This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center
and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.
◄ Inability of process tools to provide useful data
to factory information and control system (FIDS)
limits opportunity to monitor and predict
equipment health
◄Long wait times during equipment maintenance
reduces the amount of usable resources in the
factory increasing product queues and creating
bottlenecks
15 October 2012
How these industry detractors are
being addressed by ISMI?
◄Creating industry guidance and methodology for fingerprinting
◄Creating guidance for practical creation and use of independent fingerprints and fault detection application models
◄Demonstrating requirements and factory level management of fingerprint specifications to promote and improve equipment traceability, reliability and health assessment
◄Enhancing data availability and definition for multiple applications (e.g., FDC, APC, PHM, EPT, SPC, WTW, etc.)
15 October 2012
What is Fingerprinting?
◄A fingerprint is a unique representation of the functional
performance of a semiconductor equipment or one of its
components
◄The goal of fingerprinting is to return the equipment to its
previous condition or to match it to an optimally performing
equipment by understanding its differences in relation to a
“golden” fingerprint
In a manufacturing context fingerprint
is…
◄A set of data variables associated with the equipment
component being fingerprinted
◄Sampled at some rate over some period of time
◄Transformed and analyzed using a set of mathematical
techniques
◄To generate a result that represents the state of that
equipment component at that time
5
15 October 2012
Differentiation Between Data
Mining and Fingerprinting
◄Data mining uses mathematical
techniques that are applied to data stored
in the factory database searching for
indicators of problems or potential issues
with the equipment or processing.
◄Fingerprinting is a systematic approach
that uses equipment component data to
calculate related parameters that help in
the determination of equipment health
and performance.
Fingerprinting landscape scopeareas of interest
• Fingerprinting can be applied to:
◄Single isolated components
◄Support sub-systems
◄Entire process delivery systems
◄And even abstract items (e.g.,
key process trace variable)
7
Fingerprint stakeholders
• Stakeholders span over multiple organizations and roles
8
within the equipment supplier…
Test engineering, manufacturing QA
Site installation and equipment qualification
support
Field service
Application support
… and the fab customer
Equipment and maintenance engineering
Production operations
Process engineering
15 October 2012
Fingerprint Use Cases
Being Considered
◄Equipment Acceptance and Qualification
◄Functional capability
◄Process capability
◄Chamber-to-Chamber Matching
◄Machine-to-Machine Matching
◄Equipment Qualification After Maintenance
◄Maintenance & part replacement
Perform
baseline test
Determine
critical
parameters
Critical
parameters
identified?
Perform
Chamber
adjustments
Retest
Matching
accopmplished?
Document and
store results
End
Start
Fingerprinting benefits throughout the
equipment life cycle
◄Benefits range from
◄Ensuring multiple tools are shipped in an identical state
◄Comparing tools from one delivery to the next
◄Speeding tool acceptance (and “time to money”)
◄Avoiding incipient failures
◄Reducing scheduled maintenance time
◄ Improving field service performance (time, hit rate)