Vincenzo Guidi Vincenzo Guidi Dipartimento di Fisica Dipartimento di Fisica Università di Ferrara Università di Ferrara The sensors and semiconductors The sensors and semiconductors laboratory laboratory Dipartimento di Fisica Università di Ferrara - Italy INFM - INFN
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Vincenzo Guidi Dipartimento di Fisica Università di Ferrara
Dipartimento di Fisica Università di Ferrara - Italy. INFM - INFN. The sensors and semiconductors laboratory. Vincenzo Guidi Dipartimento di Fisica Università di Ferrara. Activities at the Sensors and semiconductors group. Fundamental and applied research on nanostructured materials - PowerPoint PPT Presentation
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Vincenzo GuidiVincenzo Guidi
Dipartimento di FisicaDipartimento di FisicaUniversità di FerraraUniversità di Ferrara
The sensors and semiconductors laboratoryThe sensors and semiconductors laboratory
Dipartimento di Fisica Università di Ferrara - Italy
INFM - INFN
Activities at the Activities at the Sensors and semiconductors groupSensors and semiconductors group
• Fundamental and applied research on Fundamental and applied research on nanostructured materialsnanostructured materials
• Micromachining of microdevicesMicromachining of microdevices
• Production and characterization of gas sensors Production and characterization of gas sensors and photovoltaic cellsand photovoltaic cells
Monitoring experiments in the frame Monitoring experiments in the frame of a project for of a project for evaluating the evaluating the degradation level of the historical degradation level of the historical buildings in Ferrarabuildings in Ferrara
Air quality assessment in urban environment……Air quality assessment in urban environment……
Palazzo dei Palazzo dei DiamantiDiamanti
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Microsensors deposited on a micro hotplateSiO2+Si3N4
Insulating film
Anisotropicetching
SiO2+Si3N4
Polysilicon resistor
Low power consumption Low power consumption because of low thermal because of low thermal conductivity: 30 mW @ conductivity: 30 mW @
400 400 ººC C
Low power consumption Low power consumption because of low thermal because of low thermal conductivity: 30 mW @ conductivity: 30 mW @
400 400 ººC C
Gas microsensors with hybrid technologyGas microsensors with hybrid technology