0 Ho Kyoon Chung, Ph.D. Vision for Roll-to-Roll Manufacturing of Plastic AMOLED
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Ho Kyoon Chung, Ph.D.
Vision for Roll-to-Roll
Manufacturing of Plastic
AMOLED
1
Contents
2. AMOLED, the Ultimate Display
3. Plastic AMOLED by Sheet to Sheet
4. Vision for R2R AMOLED
1. Motivation 1. Motivation
2
My Motivation
Key Success of Semiconductor Industry
Continuing the productivity improvement
By wafer size increase
Adding more values
By increasing the speed and level of
integration
3
My Motivation
Challenges of FPD Industry
How to continue the productivity improvement
By increasing glass size ?
Adding more values
By larger displays ?
4
My Motivation
The Answer : Roll to Roll AMOLED !
Higher productivity
By continuous process and
lower investment
Adding more values
By new form factors
5
Strong points of AMOLED: Self-Emissive Organic Display and
large color gamut, fast response time, slim, and can be made by R2R!
Image quality
AMOLED
Robustness (physical, temp.)
Cost & thickness
Color gamut Viewing angle
AMOLED: True Ultimate Display!
6
Successful Commercialization Since 2007
OLED display size is increasing from 4” to 5” and larger
OLED display is moving to higher resolution
March 2007
Iriver CLIX MP3
2.2” 320×240
AMOLED
July 2010
Samsung AMOLED
4.0” 800×480 WVGA
Super AMOLED
June 2009
Samsung Haptic
2.8” 400×240 WqVGA
AMOLED + Touch
March 2007
KDDI MediaSkin
2.4” 320×240
AMOLED
General Trend
Feb. 2012
Samsung AMOLED
5.3” 800x1280 WXGA
Super AMOLED
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55” OLED TV’s at CES International 2012
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- Frequently Asked Question,
“What is the next big thing after OLED TV?”
Plastic AMOLED!
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Flat Conformable
Bendable Rollable Foldable
Wall Paper (Large Screen)
Display
Substrate
Application
Glass Thin Glass/Metal Foil Plastic Sheet Plastic Roll
Samsung
Signage
TV
(Displaybank)
Display Revolution: Glass Plastic
Samsung
Flat Conformable Foldable Rollable Wall Paper
Glass Metal Foil Plastic Sheet Plastic Roll
Sony
Samsung
We Are Here,
“Ultra Thin, Unbreakable” When?
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Plastic Display Evolution
Mobile Displays : Ultra Thin & Light-weight/ Unbreakable (UT/UB)
Big Screen with Portable Size (Foldable/Rollable)
Final Goal: Large Size Rollable TV
Foldable Rollable TV UT / UB
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Challenges of Plastic AMOLED
Key Challenges: 1) TFT Same as On-Glass
2) Low Cost Thin Film Encapsulation
3) Compatible with Existing Fab
Plastic Substrate
Plastic Substrate
- Moisture Barrier
- Delamination After Completion
TFT Process Architecture
- Low Temp. TFT Process
- TFT with High Reliability
Thin Film Encapsulation
- Processing Time
- Cost of Ownership
Carrier
Thin Film Encapsulation
- Throughput
- Scalability
TFT Process Architecture
- Low Temp. TFT Process (?)
- TFT with High Reliability
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Plastic as AMOLED Substrate
Thermal Stability
Barrier on Top and Bottom
Lamination/Delamination without defect
Step Issue Metal Foil Plastic
Substrate preparation
Surface planarization Required -
Diffusion barrier against moisture and oxygen
- Required
TFT array
Thermal stability Stable Can Be Stable
Overlay alignment Poor Good
OLED FMM alignment Poor Good
General Flexibility Marginal Excellent
Issues
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Plastic AMOLED by Sheet to Sheet
① PI Film Lamination ② AMOLED Processing ③ Delamination
Glass
Plastic Film
Glass
Plastic Film
Thin Film Encapsulation
AMOLED TFT
Glass
Plastic Film
Thin Film Encapsulation
AMOLED TFT
Laser Irradiation
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Plastic AMOLED, Same Quality
as on Glass !
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Pro: Compatible with Glass Fab
Con: Higher Cost
Plastic AMOLED by Sheet to Sheet
① PI Film Lamination ② AMOLED Processing ③ Delamination
Glass
Plastic Film
Glass
Plastic Film
Thin Film Encapsulation
AMOLED TFT
Glass
Plastic Film
Thin Film Encapsulation
AMOLED TFT
Laser Irradiation
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Key Challenges of Plastic AMOLED Manufacturing
Thin Film Encapsulation
Scalability to Large Size
Maintaining Thin Form Factor
Manufacturing Innovation by R2R
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Key Challenges of Plastic AMOLED Manufacturing
Thin Film Encapsulation
Scalability to Large Size
Maintaining Thin Form Factor
Manufacturing Innovation by R2R
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Vitex Technology for Thin Film Encap.
