Slide 12 December 2003 – ITRS Public Conference Tsinchu, Taiwan ITRS 2003 Front End Process ITRS Conference December 2, 2003 Hsinchu, Taiwan Slide 2 2 December 2003 –…
Slide 1DRAFT - NOT FOR PUBLICATION 14 July 2004 – ITRS Summer Conference ITRS FEP Challenges Continued scaling will require the introduction of new materials and device…
Selective Atomic Layer Deposition of HfO2 on copper patterned silicon substrates Jaya Parulekar, Illinois Institute of Technology Sathees Selvaraj, University of Illinois…