Ion Implantation and Annealing of Crystalline Oxides and Ceramic Materials The University of Tennessee, Knoxville By : Younes Sina & Uk Huh C.W. WHITE, L.A. BOATNER, P.S. SKLAD, C.J. McHARGUE, J. RANKIN , G.C. FARLOW and M.J. AZIZ Oak Ridge Natronal Laboratory, Oak Ridge, TN 37831, USA
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Ion Implantation and Annealing of Crystalline Oxides and Ceramic Materials
The University of Tennessee, Knoxville
By : Younes Sina & Uk Huh
C.W. WHITE, L.A. BOATNER, P.S. SKLAD, C.J. McHARGUE, J. RANKIN , G.C. FARLOW and M.J. AZIZ Oak Ridge Natronal Laboratory, Oak Ridge, TN 37831, USA
Material
CaTiO3
SrTiO3
α-Al2O3
Fe implanted α-Al2O3
The unit cell of SrTiO3 consists of a central Ti4+-ion, which is octahedrally coordinated by 6 O2--ions. At the corners of the cube Sr2+-ions are situated
Ti
O
Sr
SrTiO3
Space group: Pm-3m Number: 221 Pearson symbol: cP5 Unit cell dimensions: a = 3.795 Å Atomic positions: Ti at (0, 0, 0) Ca at (1/2, 1/2, 1/2) O at (1/2, 0, 0)
CaTiO3
a≈c
Orthorhombic structure
Al
O
Al2O3
Pb (540 keV, 1x1015 /cm2)
CaTiO3
Crystal Damage
Annealing in air@ 270- 550 ⁰C
TEM
Rutherford Back Scattering(RBS)2 Mev He+
Pb (540 keV, 1x1015 /cm2)
SrTiO3
Crystal Damage
Annealing in air@ 270- 550 ⁰CFrom few minutes to many hours