BY SURAJ MENON S7,EEE,61 OUTLINE Lithography Introduction to EUVL Basic concepts Why do we need EUVL? EUVL Process Basic technology for EUV EUV masks All Reflective Optics…
Slide 1 Slide 2 Lithography (and briefly, Electrodeposition) July 10, 2008: Nano Education Institute at UMass Amherst bnl manchester ibm UMass Slide 3 How do we control the…
(12) United States Patent Klosner et al. US006416908B1 (10) Patent N0.: (45) Date of Patent: US 6,416,908 B1 Jul. 9, 2002 (54) PROJECTION LITHOGRAPHY ON CURVED SUBSTRATES…