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XII. Electron diffraction in TEM JEOL JEM-ARM200FTH Spherical- aberration Corrected Field Emission Transmission Electron Newest TEM in MSE
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XII. Electron diffraction in TEM

Feb 23, 2016

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XII. Electron diffraction in TEM. Newest TEM in MSE. JEOL JEM-ARM200FTH  . Spherical-aberration Corrected Field Emission Transmission Electron Microscope. Other TEM in MSE. JEOL JEM-3000F . JEOL JEM-2100 . Simple sketch of the beam path of the electrons in a TEM. - PowerPoint PPT Presentation
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Page 1: XII.  Electron diffraction in TEM

XII. Electron diffraction in TEM

JEOLJEM-ARM200FTH  

Spherical-aberration Corrected Field Emission Transmission Electron Microscope

Newest TEM in MSE

Page 2: XII.  Electron diffraction in TEM

Other TEM in MSE

JEOL JEM-3000F 

JEOL JEM-2100 

Page 3: XII.  Electron diffraction in TEM

Diffraction pattern: scattered in the same direction; containing information on the angular scattering distribution of the electronsImage plane (bottom)

Simple sketch of the beam path of the electrons in a TEM

The diffraction pattern and the image are related through a Fourier transform.

Page 4: XII.  Electron diffraction in TEM

12-1. Electron radiation(i) ~ hundreds Kev

ph

Typical TEM voltage: 100 – 400 KV

Relativistic effect should be taken into account!

SEM typically operated at a potential of 10 KV v ~ 20% c (speed of light)

TEM operated at 200 kV v ~ 70% c.

highly monochromatic than X-ray

Page 5: XII.  Electron diffraction in TEM

ph

20

02

2

0 2122

cmKEKEm

cKEKEmp

220

22 )()( cmpcE

20

2 cmKEmcE 22

0222

0 )()()( cmpccmKE 22

022

02 )()()( cmcmKEpc

420

420

20

2 2 cmcmcKEmKE 2

02 2 cKEmKEpc

Massless particle: cKEp /

Page 6: XII.  Electron diffraction in TEM

20

0 212

cmKEKEm

hph

voltageeKEh = 6.62606957×10-34 m2kg/sm0 = 9.1093829110-31 Kgc = 299792458 m/se = 1.60217657×10-19 coulombs

1eV = 1.60217656510-19 J (Kgm2/s2)

Page 7: XII.  Electron diffraction in TEM

For 200 KV electrons)/smJ(Kg 10204.3keV 200 2214 KE

2831

14

20 )10998.2(10109.92

10204.312

1

cmKE

0934.11956.01

221431

234

0 s/mKg10204.3Kg10109.92Kg/sm10626.6

2

KEmh

m1074.2mKg/s10416.2

Kg/sm10626.6 1222

234

m 10506.2

21

12

12

20

0

cmKEKEm

h

Page 8: XII.  Electron diffraction in TEM

For 20 KV electrons)/smJ(Kg 1020436.3keV 20 2215 KE

619

28312

0 10022.110602.1

)10998.2(10109.92)V(2

ecm

(m) 106.820000

1022.11022.1 1299

KE

00973.101957.0110022.1

2000012

1 620

cm

KE

J/eV1060217.1Kg10109.92Kg/sm10626.6

2 1931

234

0

mh

91022.1

Page 9: XII.  Electron diffraction in TEM

For X-ray Wavelength = 1.542 Å

Ehc

pchc

ph

hcE

(m) 10542.1(m/s) 10998.2kg/s)(m 10626.6

10

8234

E

)kg/s(m 10288.1 2215

(eV) 1004.8V)(J/ 1060217.1

(J) 10288.1 319

15

eE

J

(nm) (eV/nm) 1240~

(m) (eV/m) 102399.1(eV)

6

E

Page 10: XII.  Electron diffraction in TEM

(ii) electrons can be focusedc.f. x-ray is hard to focus

(iii) easily scatteredxe ff 410

: form factor for electron and x-ray, respectively

xe ff and

Form factor for electron includes nucleus scattering!

(iv) need thin crystals

< 1000Å, beam size m

Page 11: XII.  Electron diffraction in TEM

12-2. Bragg angle is small sin2 hkld

for 100 KeV

A 037.0 Assume d = 2Å

037.0sin22 0925.0sin o53.01800925.00925.0

for 200Kev

A 025.0 o34.01800625.00625.0

Page 12: XII.  Electron diffraction in TEM

12-3. d spacing determination is not good sin2 hkld sin2d (brevity)

For fixed

sin2d

2sin

cos2

d

)cot(sin

cossin2

dd

cot/ dd0 ;0cot ;90o d

we can get more accurate d at higher angle!o5.0In TEM

Not good for d determination!

Page 13: XII.  Electron diffraction in TEM

12-4. Electron diffraction pattern from a single crystalline material

Example: epitaxial PtSi/p-Si(100)

Ewald sphere construction: is very small k is very large compared to the lattice spacing in the reciprocal space

Page 14: XII.  Electron diffraction in TEM

(1) An electron beam is usually incident along the zone axis of the electron diffraction pattern.

Page 15: XII.  Electron diffraction in TEM

The sample can be tuned along another zone axis [xyz] . All the spots in the diffraction pattern belongs the zone axis [xyz].

Page 16: XII.  Electron diffraction in TEM

12-5. Electron diffraction pattern from a polycrystalline material

Example: polycrystalline PtSi/p-Si(100)

Page 17: XII.  Electron diffraction in TEM

Ewald sphere constructions for powders and polycrystalline materials

Page 18: XII.  Electron diffraction in TEM

12-6. diffraction and image (bright field, dark field)(a) Bright field image

http://labs.mete.metu.edu.tr/tem/TEMtext/TEMtext.html

Page 19: XII.  Electron diffraction in TEM

(b) Dark filed image

http://labs.mete.metu.edu.tr/tem/TEMtext/TEMtext.html

Page 20: XII.  Electron diffraction in TEM

http://www.microscopy.ethz.ch/BFDF-TEM.htmExample: microcrystalline ZrO2

Diffractionpattern

Bright-FieldImage

Dark-FieldImage

BF image: some crystals appear with dark contrast since they are oriented (almost) parallel to a zone axis (Bragg contrast).DF image: some of the microcrystals appear with bright contrast, namely such whose diffracted beams partly pass the objective aperture.