Sensor Principles and Microsensors Part 2 · Optical Sensors Optical chemical sensors . are usually configured as transducers, with transductions steps of...

Introduction to BioMEMS & Medical Microdevices

Sensor Principles and Microsensors Part 2 Companion lecture to the textbook: Fundamentals of BioMEMS and Medical Microdevices, by Prof. Steven S. Saliterman, http://saliterman.umn.edu/

Steven S. Saliterman

Electrochemical Sensors

Potentiometric Sensors Ion selective electrodes (ISE) into the nano-

dimension range New ion recognition chemistries New ion selective membranes Importance of the reference electrode

Voltametric Sensors Carbon paste electrodes (CPE) for organic

molecule detection Micro and Ultramicro electrodes Environmental monitoring Carbon nanotubules Stripping voltammetry

Privett, Benjamin J., Jae H. Shin, and Mark H. Schoenfisch. 2010. Electrochemical Sensors. Analytical Chemistry 82, no. 12:4723-4741.

Steven S. Saliterman

Electrochemical Sensors

Electrochemical Biosensors Selective and sensitive biological binding Aptamer-based biosensors Glucose, creatinine, pathologic bacteria, DNA Enzyme biosensors

Immunosensors Bacteria, virus and cancer biomarkers

Ion Selective Field Effect Transistors Based on the electrochemical phenomena

occurring within the chemically sensitive membrane placed on top of the transistor gate and on electrical transduction of the signal by this semiconductor device.

Privett, Benjamin J., Jae H. Shin, and Mark H. Schoenfisch. 2010. Electrochemical Sensors. Analytical Chemistry 82, no. 12:4723-4741.

Steven S. Saliterman

Ion Selective FET

Photocurable polymers have been used for encapsulation of ion selective field effect transistors (ISFET) and for membrane formation in chemical sensitive field effect transistors (ChemFET).

G D D

S S

G

P- Channel N- Channel

Charge Carriers In Charge Carriers Out

Shown: Insulated Gate Field-Effect Transistor (IGFET). MOSFET (metal oxide is common).

Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.

Steven S. Saliterman

Silicon (semiconductor) substrate.

A + + + + + + + + - - - - - - -

How a Field Effect Transistor Works

B + + +

+ + + + + + + + - - - - - - - -

A small signal on the plate above (gate) brings electrons to the surface, allowing current to flow and amplifying the original signal.

S

G

D

Steven S. Saliterman

ISFET Fabrication

Polyimide covered by a standard photoresist and photocurable epoxy acrylate.

The polymer layer after being applied to a wire bonded sensor glued to some substrate can be patterned using traditional photolithography techniques.

Left: ISFET with photocurable encapsulate (1), with openings over the gate (2), contact pads (3) and scribing lines (4).

Center and Right: Mounting, wire bonding and encapsulation.

3mm opening

Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.

Steven S. Saliterman

Membrane Formation

The best known method of ISFET membrane formation comes from traditional ion selective electrodes and is based on using a polymer matrix which is deposited over an ISFET gate and contains the required ion active components, like ionophore, plasticizer and lipophilic additives.

Achievements in development of traditional ISE with liquid inner contact resulted in hundreds of different membrane compositions that can be used as well in case of ISFETs.

Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.

Steven S. Saliterman

Applied Polymer and Analyte

Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.

Steven S. Saliterman Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.

Steven S. Saliterman Abramova, Natalia, and Andrei Bratov. 2009. Photocurable Polymers for Ion Selective Field Effect Transistors. 20 Years of Applications. Sensors 9, no. 9:7097-7110.

Steven S. Saliterman

Optical Sensors

Optical chemical sensors are usually configured as transducers, with transductions steps of electrical-optical-chemical-optical-electrical conversion:

Boisde, G. and A. Harmer, Chemical and Biochemical Sensing with Optical Fibers and Waveguides, Artech House, Boston (1996)

Steven S. Saliterman

Optical Fiber Blood Pressure Sensor

Esashi, Masayoshi. 2012. Revolution of Sensors in Micro-Electromechanical Systems. Japanese Journal of Applied Physics 51, no. 8:080001.

Steven S. Saliterman

Optical Fibers

An optical fiber consists of a solid cylindrical core of transparent material surrounded by a cladding of similar material but of lower refractive index than the core:

Steven S. Saliterman

The refractive index is the ratio of the speed of light in a vacuum to the speed of light in the medium:

1vacuum

material

cnc

= ≥

Snell’s law defines the relationship between incident and refracted light, measured as an angle from a perpendicular to the surface:

sin sini rn I n R=

Refractive Index & Snell’s Law

Steven S. Saliterman

Refraction can not take place when the angle of incidence is too large, or greater than the critical angle. For air (refractive index of 1) and glass (refractive index of 1.5), the critical angle is defined as:

arcsin( / ) 41.8c r in nθ = =

Critical Angle

Steven S. Saliterman

Acceptance Angle

The acceptance angle is the angle over which light rays entering the fiber will be guided along its core:

Steven S. Saliterman

Numeric Aperture (NA) is the “light gathering ability” of a fiber. The material NA relates to the refractive indices of the core and cladding:

( )

0

1

2 20 1 0

is the core index, is the cladding index, and is half the acceptance angle, and is the confinement angle.

sin sin

c

c

Wherenn

NA n n n

θθ

θ θ= − = =

Numeric Aperture

Steven S. Saliterman

Modes

Light propagates through the core in a series of wave fronts or modes.

Sterling, D.J., Technicians Guide to Fiber Optics, 3rd ed. Delmar Publishers, Albany, N.Y. (2000)

Steven S. Saliterman

Applications in Medicine

Glucose and anticoagulation monitoring:

Images courtesy of LifeScan, Inc. and HemoSense, Inc.

Steven S. Saliterman

Temperature:

Image courtesy of Braun

Harsanyi, G., Sensors in Biomedical Applications, Technology and Applications. Technomic Pub. Co., Lancaster, PA (2000)

Steven S. Saliterman

Pressure:

Fraden, J. “Noncontact temperature measurement in medicine.” Bioinstrumentation and Biosensors, D.L. Wise, Ed, Marcel Dekker (1991).

Steven S. Saliterman

Intraocular pressure:

Bergveld, A.P., “The merit od using silicon for the development of hearing aid microphones and intraocular pressure sensors.” Senors and Actuators 41:42, pp. 223-229 (1994)

Steven S. Saliterman

Pulse oximetry:

Steven S. Saliterman Parker, D. “Sensors for monitoring blood gasses in intensive care.” J Phys. E. Sci. Instrum. 20, pp. 1103-1112 (1987).

Steven S. Saliterman

Respiratory – spirometry and CO2:

Steven S. Saliterman

Implanted pacemaker and rhythm monitor:

Steven S. Saliterman

Summary

Electrochemical Sensors Potentiometry Sensors Voltametric Sensors Electrochemcial Biosensors Immunosensors

Ion Selective Field Effect Transistors (ISFET) and Chemical Sensitive FET (ChemFET).

Optical Sensors Optical chemical sensors Fiber optics

Clinical Applications