Documents Traditional Nanotechnology Lecture 6 with contributions: M. Meyyappan, NASA Ames Research Center...

Slide 1 Traditional Nanotechnology Lecture 6 with contributions: M. Meyyappan, NASA Ames Research Center Peter Burke, UCI Slide 2 This is an Overview for more details take:…

Documents DIRECT ELECTRON-BEAM WRITING WITH HIGH ASPECT RATIO FOR FABRICATING ION-BEAM LITHOGRAPHY MASK

DIRECT ELECTRON-BEAM WRITING WITH HIGH ASPECT RATIO FOR FABRICATING ION-BEAM LITHOGRAPHY MASK 2002. 04. 20. Byeonug-Nam Lee, Yong-Hoon Cho Department of Physics, Chungbuk…