Documents CONTROL OF ELECTRON ENERGY DISTRIBUTIONS THROUGH INTERACTION OF ELECTRON BEAMS AND THE BULK IN...

CONTROL OF ELECTRON ENERGY DISTRIBUTIONS THROUGH INTERACTION OF ELECTRON BEAMS AND THE BULK IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Songa) and Mark J. Kushnerb) a)Department…

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CONTROL OF ELECTRON ENERGY DISTRIBUTIONS THROUGH INTERACTION OF ELECTRON BEAMS AND THE BULK IN CAPACITIVELY COUPLED PLASMAS* Sang-Heon Songa) and Mark J. Kushnerb) a)Department…