Documents Work in Progress --- Not for Publication ITRS Conference, December 6, 2000 THE DEVICE Copper...

Slide 1Work in Progress --- Not for Publication ITRS Conference, December 6, 2000 THE DEVICE Copper Conductors (8 Levels) Low-k Dielectric Copper Plugs 1% of the thickness…

Documents 1 24 July 2002 Work In Progress – Not for Publication ITRS Conference 2002 July 24, 2002 San...

Slide 11 24 July 2002 Work In Progress – Not for Publication ITRS Conference 2002 July 24, 2002 San Francisco, California ITRS 2002 Yield Enhancement Update Milton Godwin…