4 Prinsip Position Sensor [Compatibility Mode]

8/13/2019 4 Prinsip Position Sensor [Compatibility Mode]

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4 : PRINSIP DASAR SENSOR

Program Studi Fisika

FI 365FI 365FI 365FI 365 SISTEM INSTRUMENTASISISTEM INSTRUMENTASISISTEM INSTRUMENTASISISTEM INSTRUMENTASI

Waslaluddin, dkk


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MI

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MENTASI

MI

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MI

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MI

NSTRU

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PRINSIP DASAR

ISI KULIAH

Sensor Mekanik

Sensor Elektrik

Sensor Temperatur dan Radiasi Sensor Magnetik dan Kimia

FI

365

FI

365

FI

365

FI

365

SISTE

SISTE

SISTE

SISTE

11


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MI

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MI

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MI

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PRINSIP DASAR

SENSORMEKANIK

FI

365

FI

365

FI

365

FI

365

SISTE

SISTE

SISTE

SISTE

22


4/43

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MI

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PRINSIP DASAR

SENSOR MEKANIK:

Velocity and AccelerationVelocity and Acceleration Capacitive Accelerometers

Piezoresistive Accelerometers Piezoelectric Accelerometers

Thermal Accelerometers

Heated-Plate Accelerometer

Heated-Gas Accelerometer

Velocity and AccelerationVelocity and Acceleration Capacitive Accelerometers

Piezoresistive Accelerometers Piezoelectric Accelerometers

Thermal Accelerometers

Heated-Plate Accelerometer

Heated-Gas Accelerometer

Pressure SensorsPressure Sensors

Mercury Pressure Sensor

Piezoresistive Sensors

Capacitive Sensors VRP Sensors

Optoelectronic Sensors

Vacuum Sensors

Pirani Gauge

Pressure SensorsPressure Sensors

Mercury Pressure Sensor

Piezoresistive Sensors

Capacitive Sensors VRP Sensors

Optoelectronic Sensors

Vacuum Sensors

Pirani Gauge

FI

365

FI

365

FI

365

FI

365

SISTE

SISTE

SISTE

SISTE

33

Gyroscopes Rotor Gyroscope

Monolithic Silicon Gyroscopes

Optical Gyroscopes

Gyroscopes Rotor Gyroscope

Monolithic Silicon Gyroscopes

Optical Gyroscopes

Force, Strain, and Tactile SensorsForce, Strain, and Tactile Sensors

Strain Gauges

Tactile Sensors .

Piezoelectric Force Sensors

Force, Strain, and Tactile SensorsForce, Strain, and Tactile Sensors

Strain Gauges

Tactile Sensors .

Piezoelectric Force Sensors

Ionization Gauges Gas Drag Gauge Ionization Gauges Gas Drag Gauge


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MI

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MI

NSTRU

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MI

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MI

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PRINSIP DASAR

SENSOR TEKANAN (PRESSURE SENSOR):

Definisi makroskopisTekanan (P) = Gaya mengenai permukaanSatuan luas

P = F/A

Definisi mikroskopisTekanan (P) berdasar teori kinetik gas =Total energi kinetik molekul gas mengenai permukaan persatuan volume

FI

365

FI

365

FI

365

FI

365

SISTE

SISTE

SISTE

SISTE

66

= k =Ek = energi kinetik molekul gasV = volume gas

N = jumlah molekul gasR = konstanta gasT = temperatur gas

Satuan tekanan (P):1 Pa=1.4510.4 lb/in2 =9.86910.6 atm=7.510.4 cm Hg.

1 atm=760 torr=101,325 Pa.

1 psi=6.89103Pa=0.0703 atm.(sistem US)


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MI

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MI

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MI

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MI

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PRINSIP DASAR

Bellow & Membran Strain-gage Pressure Sensor

Z : defleksir : jari-jari membran

FI

365

FI

365

FI

365

FI

365

SISTE

SISTE

SISTE

SISTE

77

plat tipis

membran

S : tensi pada membrang : tebal membran : stress pada membran

Untuk plat :


9/43

MI

NSTRU

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MI

NSTRU

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MI

NSTRU

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MI

NSTRU

MENTASI

PRINSIP DASAR

Membran/diaprahm Pressure Sensor

FI

365

FI

365

FI

365

FI

365

SISTE

SISTE

SISTE

SISTE

88


10/43

MI

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MI

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MI

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MI

NSTRUMENTASI

PRINSIP DASAR

Membran/diaprahm Pressure Sensor

Defleksi yang kecil ditengah-tengah membranjari-jari membran rnberubah

FI

365

FI

365

FI

365

FI

365

SISTE

SISTE

SISTE

SISTE

99

Untuk

dimana


11/43

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MI

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MI

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MI

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PRINSIP DASAR

Capacitive Transduction

d

AC ro= ( )

( )( )223

2

16

13rR

EhPry

=

Bagaimana transduksi P C ?

d

A = r2

d y(r)

FI

365

FI

365

FI

365

FI

365

SIST

E

SISTE

SISTE

SIST

E

1010

=

=

R

ro

R

ro

d

ry

rdr

ddr

ryd

rC

00)(

1

2

)(2

...)(

1)(

1

...11

1+

+=

++=

rdrd

ry

d

ry

rdrx

x

Maka:

Ingat pendekatan


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MI

NSTRUMENTASI

MI

NSTRUMENTASI

MI

NSTRUMENTASI

MI

NSTRUMENTASI

PRINSIP DASAR

Capacitive Transduction

( )

=

=

RR

rdrd

ry

dd

ry

rdrC

ro

R R

ro

R

ro

R

ro

622

00

1212

)(1

2

)(1

2

Sehingga:

