UV Lamp SOP Page 1 of 4 Revision 1-051511 UV Lamp SOP 1. Scope 1.1 This document describes the operating procedures for the UV lamp. 2. Table of Contents 1. Scope................................................................................................................................................................ 1 2. Table of Contents.............................................................................................................................................. 1 3. Reference Documents...................................................................................................................................... 1 3.1 Referenced within this Document............................................................................................................... 1 3.2 External Documents.................................................................................................................................... 1 4. Equipment and/or Materials............................................................................................................................ 1 5. Safety................................................................................................................................................................ 1 6. Setup Procedures.............................................................................................................................................. 2 7. UV Lamp Procedure.......................................................................................................................................... 2 7.3 Set mer...................................................................................................................................................... 2 7.4 Place Wafer/Sample.................................................................................................................................... 2 7.5 Run Process................................................................................................................................................. 2 7.6 Shutdown.................................................................................................................................................... 3 8. Revision History................................................................................................................................................ 3 Figure 1, Main Power Switch.................................................................................................................................... 2 Figure 2, Instrument Panel....................................................................................................................................... 3 3. Reference Documents 3.1 Referenced within this Document 3.1.1 None. 3.2 External Documents 3.2.1 Include any external documents referenced within this SOP. 4. Equipment and/or Materials 4.1 UV Lamp. 4.2 UV Tape. 4.3 Wafer/ Sample. 4.4 Frame.