome students doing PhD at Rensselaer
•Welcome visiting scholars and collaboration
Electrical Storages
•Memory:Trenches/Stacked capacitors
•Passives capacitors
Magnetic storage---towards terabits/in2
C. Ross, Annu. Rev. Mater. Res. 2001. 31:203-235.
Three strategies:
• exchange-decoupled grains (conventional)•In-plane patterned media•Perpendicular patterned media
Limits on magnetization:---Nayak/Wang/Korniss (Physics)