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1111

Edhddd 3

0 0 162

atau ( ) PhEd

Rd

RPC roro32

622

16

1)( +=


13/43

MI

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MI

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MI

NSTRUMENTASI

MI

NSTRUMENTASI

PRINSIP DASAR

Capacitive Pressure Sensor

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1212


14/43

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MI

NSTRUMENTASI

MI

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MI

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PRINSIP DASAR

Piezoresistive Transduction

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1313


15/43

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MI

NSTRUMENTASI

MI

NSTRUMENTASI

MI

NSTRUMENTASI

PRINSIP DASAR

Piezoresistive Transduction

transversal

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1414

perpendicular/transversal

and parallel/longitudinal

components of stress

longitudinal

and are the

perpendicular and parallel

piezoresistive coefficients


16/43

MI

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MI

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MI

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MI

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PRINSIP DASAR

Piezoresistive Transduction - Circuit

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1515

Ra & Rc// stress

Rb & Rd stress


17/43

MI

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MI

NSTRUMENTASI

MI

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MI

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PRINSIP DASAR

Piezoresistive Transduction - Circuit

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1616

One chip Si-Piezoresistive sensor and signal conditioning

Pressure range: up to 5,2 bar Absolute

Operating temperature: -40 to 125 C

Supply voltage: 5 V 0.25 V

Transfer function: linear, ratiometric

Accuracy over full-scale: 1 % full span (10 to 85 C)


18/43

MI

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MI

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MI

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MI

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PRINSIP DASAR

Position, Displacement, and LevelPosition, Displacement, and Level Potentiometric Sensors

Gravitational Sensors

Capacitive Sensors

Inductive and Magnetic Sensors

LVDT and RVDT

Eddy Current Sensors & Transverse Inductive Sensor

Hall Effect Sensors & Magnetoresistive Sensors

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1717

pt ca ensors

Optical Bridge & Proximity Detector with Polarized Light

Fiber-Optic Sensors & FabryPerot Sensors

Grating Sensors & Linear Optical Sensors (PSD)

Ultrasonic Sensors

Radar Sensors :

Micropower Impulse Radar & Ground-Penetrating Radar

Thickness and Level Sensors :

Ablation & Thin-Film & Liquid-Level Sensors


19/43

MI

NSTRUMENTASI

MI

NSTRUMENTASI

MI

NSTRUMENTASI

MI

NSTRUMENTASI

PRINSIP DASAR

Displacement Sensor

Linear Variable Differential Transformer (LVDT)

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1818

Basic Principles:

a. AC current flows through primary coil, due to excitation voltage eex.b. Current is induced through a pair of secondary coils (eo1, eo2).c. The frequency of the induced AC current is the same as the excitation

frequency.d. The amplitude of the induced current in each secondary coil depends

upon the location of the movable core.


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MI

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PRINSIP DASAR

Displacement Sensor


If core is located in null position then secondary voltages are equal, asillustrated below.

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

1919


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PRINSIP DASAR


The input, xi

, is the MOTION of the rod to which the core is connected.

The output, eo, is the voltage difference between the induced voltages in the twosecondary loops.

Note: The output is inherently AM modulated

(The carrier is AC excitation of the primary loop).

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

2121

Note: Phase Shift occurs as xi

crosses null point


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PRINSIP DASAR


Simulated Output

Generator00Y/t Chart00

Generator01

1.000.750.500.250.00

-0.25-0.50-0.75-1.00

5.0

2.5

0.0

-2.5

-5.0

xi

eo

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

2222

FFT00Formula00 Y/t Chart01

ms

Hz

2 50 5 00 75 0 100 0 1 250 1 500 17 50 200 0 2 25 0

0.90.80.70.60.50.40.30.20.10.0

2.252.001.751.501.251.000.750.500.250.00


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PRINSIP DASAR


1.00

0.00

-1.00

1.00

Motion

LVDT output

How Do We Recover the LVDT Signal?

FI

365

FI

365

FI

365

FI

365

SIST

E

SIST

E

SIST

E

SIST

E

2424

ms

25 50 75 100 125 150 175

-0.75

4

0

-4

1.5

0.0

-1.5

Demod LVDT

Recovered Motion


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MI

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PRINSIP DASAR


Motion

LVDT output

0.8

0.4

0.0

0.35

0.00

LVDT Signal Recover Frequency Domain

FI365

FI

365

FI

365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

2525

Demod LVDT

RecoveredMotionHz

250 500 750 1000 1250

Y/t Chart 0 Y/t Chart 1

Y/t Chart 2 Y/t Chart 3

1.25

0.00

1.25

0.00


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MI

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MI

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UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

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PRINSIP DASAR

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

2626


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MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

2727


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MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

Displacement Sensor

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

2828


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MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

Displacement Sensor

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

2929

PRINSIP DASAR


31/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

Displacement Sensor

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3030

PRINSIP DASAR


32/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3131

PRINSIP DASAR


33/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3232

PRINSIP DASAR


34/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3333

PRINSIP DASAR


35/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3434

PRINSIP DASAR


36/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

PRINSIP DASAR

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3535

PRINSIP DASAR


37/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3636

PRINSIP DASAR


38/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3737

PRINSIP DASAR


39/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3838

PRINSIP DASAR


40/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

3939

PRINSIP DASAR


41/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

FI365

FI365

FI365

FI365

SIST

E

SIST

E

SIST

E

SIST

E

4040

PRINSIP DASAR


42/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

F

I365

FI365

FI365

F

I365

SISTE

SIST

E

SIST

E

SISTE

4141

PRINSIP DASAR


43/43

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

MI

NSTR

UMENTASI

F

I365

F

I365

F

I365

F

I365

SISTE

SISTE

SISTE

SISTE

4242

4 Prinsip Position Sensor [Compatibility Mode]

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