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ECE-309E Microelectronics ECE, UIET, KUK-2010 ECE-309E Microelectronics Crystal Growth & Wafer Preparation ECE-309E Microelectronics ECE, UIET, KUK-2010 Why Silicon •Silicon…

Documents 1.Silicon crystal structure and defects. 2.Czochralski single crystal growth. 3.Growth rate and...

Slide 1 1.Silicon crystal structure and defects. 2.Czochralski single crystal growth. 3.Growth rate and dopant incorporation for CZ method. 4.Float zone single crystal growth…

Documents Silicon crystal structure and defects. Czochralski single crystal growth. Growth rate and dopant...

Slide 1 Silicon crystal structure and defects. Czochralski single crystal growth. Growth rate and dopant incorporation for CZ method. Float zone single crystal growth and…