Gimbal-Less Two-Axis Scanning MEMS Micromirrors X Tilt [degl Y Voit. Diff. at X Volt. Diff. at Y Volt. Diff. at X Volt. Diff. at No Filter 130 Hz Filter Time Isl No Filter 130 Hz Filter

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Gimbal-Less Two-Axis Scanning MEMS Micromirrors

Device Datasheet S2684

Device Parameters SummaryDevice ID : S2684

Actuator Type : A1B2.1

Mirror Type and Size : Bonded mirror of 3.6mm diameter

Mirror Coating : Gold

Maximum Angle - X Axis [degrees] : 4.0584

Maximum Angle - Y Axis [degrees] : 4.0664

Maximum Voltage - X Axis [V] : 118

Maximum Voltage - Y Axis [V] : 118

Bias Voltage [V] : 70

Maximum Angle - Coupled Axes [degrees] : 5.0368

Resonant Frequency - X Axis [Hz] : 332

Resonant Frequency - Y Axis [Hz] : 334

Quality Factor- X Axis : 17

Quality Factor - Y Axis : 15

Recommended LPF Cutoff Frequency (6th Order Bessel) : 130

Date and Time Report was Created: 12-Jul-2013 at 15:16:1

1

Static ResponseVoltage vs. Angle - Individual Axes

Voltage vs. Angle - Coupled Axes

2

Frequency ResponseSmall Signal Frequency Response - Magnitude

Small Signal Frequency Response - Phase

3

Step ResponseX-Axis Step Response

Y-Axis Step Response

4

2D Lookup TablesVoltage vs. X Angle - Lookup Table

Voltage vs. Y Angle - Lookup Table

5

Y Angle vs. X Angle - Addressable Angles

2D Lookup Tables

6