Vacuum valves play a very important role in determining the efficiency of vacuum equipment and vacuum pumps. Valves used in a vacuum atmosphere work at very small pressure differentials and absolute pressures compared to general industrial pumps. ULVAC designs and manufactures vacuum valves based on many years of technological experience in order to meet and surpass customer needs. Be sure to use appropriate ULVAC vacuum valves for work in environments from atmospheric pressure to ultra-high vacuums. Vacuum Valve Series These valves have a large conductance when the disk is open in order to maximize pumping capabilities of the vacuum pump. Valve Types: SS (soft steel), stainless steel, aluminum are used as valve body materials depending on the pressure and application involved. Vacuum flanges, quick couplings, UFC flanges, and other connection methods are possible. High vacuum valves Main products: L (angle) model, T (3-ways) model, gate type vacuum valves Applicable pressure ranges Other valves: VLH (P), VAH (P) series: Atmospheric pressure to10 –5 Pa O-ring seals are used in the axis seal sections. Seal materials that emit little gas (nitrile rubber and fluorine rubber) are used in the bonnet and disk seals. Features Ultra-high vacuum pump Main products: L (angle) model and gate model vacuum valves Applicable pressure range: Atmospheric pressure to 10 –8 Pa Seal materials that emit little gas (fluorine rubber and metal gaskets) are selected based on the applicable pressure and used in the bonnet and disk seals. A bellows seal is used in the axis seal section. Other valves Variable leak valve : This is a flow rate adjustment valve applicable from atmospheric pressure to the high and ultra-high vacuum range. Vacuum exhaust line for sputter and evaporation systems Vacuum exhaust line for various heat processing furnaces Vacuum exhaust line for vacuum drying machine and freeze-drying machine Vacuum exhaust line for leak tester Applications VUGP VUGH VULH VLP VTP VLH VUH VUH-MVF 10-AIV VULP Vacuum Valve Vacuum Valve
12
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Transcript
Vacuum valves play a very important role in determining the efficiency of vacuum equipment and vacuum pumps. Valves used
in a vacuum atmosphere work at very small pressure differentials and absolute pressures compared to general industrial
pumps.
ULVAC designs and manufactures vacuum valves based on many years of technological experience in order to meet and
surpass customer needs. Be sure to use appropriate ULVAC vacuum valves for work in environments from atmospheric
pressure to ultra-high vacuums.
Vacuum Valve Series
These valves have a large conductance when the disk is open in order to maximize pumping capabilities of the vacuum pump.
Valve Types: SS (soft steel), stainless steel, aluminum are used as valve body materials depending on the pressure and application involved.Vacuum flanges, quick couplings, UFC flanges, and other connection methods are possible.
High vacuum valvesMain products: L (angle) model, T (3-ways) model, gate type vacuum valvesApplicable pressure ranges
Other valves: VLH (P), VAH (P) series: Atmospheric pressure to10–5 PaO-ring seals are used in the axis seal sections.Seal materials that emit little gas (nitrile rubber and fluorine rubber) are used in the bonnet and disk seals.
Features Ultra-high vacuum pumpMain products: L (angle) model and gate model vacuum valvesApplicable pressure range: Atmospheric pressure to 10–8 PaSeal materials that emit little gas (fluorine rubber and metal gaskets) are selected based on the applicable pressure and used in the bonnet and disk seals.A bellows seal is used in the axis seal section.
Other valvesVariable leak valve : This is a flow rate adjustment valve applicable from atmospheric pressure to the high and ultra-high vacuum range.
Vacuum exhaust line for sputter and evaporation systemsVacuum exhaust line for various heat processing furnacesVacuum exhaust line for vacuum drying machine and freeze-drying machineVacuum exhaust line for leak tester
Appl icat ions
VUGPVUGH
VULH VLP
VTP
VLH
VUH VUH-MVF 10-AIV VULP
Vacuum Valve
Vacuum Valve
2
High Vacuum Valve VLH Series Manual Valve
Vacuum Valve Series
N-dia. B
dia. C
Ldia. D
dia. A
H1
H2
T
L
dia.
D
T
N-dia. Bdia. C
Ldia. D
dia. A
H1
H2
L
dia.
D
*1 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.
L
dia. A
dia. D
H1
H2
L
dia.
