Documents MSE-630 Ion Implantation Topics: Deposition methods Implant -Depth & Distribution -Masking effects.....

Slide 1 MSE-630 Ion Implantation Topics: Deposition methods Implant -Depth & Distribution -Masking effects Damage annealing Slide 2 MSE-630 Manufacturing Methods Schematic…

Documents 1 Minimal focal length achievable with Be, R = 50µm at 17 keV => effective aperture : 295µm =>...

* Minimal focal length achievable with Be, R = 50µm at 17 keV => effective aperture : 295µm => best lateral resolution: 42nm (diffraction limit) * For lenses with…

Documents Minimal focal length achievable with Be, R = 50µm at 17 keV

* Minimal focal length achievable with Be, R = 50µm at 17 keV => effective aperture : 295µm => best lateral resolution: 42nm (diffraction limit) * For lenses with…