Germanium: from material to FET devices · 1 1. Background 2. Advantages and some issues about germanium material and process 3. Germanium FET devices in NDL Outline

Germanium: from material to FET devices

Guang-Li Luo

Research Fellow

National Nano Device Laboratories

1

1. Background

2. Advantages and some issues about germanium material and process

3. Germanium FET devices in NDL

Outline

Requirements for logic• High on‐off ratio Ion/Ioff

105…107.• High Ion (high speed).• Low Ioff (low static power).• Steep slope in

sub‐threshold, i.e., small SS.

Ion=W/LCox(Vg-Vt)Vd

n+ n+p

W

L

VG

Ioff

FET Basics

2

22/20-10

7,5,3…ok?

For Lg<5nm

3

Intel 32nm SoC platform technology,iedm09, p.647

Intel 22nm SoC platform technology,iedm12, p.44

4

Node name vs. gate length

Definition of FinFET at 10nm and 7nm nodes

10nm node

7nm node

Frederic Boeuf, STMicroelectronics, IEDM short course, 2013

5

Source to drain tunneling will set an ultimate limit on scaling down.

Tsi=4nm

Direct tunneling between source and drain @ Lg < 5nm (not the node name)

7

When will non-Si be possibly used?(a frequently asked question)

8

Why germanium channel?

• Low bandgap

Low Vt, therefor low Vdd; but off current

9

Situations for Ge MOSFETs

Gate-Stack:Successful high-k/GeO2/Ge gate stack process.

Ultrathin Si cap passivation of Ge before high-k deposition.

N+/P Ge junction:n-type dopants diffuse fast in Germanium; low activation rate.

Short-channel nFETdevice hard to fabricate.

Metal contact with N+-Ge:Strong Fermi Level Pinning of metals close to valence band edge

of Ge. Contact resistance to n+ Ge can be a serious problem.

Metal contact with P+-Ge is good.

Ge pMOSFETs are successful, but Ge nMOSFETS still have

many problems!

This is also why “Ge pFETs + III-V nFETs” finds a chance ?

Germanium Material:Ge blanket epitaxy on Si with PDA for TDs reduction; Selective Epitaxy

of Ge in small areas.

P

10

Ge layer

Si-sub

Ge critical thickness: 1-2nmLattice mismatch

2um Ge on Si with 850C, 10min

in-situ annealing Ref: JECS, 156(9), H703-H706 2009

Ge SEG in 50 nm SiO2 trenches

Ge epaitxy on Si substrates: dislocation reduction

High density of

dislocations in Ge/Si

11

Improving the high-k/Ge interface quality by GeO2 interlayer

Adding GeO2 IL reduces Dit, but leads to increasing of EOT or lower Cgate

Gate stack with low Dit and low EOT is desirable!

12

P Type Doping in Ge (easy !!)

13

N Type Doping in Ge (difficult !!)

The in-situ doping in epitaxy is possibly

a feasible way for achieving n-type

dopant in Ge.

No diffusion of phos in Ge is observed.

in-situ doping is promising

14

Experimentally obtained SBHs BN on n-Si and

n-Ge and reported metal work functions M.

Appl. Phys. Lett. 91,

123123 2007

metal-induced-gap-state MIGS

Easy ohmic contact for metal/p-Ge

But difficult for metal/n-Ge

Good metal/n-Ge contact can be achieved by high

concentration doping of n-type dopant in Ge through reducing

the electron tunneling barrier width. However there is still a

long way to go in term of contact resistivity.

15

Ge p-channel FinFETs Directly on SOI Substrate

IEDM2012, p.383

16

Ge Gate-All-Around FETs on SOI Substrates

IEDM2011, p.826

17

Suspended Ge Gate-All-Around Nanowire nFETs with

Junction Isolation on Bulk Si

IEEE SILICON NANOELECTRONICS WORKSHOP (SNW) 2016

18

GeSi Source/Drain Ge nMOSFET

Three advantages are predicted:•Tensile strain enhanced electron

mobility;

•Suppressed P diffusion in the GeSi

S/D;

•Reduction of leakage due to the

relatively large bandgap of Ge1-xSix.

p-Ge (100) sub

Gate

n+-Ge1-xSixDrain

[110]

tensile

n+-Ge1-xSixSource

p-Ge (100) sub

Gate

n+-Ge1-xSixDrain

[110]

tensile

n+-Ge1-xSixSource

J

IEDM2009, p.689

Kx

Ky

Kz

[-111 ]

[111]

[11-1]

[1-11]

J

T[110]

Kx

Ky

Kz

[-111 ]

[111]

[11-1]

[1-11]

J

T[110]

EL

EL+

EL-

Estrain

EL

EL+

EL-

Estrain

20

Si FinFETs

When Si comes to end, germanium may be the most

promising among all non-Si materials in high power

application because of its high mobility. But for low power

application, its chance is small because of its natural high

leakage due to low band-gap.

Conclusion