D
*1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air
Specifications
Dimensions
VLH-U3 (S) -U10 (S)VLH-U3/4 (S) -2 (S)
Item Model VLH-U VLH-US VLH-US-KF
Common diameter 20A (3/4B) to 100A (4B) 25A (1B) to 50A (2B)
Flange diameter VF20 to VF100 KF25 to KF50
Main unit material Soft steel SUS304
Gasket material Nitrile rubber FPM
Allowable baking temperature ˚C ≦60 ≦120
(at stopped) ˚F ≦140 ≦248
Pressure range Pa 1.0×10-5 to 1.0×105 (abs)
Torr 7.5×10-8 to 760 (abs)
mbar 1.0×10-7 to 1.0×103 (abs)
Leak rate *1 Pa・m3/s ≦1.3×10-7 ≦7.0×10-9
Torr・L/s ≦9.75×10-7 ≦5.25×10-8
mbar・L/s ≦1.3×10-6 ≦7.0×10-8
Allowable ambient temperature ˚C 5 to 40
˚F 41 to 104
Open/close operation principle Manual
Maintenance cycle 100000
(unit: mm)
Model
Item Common port diameter
Flange diameter Conductance Flange to
diameter
Flange to Flange
dimension
When completely
closed
When completely
openHandle Flange
thickness Bolt center Hole quantity/diameter Weight
High Vacuum Valve VLP Series Compressed Air Driven
*1 Please inquire the size of 400A (16B) or more separately.*2 60˚C (140˚F) for the air cylinder section.*3 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.
*1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air
Dimensions
Specifications
Item Model VLP-U VLP-US VLP-US-KF
Common diameter 20A (3/4B) to 900A (36B) *1 25A (1B) to 50A (2B)
Flange diameter VF20 to VF900 KF25 to KF50
Main unit material Soft steel SUS304Gasket material
Nitrile rubber FPM Disk seal: FPMBonnet seal: Nitrile rubber
Allowable baking temperature ˚C ≦60 ≦120
(at stopped) *2 ˚F ≦140 ≦248
Pressure range Pa 1.0×10-5 to 1.0×105 (abs)
Torr 7.5×10-8 to 760 (abs)
mbar 1.0×10-7 to 1.0×103 (abs)
Leak rate *3 Pa・m3/s ≦1.3×10-7 ≦7.0×10-9
Torr・L/s ≦9.75×10-7 ≦5.25×10-8
mbar・L/s ≦1.3×10-6 ≦7.0×10-8
Allowable ambient temperature ˚C 5 to 40
˚F 41 to 104
Open/close operation principle Compressed air
Compressed air pressure MPa G 0.45 to 0.55
psi 65.3 to 79.8
Open/close signal output Attachment up to diameter of 550A (22B) is possible (optional)
Pressure range *2 Pa 1.0×10-5 to 1.0×105 (abs)Torr 7.5×10-8 to 760 (abs)mbar 1.0×10-7 to 1.0×103 (abs)
Allowable baking temperature *3 ˚C ≦120˚F ≦248
Allowable ambient temperature ˚C 5 to 40 (not condensing) ˚F 41 to 104 (not condensing)
Ambient condition No presense of corrosive gasCompressed air pressure MPaG 0.45 to 0.55
psi 65.3 to 79.8Compressed air supply port Rc1/4 Rc3/8 Rc1/2Open/close time 2.0 ± 0.5 sec per open and closeAuto sensor OptionalWeight Kg Approx. 12.0 Approx. 15.0 Approx. 25.0Maintenance cycle 100000
*1 Leak amount does not include transmission through O-ring.*2 Pressure range does not change when O-ring materials are changed as option.*3 When valve plate is open. Please keep cylinder parts temperature at 60˚C (140˚F) or less.
Item Model VAP-U100 VAP-U150Common diameter 100A 150AFlange diameter VF100 VF150Main unit material/Internal parts Aluminum alloy / Soft steelGasket material Nitrile rubberCoductance *1 m3/s 0.591 1.4Allowable baking ˚C ≦60temperature (at stopped) ˚F ≦140Pressure range Pa 1.0×10-5 to 1.0×105 (abs)
Torr 7.5×10-8 to 760 (abs)mbar 1.0×10-7 to 1.0×103 (abs)
Leak rate *2 Pa・m3/s ≦7.0×10-9
Torr・L/s ≦5.25×10-8
mbar・L/s ≦7.0×10-8
Allowable ambient temperature ˚C 5 to 40˚F 41 to 104
Open/close operation principle Compressed airOpen/close signal output Attachment possible (optional)Compressed air pressure MPa G 0.45 to 0.55
psi 65.3 to 79.8Maintenance cycle 100000Remarks FPM (optional)
185(240) 76(78.5)
60(72)
320(
420)
220(
290)
31(53)
95(1
20)
180(268)
dia.160(210)
dia.100(150)
136(150.5)
Flange correspondingtoVF100(VF150)Tap 8-M10 Depth 10(The back is the same processing)
237.5(255.5)161(183)
59(57)60(72)
104(
144)
102.
