Overview The ATLAS‐101 motorized linear air bearing stage is a fully‐supported, fully preloaded air bearing design. High performance air bearings with integrated linear servomotors and opBcal encoders deliver totally non‐ contact, fricBonless moBon with submicron resoluBon and repeatability. Designed to meet the demanding needs of precision producBon faciliBes, these systems are equally suited to laboratory environments where flexibility and ease of use are criBcal. Dynamic and Sta1c Performance Air bearings are the proven standard for superior smoothness of moBon and posiBoning control in high precision applicaBons. Low fricBon enables smooth acceleraBon and Bght velocity stability. The eliminaBon of sBcBon and backlash allows posiBoning resoluBon of ±1 encoder count, even at the highest resoluBon. Without mechanical contact, posiBoning repeatability is also greatly improved. Nelson Air Corp. precision air bearing positioning 559 Rt. 13 South, P.O. Box 2, Milford, NH 03055 Tel: 603‐673‐3908, Fax 603‐672‐3008 e‐mail: [email protected]web: www.nelsonair.com Page: 1 of 7 Ultra‐Precision Linear Air Bearing Stages ATLAS‐101 The smallest in Nelson Air’s Atlas line of standard air bearing stages, Atlas‐101 stages offer superior posi1oning performance in an extremely compact package. Features: • Table Size of 115 x 115 mm • Travel up to 400 mm • 100 N max load • Velocity to 1 m/s • Accelera1on to 2 G’s • Encoder resolu1on to 0.001 μm • Straightness/Flatness to ±0.25 μm • Repeatability to ±0.040 μm • Ultra‐low velocity ripple • Posi1oning Resolu1on of ±1 count • Zero‐maintenance ‐ no lubrica1on • Cleanroom compa1ble • Ultra‐Precision Unibody Air Bearing Construc1on • Integrated linear op1cal encoder • Non‐cogging linear motor • Axes can be stacked for XY opera1on or operate ver1cally Applica1ons: • Posi1oning • Scanning • Metrology • Inspec1on • Calibra1on • Clean Rooms
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ATLAS-101 Ultra-Precision Linear Air Bearing Stages The ATLAS‐101 motorized linear air bearing stage is a fully‐supported, fully preloaded air bearing design.
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