WAFERMAP Award winning software package Collect, edit, visualize and analyze measured physical parameters on semiconductor wafers Import data from various.

WAFERMAPWAFERMAP

• Award winning software package

• Collect, edit, visualize and analyze measured physical parameters on semiconductor wafers

• Import data from various metrology tools

- Ellipsometers

- 4 point probes

- Thickness gauges Supported File Formats

We add customer imports

upon request

• 9 different visualization plots from 1D to 3D

• Data operations and filtering

• File comparison

• Statistical Process Control SPC

- Browser

- Trend chart

• Inter-application Communication (Active X)

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New features:

• New easy to use XML-based Boin file format

• Multiple wafers and multi-measurements in one file

• Import of multi-measurement wafers at once

• Free rotation of 3D plots

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New Release: Version 3.0

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New features:

• Export of *.jpg and *.bmp

• Export of *.html

• … and many more

New Release: Version 3.0

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• Compare your measurements

• Work off-line

• Work outside the clean room

WAFERMAP is your choice

• Advanced Micro Devices• ASM • Atmel• Canon• Hitachi• Hypernex • Infineon• Intel• Jordan Valley SC• LSI Logic• Mattson Technology• Motorola/ Freescale

• Nicolet• Osram • Philips, Philips Analytical• Mitsubishi• Seagate• Sematech • ST Microelectronics• Sumitomo Eaton Nova• Silicon Valley Group• Thermawave• Tokyo Electron• Tru-Si• Varian

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References – Partial List of WAFERMAP Customers

References – OEM Customers

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• Cyrium

• Foothill Instruments

• Jenawave

• Jordan Valley

• KLA - Tencor

• LayTec

• Napson

• Sigmatech

• SOPRA

• Technos

• Tepla AG

• Thermawave

• Thermo Electron

• Carl Zeiss

Sell WAFERMAP as analysis and visualization tool together with your equipment

Thank you very muchThank you very much for your interest infor your interest in

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