edwardsvacuum.com PRODUCT DATASHEET Reduced cost of ownership • 10% less energy consumpon than the previous model • SEMI® E54 compable and Green Mode capable • Longer overhaul intervals and less unscheduled down me More process capability • Greatly increased powder handling capability and innovave Gas Buster™ (1) technology • Wide temperature range allows opmisaon of pump to minimise by-product accumulaon from condensaon and plang • Innovave pump seal technology to lengthen process life and reduce leakage risks (1) Greatly increased hydrogen pumping speed for advanced EPI and solar processes High capacity dry pumps and boosters give an expanded process window to enhance yields Smaller footprint and lower height for ease of fing in any fab Complies with key internaonal standards including UL, CE and S2 Features and benefits Applicaons The iXH dry pump range is an evoluon of our market leading iH products and sets new standards for harsh process capability, reliability and lower cost of ownership. With a modular design, iXH pumps meet today’s process requirements and have road-mapped responses to emerging applicaon challenges in high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN and EPI. Load Lock Transfer Metrology Lithography PVD Process PVD Pre-Clean RTA Strip/Ashing Oxide Etch Silicon Etch Metal Etch Implant Source HDP-CVD RTP SACVD MOCVD PECVD LPCVD ALD Non-reactive gases used Corrosive or reactive gases used iG G GX can n b be e us s sed iGX can be used Clean Ap pplication ns Clean Applications Harsh h Application ns s Harsh Applications iXH can be e used iXH can be used iXH rec c comme e end d ded iXH recommended iG G GX X r re ec c com m m mme e ende ed iGX recommended iX XL L re e e eco om m mm me en nde e ed iXL recommended 1 Patent applied for iXH DRY PUMPS FOR HARSH PROCESSES Giving you a clear edge
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XH DRY PUMPS FOR HARSH PROCESSES - Vacuum and …€¦ · High capacity dry pumps and ... The iXH dry pump range is an evoluti on of our market leading iH products ... iXH DRY PUMPS
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edwardsvacuum.com
PRODUCT DATASHEET
Reduced cost of ownership
• 10% less energy consumpti on than the previous model• SEMI® E54 compati ble and Green Mode capable• Longer overhaul intervals and less unscheduled down ti me
More process capability
• Greatly increased powder handling capability and innovati ve Gas Buster™ (1) technology• Wide temperature range allows opti misati on of pump to minimise by-product accumulati on from condensati on and plati ng• Innovati ve pump seal technology to lengthen process life and reduce leakage risks (1)
Greatly increased hydrogen pumping speed for advanced EPI and solar processes
High capacity dry pumps and boosters give an expanded process window to enhance yields
Smaller footprint and lower height for ease of fi tti ng in any fab
Complies with key internati onal standards including UL, CE and S2
Features and benefi ts
Applicati ons
The iXH dry pump range is an evoluti on of our market leading iH products and sets new standards for harsh process capability, reliability and lower cost of ownership.
With a modular design, iXH pumps meet today’s process requirements and have road-mapped responses to emerging applicati on challenges in high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN and EPI.
Load
Loc
k
Tran
sfer
Met
rolo
gy
Lith
ogra
phy
PVD
Pro
cess
PVD
Pre
-Cle
an
RTA
Strip
/Ash
ing
Oxi
de E
tch
Silic
on E
tch
Met
al E
tch
Impl
ant S
ourc
e
HD
P-C
VD
RTP
SAC
VD
MO
CVD
PEC
VD
LPC
VD
ALD
Non-reactive gases used Corrosive or reactive gases used
* Factory default setti ng(1) Water consumpti on varies with pump operati ng temperature; fi gures at 110 ºC(2) Average power at 700 T exhaust pressure(3) Booster heaters add 1 kW when switched on(4) Booster heaters add 1.5 kW when switched on