4(11
8)95
(120
)32
0(42
0)
Auto SW (Option)
Flange correspondingtoVF100(VF150)Tap8-M10 Depth 10(The back is the same processing)
Compressed airoperation port 2-dia.6 tube connection(Meter out type speed controlle)
dia.100(150)
dia.160(210)
VAH-U100 (U150)
VAP-U100 (U150)
* Values in ( ) are for the VAH-U150
* Values in ( ) are for the VAP-U150
Dimensions
Dimensions
VAH series
VAP series
6
Vacuum Valve Series
Ultra-High Vacuum Valve VULH Series Manual Valve
*1 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.
*1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air
Specifications
Item Model VULH-KF VULH-F VULH-CM
Common diameter 16A to 40A 25A to 250A 10A to 250A
Flange diameter KF25 to KF50 VF25 to VF250 UFC
Main unit material SUS304Gasket material
Disk seal: FPM / Bonnet seal: FPM Disk seal:FPMBonnet seal:Silver wire
Ultra-High Vacuum Valve VULP Series Compressed Air Driven
*1 The bonnet seal material of the VULP-16KF model is silver wire.*2 60˚C (140˚F) for the air cylinder section.*3 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.
*1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air
Specifications
Dimensions
Item Model VULP-KF VULP-F VULP-CM
Common diameter 16A to 40A 25A to 250A 10A to 250A
Flange diameter KF25 to KF50 VF25 to VF250 UFC
Main unit material SUS304Gasket material *1
Disk seal: FPM / Bonnet seal: FPM Disk seal: FPMBonnet seal: Silver wire
Note: Open and close the valve with a maximum pressure differential of 1000Pa (7.5Torr, 10mbar) or less.*1 60 ˚C (140 ˚F) for the air cylinder section.*2 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.*3 Automatic switch model: D-A73 (for both DC24V and AC100 V, with indicator lamp)
*1: conductance: calculated valve using molecular flow, 20 ˚C, (68 F̊) and air
Specifications
Item Model VUGH-F VUGH-CS
Common diameter 40A to 200A 40A to 200A
Flange diameter VF40 to VF200 UFC
Main unit material/Internal parts SUS304
Gasket material Disk seal: FPM / Bonnet seal: FPM Disk seal: FPM / Bonnet seal: Silver wire
Ultra-High Vacuum Valve VUGP Series Compressed Air Driven
Note: Open and close the valve with a maximum pressure differential of 1000Pa (7.5Torr, 10mbar) or less.*1 60 ˚C (140 ˚F) for the air cylinder section.*2 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.*3 Automatic switch model: D-A54 (for both DC24V and AC100 V, with indicator lamp)
*1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air
Specifications
Item Model VUGP-F VUGP-CS
Common diameter 40A to 200A 40A to 200A
Flange diameter VF40 to VF200 UFC
Main unit material/Internal parts SUS304
Gasket material Disk seal: FPM / Bonnet seal: FPM Disk seal: FPM / Bonnet seal: Silver wire
Allowable baking temperature ˚C ≦150 OPEN: ≦200 / CLOSE: ≦150
(at stopped) *1 ˚F ≦302 OPEN: ≦392 / CLOSE: ≦302
Pressure range Pa 1.0×10-8 to 1.0×105 (abs)
Torr 7.5×10-11 to 760 (abs)
mbar 1.0×10-10 to 1.0×103 (abs)
Leak rate *2 Pa・m3/s ≦1.3×10-11
Torr・L/s ≦9.75×10-11
mbar・L/s ≦1.3×10-10
Allowable ambient temperature ˚C 5 to 40
˚F 41 to 104
Open/close operation principle Compressed air
Open/close signal output *3 Attachment possible (optional)
Compressed air pressure MPa G 0.45 to 0.55
psi 65.3 to 79.8
Maintenance cycle 10000
(unit: mm)
Model
Item Common diameter
Flange diameter Conductance Flange
diameter
Flange to Flange
dimension.
Total height Cylinder Handle Bolt
center
Hole quantity/diameter
Compressed air connection
portWeight
A m3/s *1 dia. D L H Sq.A dia. A dia. PCD N-dia. B B E F G K M kg
*1 Conductance:calculated valve using molecular flow, 20˚C (68˚F), and air.