“Vitex” BarixTM coating
Poly
Poly
Inorg
Poly
Poly
Inorg
Inorg
Poly
Inorg
Inorg
Inorg
Poly
• Cluster process
• High equipment cost
• Limited scalability
• Long tact time
• Physical interfaces
• Inferior film quality
Vitex Technology for Thin Film Encapsulation
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Susceptor
`
Substrate
Pumping
RP
Reactor
(1)
Remote-plasma Module
RP
Reactor
(2)
RP
Reactor
(3)
RP
Reactor
(4)
RP
Reactor
(5)
RP Reactor Array
5X throughput
RP
Reactor
(5)
120mm
* Nozzel: 3.5G
▪ Linear Cavity-type Reactor : Excellent Uniformity
▪ Extremely Small Chemical Consumption :Low Mat’l Cost
▪ Scanning :High Throughput
▪ Closed-Loop Controlled Reactor : Atmospheric Press.
• High throughput
• Atmospheric process
• Low temperature
• Short tact time
• Superior film quality
New Concept ALD/PP* Process
PP*: Plasma Polymer
Sungkyunkwan University
2012. 8. 27 20/15
WVTR of Al2O3/plasma-polymer multilayer barriers
0 5 10 15 20 25 300.00
0.25
0.50
0.75
1.00
No
rma
lize
d c
on
du
cta
nc
e (
1/R
)
Time (hour)
Al2O
3(20nm)
Al2O
3(10nm)/PP(100nm)-2dyads
Al2O
3(5nm)/PP(50nm)-4dyads
Al2O
3(2.5nm)/PP(25nm)-8dyads
Total thickness : 220nm (P.P 200nm/Al2O3 20nm)
2.5nm Al2O3
25nm P.P
5nm Al2O3
50nm P.P
10nm Al2O3
100nm P.P
<1.0ⅹ10-5 g/(m2·day)
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Manufacturing Innovation: R2R for AMOLED
Source: PolyIC
Advantages:
• Lower Investment
• Continuous Processing
• Flexible Substrates
Challenges:
• TFT Backplane
- Fine Patterning, Performance
• OLED Printing
- In-line Processing
• R2R Encapsulation
R2R by Printing Technology:
Very Challenging for TFT Backplanes !
Smallest feature size typically 20-100 µm depending on process
throughput, substrate and ink properties
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Suggestions of Technology Development for R2R Plastic AMOLED
TFT Array:
-Transfer Printing of Completed Pixel Array
OLED :
- Vacuum Evaporation Using Linear Source
- Nozzel Printing
Encapsulation:
- ALD/PP R2R
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Transfer Printing of TFT Array
400 500 600 700 800 40
50
60
70
80
90
100
ZnO TFTs on PDMS
PDMS
)
-
1mm
-
Wave length(um )
2
Fabricate TFT on SL
Dissolve SL & Lift off TFT
Transfer to Substrate
Release
Transmittance
TFT Array on Flexible Substrate
SL : Sacrificial Layer (Ge)
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ZnO TFT Array Layout
TFTs Arrays
Source
Drain
Gate
Pour for
Water
Penetration
Device covered by
SU-8
Encapsulated TFT Arrays
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TFT Array on Roller
TFTs Arrays on
Roller
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TFT Characteristics after Transfer
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Roll to Roll Printing Machine
- R2R Transfer Equipment for 20x20cm TFT Array
- 100 % Transfer Yield Confirmed
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Process Flow Block Diagram for R2R AMOLED
Pixel Circuit Fabrication
Transfer Printing
Inter-connection
Anode
PDL
Common, RGB, ETL
Cathode
Thin Film Encapsulation
Module
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對外秘
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對外秘
Ex.: Roll-to-Roll Manufacturing of OLED Lighting
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I Have a Dream: Plastic AMOLED by R2R in 2019!
“I say to you today, my friends, that in spite of the difficulties and frustrations of the moment, I still have a dream. It is a dream deeply rooted in the American dream.”
-Martin Luther King, Jr
August 28, 1963
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Conclusion
1) AMOLED is the Ultimate Display for Future World
2) Flexible AMOLED on Plastic Substrate Has Been Developed
3) TFT Array Transfer Printing by Sheet to Roll is Demonstrated
4) Future Vision and Challenge of R2R Manufacturing of AMOLED is
Addressed
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Rollable AMOLED !
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Thank You!