Expanding Impedance Expanding Impedance Measurement to Nanoscale: Nanoscale: Coupling the Power of Scanning Probe Microscopy with Performance Network Analyzer (PNA) (PNA) Hassan Tanbakuchi Senior Research Scientist Agilent Technologies, Inc. Agilent E Seminar August 2008 Page 1
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Expanding ImpedanceExpanding Impedance Measurement to Nanoscale:Nanoscale:
Coupling the Power of Scanning Probe Microscopy with Performance Network Analyzer (PNA)(PNA)
Hassan Tanbakuchi Senior Research Scientist Agilent Technologies, Inc.
DPMM approach:DPMM approach:Use the Flatband transfer function
that is function of dopant density ( variable capacitor) that can be used as an AM mixer to modulate the reflected MW signal at the rate of Flatband drive frequency (<100 KHz). The said AM modulation index is
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August 2008Page 19
function of the dopant density.
DPMM Block Diagram/Physical Realization
ACPLR OUT
CPLR Thru
Source Out
A
LO
A/D
SourceHalf wave lengthCoaxial resonator
50 Ohm
ProbeAMP
Signal IN
B
AMPAMP AMP
AMP
dopant
LO
A/D
AMP
Signal outT L k i
RCVR IN
DPMM
To Lock in
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DPMM Internal Structure and as an add on Module to PNAto PNA
DPMM PNA PORT1
DPMM Internal MIC detail DPMM as an add measurement module to PNA
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System OverviewPhotodetector
Coaxial cableCoaxial Resonator
Sample
Coaxial Resonator
The MW diplexer
Network Analyzer
Ground/Shield
Sample scanning AFM in X and Y and Z (closed loop)
• Network analyzer sends an incident RF signal to the tip throughthe diplexer.
• RF signal is reflected from the tip and measured by the Analyzer.• The magnitude and the phase of the ratio between the incident andThe magnitude and the phase of the ratio between the incident and
reflected are calculated• Apply a model to calculate the electrical properties• AFM scans
AFM ti t ifi l ti t d i t bi
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• AFM moves tip to specific locations to do point probing
SRAM Image
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S i l• Scanning only• qualitative• poor sensitivity• limited 1015-1020 Atoms/cm3