Documents 21.12.2009 Background of IPMCs IPMCs are smart materials that exhibit electromechanical (actuator).....

Slide 1 21.12.2009 21.12.2009 Background of IPMCs IPMCs are smart materials that exhibit electromechanical (actuator) properties and mechanoelectrical (sensor) applications…

Documents MEMS and Microsensors

1 An Introduction to Microelectromechanical Systems(MEMS) Bing-Feng Ju, Professor Institute of Mechatronic Control Engineering, College of Mechanical and Energy Engineering,…