Vacuum Measurement Vacuum Measurement Vacuum Measurement Vacuum Measurement Vacuabond Vacuabond, Inc. 3074 Kenneth Street, Santa Clara, California 95054 Tel (408) 261-6402 Fax (408) 516-5889 [email protected] 2 Fax ( 408) 5 16 5889 Contact@vacuabond com High Quality Vacuum System Design High Quality Vacuum System Design High Quality Vacuum System Design High Quality Vacuum System Design N ew C oncept of oncept of Pressure ressure Measurement easurement C rystal Gauge Gauge C rystalion Gauge Miniature I on Gauge 1E - 9 1E - 7 1E - 5 1E - 3 1E - 1 1E + 1 1E + 3 1E + 5 Reference Pressure (Pa) Crystalion Gauge Pressure 1E + 5 1E + 3 1E + 1 1E - 1 1E - 3 1E - 5 1E - 7 1E - 9 1E + 3 1E + 1 1E - 1 1E - 3 1E - 5 1E - 7 1E - 9 1E - 11 Torr Pa C Miniature Miniature I on on Gauge Gauge 5 1E 3 1E 1 1E + 1 1E C rystalion rystalion Gauge Canon Anelva Technix M-320XG M-330MX M-310HG M-Gauge Head and Controller Crystal Gauge provides Reliable, Repeatable and Fast Response Measurement in atmospheric pressure range as well as in lower pressure range of 10 -4 Torr. ■ Wide Measurement Range ■ Fast Response, Excellent Stability & Repeatability ■ No High Current No High Voltage No High Temperature ■ Excellent Process Gas Resistance ■ Full Range Stability in any Installation Angle ■ Built-in Controller & Communication Module ■ Simple, Compact & Light-weight Design ■ Low Power Consumption: only 2W Combination of Crystal and Miniature Ion Gauge. ■ ■ Seamless pressure measurement from ATM to 3 x 10 -10 Torr ■ ■ Wide Measurement Range ■ Excellent Linearity & Repeatability Display Unit M-390 & M-391 Pa: 1E - 9 1E - 7 1E - 5 1E - 3 1E - 1 1E + 1 1E + 3 1E + 5 Torr: 1E - 11 1E - 9 1E - 7 1E - 5 1E - 3 1E -1 1E + 1 1E + 3 A-NET Series Measurement Range Crystalion M-330MX ATM - 3x10 -10 Torr Crystal M-320XG ATM - 7x10 -4 Torr Ion Miniature M-310HG 10 -1 - 7x10 -9 Torr Miniature M-430HG M-832HG 10 -1 - 10 -9 Torr TC Combination Ionization M-922HG 10 -4 - 10 -11 Torr Wide operation range from 0.1 0.1 Torr to 10 -9 -9 Torr. ■ ■ Durable & Compact Metal Sensor Head 1/20 volume of B-A type ■ ■ Low Power Consumption, only 10W A-NET Series Canon Anel va Precise Vacuum Gauges from ■ Simple, Compact & Light -weight Design ■ Low Power Consumption: only 2W 3 ■ Low Power Consumption: only 2W 0MX 0MX E + 3 1E + 5 E + 3 1E + 5 ge ge ge aug aug aug uge ge ug ug g e e e ug ug u u ug u g e e from M 330 M-330 M M HG 310H M M-3 Measu pressu ■ W ■ Fa ■ N Dis D Dis Dis M-3 M A-NET Series Measurement Range T echni x Gauges G ■ ■ ■ splay U U Unit sp 390 & M-391 hnix N ew N N ew N e N Crystal Gauge provides Rel ides Rel Measurement in atmosphe es es Measu N M M-320XG G C tlG i id Quartz Crystal Actuator Electrode r W M M M-Gau and W M-Ga rr. Head Head W M
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Vacuum MeasurementVacuum MeasurementVacuum MeasurementVacuum MeasurementVacuabond
Vacuabond, Inc.3074 Kenneth Street, Santa Clara, California 95054 Tel (408) 261-6402 Fax (408) 516-5889 [email protected] Fax (408) 516 5889 Contact@vacuabond com
High Quality Vacuum System DesignHigh Quality Vacuum System DesignHigh Quality Vacuum System DesignHigh Quality Vacuum System Design
New Concept ofoncept of Pressure ressure Measurementeasurement
Crystal GaugeGauge
Crystalion Gauge
MiniatureIon Gauge
1E-9 1E-7 1E-5 1E-3 1E-1 1E+1 1E+3 1E+5 Reference Pressure (Pa)
Crys
talio
n Ga
uge
Pres
sure 1E+5
1E+31E+11E-11E-31E-51E-71E-9
1E+31E+11E-11E-31E-51E-71E-91E-11
Torr Pa
C Miniature MiniatureIon on GaugeGauge
5 1E 3 1E 1 1E+1 1E
Crystalion rystalion Gauge
Canon Anelva Technix
M-320XG
M-330MX
M-310HG
M-Gauge Head and Controller
Crystal Gauge provides Reliable, Repeatable and Fast ResponseMeasurement in atmospheric pressure range as well as in lower pressure range of 10 -4 Torr.
■ Wide Measurement Range■ Fast Response, Excellent Stability & Repeatability■ No High Current No High Voltage No High Temperature ■ Excellent Process Gas Resistance ■ Full Range Stability in any Installation Angle ■ Built-in Controller & Communication Module ■ Simple, Compact & Light-weight Design ■ Low Power Consumption: only 2W
Combination of Crystal and Miniature Ion Gauge.■ ■ Seamless pressure measurement from ATM to 3 x 10 -10 Torr■ ■ Wide Measurement Range■ Excellent Linearity & Repeatability
Display Unit M-390 & M-391
Pa: 1E-9 1E-7 1E-5 1E-3 1E-1 1E+1 1E+3 1E+5
Torr: 1E-11 1E-9 1E-7 1E-5 1E-3 1E-1 1E+1 1E+3
A-NET Series Measurement RangeCrystalion M-330MX
ATM - 3x10 -10 Torr
Crystal M-320XG
ATM - 7x10 -4 Torr
Ion Miniature M-310HG
10 -1 - 7x10 -9 Torr
Miniature M-430HG M-832HG 10 -1 - 10 -9 Torr
TC CombinationIonization M-922HG
10 -4 - 10 -11 Torr
Wide operation range from 0.10.1 Torr to 10 -9-9 Torr.■ ■ Durable & Compact Metal Sensor Head 1/20 volume of B-A type■ ■ Low Power Consumption, only 10W
A-NET Series
Canon Anelva Precise Vacuum Gaugesfrom
■ Simple, Compact & Light-weight Design ■ Low Power Consumption: only 2W
3
■ Low Power Consumption: only 2W
0MX0MX
E+3 1E+5E+3 1E+5
gegegeaugaugaugugegeuguggeeeuguguguguguggee
from
M 330M-330MM
HG310HMM-3
Measupressu
■ W■ Fa■ N
DisD DisDis M-3M
A-NET Series Measurement Range
TechnixGaugesG
■
■
■
splay UUUnitsp390 & M-391
hnix
NewNNewNeN
Crystal Gauge provides Relides RelMeasurement in atmosphe
iesiesMeasu
NMM-320XGG
C t l G iid
Quartz Crystal Actuator Electrode
r
W
MM
M-Gau andW M-Ga
rr.HeadHead
W M
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