W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...

Page 1 <img data-url='document/w-c-tang-t-c-h-nguyen-and-r-t-howe-laterally-.html?page=1' data-page='1' class='cut-thumb lazyload' alt='Page 1: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader042.cupdf.com/reader042/viewer/2022012100/6169de8111a7b741a34c453d/html5/thumbnails/1.jpg' width='140' height='200' /> ctnguyen Text Box W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, “Laterally driven polysilicon resonant microstructures,” Sensors and Actuators, 20, 25-32, 1989. Page 2 <img data-url='document/w-c-tang-t-c-h-nguyen-and-r-t-howe-laterally-.html?page=2' data-page='2' class='cut-thumb lazyload' alt='Page 2: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader042.cupdf.com/reader042/viewer/2022012100/6169de8111a7b741a34c453d/html5/thumbnails/2.jpg' width='140' height='200' /> Page 3 <img data-url='document/w-c-tang-t-c-h-nguyen-and-r-t-howe-laterally-.html?page=3' data-page='3' class='cut-thumb lazyload' alt='Page 3: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader042.cupdf.com/reader042/viewer/2022012100/6169de8111a7b741a34c453d/html5/thumbnails/3.jpg' width='140' height='200' /> Page 4 <img data-url='document/w-c-tang-t-c-h-nguyen-and-r-t-howe-laterally-.html?page=4' data-page='4' class='cut-thumb lazyload' alt='Page 4: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader042.cupdf.com/reader042/viewer/2022012100/6169de8111a7b741a34c453d/html5/thumbnails/4.jpg' width='140' height='200' /> Page 5 <img data-url='document/w-c-tang-t-c-h-nguyen-and-r-t-howe-laterally-.html?page=5' data-page='5' class='cut-thumb lazyload' alt='Page 5: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader042.cupdf.com/reader042/viewer/2022012100/6169de8111a7b741a34c453d/html5/thumbnails/5.jpg' width='140' height='200' /> Page 6 <img data-url='document/w-c-tang-t-c-h-nguyen-and-r-t-howe-laterally-.html?page=6' data-page='6' class='cut-thumb lazyload' alt='Page 6: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader042.cupdf.com/reader042/viewer/2022012100/6169de8111a7b741a34c453d/html5/thumbnails/6.jpg' width='140' height='200' /> Page 7 <img data-url='document/w-c-tang-t-c-h-nguyen-and-r-t-howe-laterally-.html?page=7' data-page='7' class='cut-thumb lazyload' alt='Page 7: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader042.cupdf.com/reader042/viewer/2022012100/6169de8111a7b741a34c453d/html5/thumbnails/7.jpg' width='140' height='200' /> Page 8 <img data-url='document/w-c-tang-t-c-h-nguyen-and-r-t-howe-laterally-.html?page=8' data-page='8' class='cut-thumb lazyload' alt='Page 8: W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...' loading='lazy' src='data:image/gif;base64,iVBORw0KGgoAAAANSUhEUgAAAAEAAAABCAYAAAAfFcSJAAAADUlEQVR42mNk+P+/HgAFhAJ/wlseKgAAAABJRU5ErkJggg==' data-src='https://reader042.cupdf.com/reader042/viewer/2022012100/6169de8111a7b741a34c453d/html5/thumbnails/8.jpg' width='140' height='200' />

W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, Laterally ...

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