Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12 th and 13 th September 2005 L. Schulz Introduction • Pumps • Valves • Gauges • Seals Vacuum Technology
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
Introduction
• Pumps
• Valves
• Gauges
• Seals
Vacuum Technology
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
UHV Pumps
• Capture pumps are the dominating pumps for
vacuum systems for synchrotron light sources
• Titanium is the most common getter
• sputter-ion pumps use chemical and ionization
pumping effects
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
Sputter Ion PumpsStandard DiodeHighest pumping speed per unit volume.
Low pumping speed for noble gases (<5% for Ar).
Noble DiodeA part of the cathode material is replaced with Tantalum to achieve a higher pumping speed for noble gases.
Noble gas ions are neutralized and “bounced back” on the cathode and buried in other parts of the pump.
Energetic neutrals have far greater penetrating depth.
StarCellCathode plates are replaced with grids of Ti-strips
Number of neutrals due to glancing incidence is increased.
Pumping speed for noble gases of 20-25%.
Sputter Ion Pumps
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
• At SLS storage ring we use standard diode pumps
with Varian Dual controllers
• Typically 8 pumps share the same pump controller
• All pump controllers run in STEP VOLTAGE mode
P > 10-7 mbar 7000 V
10-8 < P < 10-7 mbar 5000 V
P < 10-8 mbar 3000 V
Sputter Ion Pumps
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
• APS 5 mm Undulator chamber
• ST 707 NEG strips
• 350-450°C activation temperature
• High pumping speed and pumping
capacity for noble gases
NEG Pumps
electron channel
NEG Strips
NEG Strips
NEG Cartridges
Courtesy SAES Getters
Courtesy of E. Trakhtenberg
• Getter material Zr-V-Fe and Ti – V
• Very compact with high pumping
speed and capacity
• Flange size DN 40, 100, 150 CF
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
Ti-Filament
• Ti-filament periodically heated with high currents.
• Ti evaporates and generates a getter film on the chamber wall or cooled screen.
• Progressive saturation and reduction of pumping speed with time.
Chamber wall
Titanium Sublimation Pumps
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
Valves
• All metal valves are used for
vacuum systems of synchrotron
light sources
• RF shielded sector gate valves
• All metal angle valves for the
connection of roughing pumps
• All metal gate valves for
beamline frontends
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
Valves
SLS Sector Vacuum Scheme
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
Vacuum Gauges
• Total pressure gauges for synchrotron light sources
• Total pressure measurement
• Sensor for vacuum interlock
• Cold cathode gauges (IMG) are mainly used for total
pressure measurement
• At SLS we use active gauges with on board electronics
• Pirani gauges
• RGA
Vacuum Workshop on Vacuum Systems for Synchrotron Light Sources, Barcelona, Vacuum Technology, 12th and 13th September 2005 L. Schulz
CF-Flange withRF-Bridge(BESSY II)
CF-Flange withSmall gap
(ESRF, ANKA)
Flat Seal-Flange (ASP, CLS, SLS)
Temperature control is required
UHV flanges
All Metal Flanges Connections