Hu_ch07v3.fm Page 259 Friday, February 13, 2009 4:55 PM 7 MOSFETs in ICs—Scaling, Leakage, and Other Topics CHAPTER OBJECTIVES How the MOSFET gate length might continue…
Microelectronics Technology Dopant Diffusion DOPANT DIFFUSION To form source and drain regions in MOS devices and also to dope poly-Si gate material. Used to form base regions,…