*2 A torque wrench is required to close the valve. Prepare a 45N.m (450 kg·cm) preset torque wrench with a
socket having a common diameter of 24.*3 Lifespans vary depending on various irregular factors including
use environment and use history. When sealing performance over time cannot be obtained within the range from initial sealing torque to maximum sealing torque, nose replacement is required. Lifespan is also decreased by bake-out operations.
*4 Nose replacement operations should only be done by designated representatives.
The VUH-10D model has a welded structure and nose replacement is not possible.
SpecificationsModel VUH
Item VUH-10D VUH-251C VUH-401C VUH-651CCommon port diameter 10A 25A 40A 65AConnection flange UFC034 UFC070 UFC070 UFC114Main unit material Austenitic stainless steelGasket material Bonnet seal: Gold wire / Disk seal: CopperCoductance *1 m3/s 0.0003 0.00811 0.0247 0.0558Allowable baking temperature ˚C OPEN: ≦250 / CLOSE: ≦200(at stopped) ˚F OPEN: ≦482 / CLOSE: ≦392Pressure range Pa 1.0×10-9 to 1.0×105 (abs)
Torr 7.5×10-12 to 1.0×760 (abs)mbar 1.0×10-11 to 1.0×103 (abs)
Leak rate Pa・m3/s ≦1.3×10-11
Torr・L/s ≦9.75×10-11
mbar・L/s ≦1.3×10-10
Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104Open/close operation principle ManualSealing torque N・m *2 Initial 4.9 14.7
Maximum 29.4 44.1Bellows lifespan 10000Nose lifespan at room temperature(reference value) *3 *4 300 350 300 250
(unit: mm)
Model
ItemFlange diameter Flange to Flange
dimension. Total height Bolt center Hole quantity/diameter Weight
dia. D L H dia. PCD N-dia. C dia. A D kgVUH-10D Refer to external dimension diagram 1.9 VUH-251C 69.3 50 137 58.7 6-6.8 62.0 18.0 1.6 VUH-401C 69.3 63 176 58.7 6-6.8 71.0 27.0 2.3 VUH-651C 113.5 95 255 92.2 8-8.5 96.0 0.0 4.4
15
dia. A
D
7090 24
UFC034seat surface side
UFC0344-dia. 990 47
50 30
33
5090
94Lift 2
dia.
33.
8
P.C.D
Ldia. D
LH
N-dia. C
Dimensions
VUH-251C, 401C, 651CVUH-10D
Ultra-High Vacuum Valve (mini) VUH-MVF
*1 This valve has a welded structure and the disk seal material cannot be replaced.
*2 Polyimide resin permeability is not included in the specifications.
SpecificationsItem Model VUH-MVFConnection flange UFC034Main unit material Austenitic stainless steelGasket material Disk seal: polyimide resin *1Allowable baking temperature ˚C ≦200(at stopped) ˚F ≦392Pressure range Pa 1.0×10-8 to 1.0×105 (abs)
Torr 7.5×10-11 to 760 (abs)mbar 1.0×10-10 to 1.0×103 (abs)
Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104Open/close operation principle ManualBellows lifespan 10000
6-dia. 4.4
UFC034UFC034seat surfaceside
dia. 30
69.234.634.6
33
258
1866
84Li
ft 1.
5
dia. 5.5 holes×4
(dia
. 33.
8)
(dia
. 33.
8)
2818
38 50
PCD25.97
Dimensions
VUH series
VUH-MVF
11
Ultra-High Vacuum Valve 10AIV/VLV Series
Ultra-High Vacuum Valve (Air Inlet Valve) 10AIV Series
*1 O-ring permeability is not included in the leak volume.
*1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air
SpecificationsItem Model 10AIV 10AIV-FM 10AIV-FConnection flange dia.15 UFC034-FH UFC070-FHMain unit material Stainless steelGasket material FPMAllowable baking temperature ˚C ≦150(at stopped) ˚F ≦302Pressure range Pa 1.0×10-7 to 1.0×105 (abs)
Torr 7.5×10-10 to 760 (abs)mbar 1.0×10-9 to 1.0×103 (abs)
Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104Open/close operation principle Manual
(unit: mm)
Model
ItemFlange specification Flange diameter Surface interval Total height Bolt center Hole quantity/diameter Weight
dia. D L H dia. C N-dia. B kg10AIV - Refer to external dimension diagram 0.310AIV-FM UFC034-FH 33.8 47 94 27 6-4.4 0.3 10AIV-F UFC070-FH 69.3 48.3 95.3 58.7 6-6.8 0.6
dia.
10
(hos
e po
rt)
dia. 14.9
dia. 10.5
dia.
10
(hos
e po
rt)
dia.
5
55
43
90
dia. 30
dia. DN-dia. B
dia.
5
dia. 14.9
55
L
H
dia. C
dia. 30
Dimensions
10AIV-F/FM10AIV
Variable Leak Valve VLV-3D Manual Valve
*1 Values when gas introduction pressure is 0.2 kg/cm 2G.*2 Values when gas introduction pressure is atmospheric pressure.
SpecificationsItem Model VLV-3DConnection flange UFC034Main unit material Austenitic stainless steel,
AL alloy, copper + Ni platingGasket material -Allowable baking ˚C ≦150temperature (at stopped) ˚F ≦302Pressure range Pa 1.0×10-9 to 1.0×105 (abs)
Torr 7.5×10-12 to 1.0×760 (abs)mbar 1.0×10-11 to 1.0×103 (abs)
Flow rate adjustment Pa・m3/s 10-8 to 1.0×10-4
range *1 Torr・L/s 7.5×10-8 to 7.5×10-4mbar・L/s 10-7 to 1.0×10-3
Leak rate *2 Pa・m3/s ≦7.0×10-11
Torr・L/s ≦5.25×10-10
mbar・L/s ≦7.0×10-10
Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104Open/close operation principle Manual
51
UFC034Vacuum side
UFC034Atmosphere side
9030 47
167
3115
4-dia. 9
7550 17
dia.
33.
8
Handle
5028
96
9070
Dimensions
10AIV series
VLV-3D
ULVAC, Inc. Components Division www.ulvac.co.jp/eng
Overseas Sales in Japan TEL +81-467-89-2261
USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC Singapore Philippines Branch TEL +63-2-828-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC Singapore Vietnam Representative Office TEL +84-8-62556762CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-312-4447TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700
This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 2196E/2013101000TL
*1 □: A(mm) or B(inch) *2 H: Manual, P: Compressed air drive *3 ( ): Valve closed. Cylinder part should less than 60˚C (140˚C)*4 VUGP-200,250: Incompatible with reverse pressure. (Vacuum/high vacuum valve compatible are 100A or less. More than 6B are compatible as an option.)
◆: Standard stock ◇: Made to order *1 UFC are ULVAC standard stainless steel knife-edge metal seal flanges.
Speci f icat ions
Connect ion Method
Series*1
Applicable pressure range
Valve type Drive method*2 Main unit material Axis seal
VLH-U□ L model valve H SS400 + nickel plating O-ring Nitrile rubber Nitrile rubber 60/140 ○VLH-U□S L model valve H SUS304 O-ring Flourine rubber Flourine rubber 120/248 ○VLP-U□ L model valve P SS400 + nickel plating O-ring Nitrile rubber Nitrile rubber 60/140 ○VLP-U□S L model valve P SUS304 O-ring Flourine rubber Flourine rubber 120/248 ○VLP-U□A L model valve P Aluminum alloy O-ring Flourine rubber Flourine rubber 120/248 ○VTP-U□A T model valve P Aluminum alloy O-ring Flourine rubber Flourine rubber 120/248 ○VLH-US-□KF L model valve H SUS304 O-ring Flourine rubber Flourine rubber 120/248 ○VLP-US-□KF L model valve P SUS304 O-ring Flourine rubber Flourine rubber 120/248 ○VAH-U□ Gate model valve H Aluminum alloy O-ring Nitrile rubber Nitrile rubber 60/140 ○VAP-U□ Gate model valve P Aluminum alloy O-ring Nitrile rubber Nitrile rubber 60/140 ○VULH-□F L model valve H SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VULH-□KF L model valve H SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VULP-□F L model valve P SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VULP-□KF L model valve P SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VUGH-□F Gate model valve H SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VUGP-□F Gate model valve P SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○10AIV Leak valve H SUS304 O-ring Flourine rubber Flourine rubber 150/302 ○VULH-□CM L model valve H SUS304 Bellows Metal Flourine rubber 150(200)/302(392) ○VULP-□CM L model valve P SUS304 Bellows Metal Flourine rubber 150(200)/302(392) ○VUGH-□CS Gate model valve H SUS304 Bellows Metal Flourine rubber 150(200)/302(392) ○VUGP-□CS Gate model valve P SUS304 Bellows Metal Flourine rubber 150(200)/302(392) ○VUH Other H SUS304 Bellows Metal Metal 200(250)/392(482) ○VUH-MVF Other H SUS304 Bellows Welded structure Polyimide resin 200/392 ○VLV-3D Variable leak valve H SUS304 Bellows Welded structure Metal 150/302 ○