U.S. EPA 2004 Nanotechnology Science To Achieve Results (Star) Progress Review Workshop-Nanotechnology and the Environment II Ultrasensitive Pathogen Quantification in Drinking Water Using High Piezoelectric PMN-PT Microcantilevers 200 µm 100 µm Wan Y Shih and Wei-Heng Shih Dept Materials Science and Engineering Drexel University R829604 August 18-20, 2004
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U.S. EPA 2004 Nanotechnology Science To Achieve Results (Star) Progress Review Workshop-Nanotechnology and the Environment II
Ultrasensitive Pathogen Quantification in Drinking Water Using High Piezoelectric PMN-PT Microcantilevers
200 µm100 µm
Wan Y Shih and Wei-Heng Shih
Dept Materials Science and Engineering
Drexel University
R829604August 18-20, 2004
E.coli 0157:H7
• E.coli 0157:H7 is the main cause of :– Foodborne illness
Need: a sensor that is direct, sensitive, rapid, real-time, and in-situ
Dynamic Applications: Biosensors
nonpiezoelectric
piezoelectric
DESIGNDetection: DETECT MASS CHANGE
BY RESONANCE FREQUENCY SHIFTMeasurement: ELECTRICAL
-88
-86
-84
-82
-80
-78
18.8 19.0 19.2 19.4 19.6 19.8 20.0 20.2
f (KHz)
phas
e (d
eg)
in air0.04 mg0.09 mg
PHA
SE A
NG
LE (D
EG.)
FREQUENCY (kHz)
y = 2412.4xR2 = 0.9979
0
50
100
150
200
250
0 0.02 0.04 0.06 0.08 0.1
dm (mg)
df
(Hz)
FREQ
UEN
CY
SH
IFT(
Hz)
MASS CHANGE (mg)
Clamp
Impedance analyzer
PZT
Steel
Label freePortableRapid real-time detectionAirborne and in-liquid
Advantages:
Piezoelectric Microcantilever Biosensing
1 g/L Yeast Solution
-88
-87
-86
-85
-84
-83
-82
-81
16.5 17.0 17.5 18.0 18.5
f (KHz)
Phas
e (d
eg)
0 min10 min23 min35 min48 min61 min
0
50
100
150
0 20 40 60 80Time (min)
∆f
(Hz)
1 g/L
2 g/L2µm
Yeast Quantification
-87
-86
-85
-84
64 66 68 70 72
0 min
15 min
30 min
θ
frequency (kHz)0 10 20 30 40 50 60
0
200
400
600
800
1000
1200
∆f (
Hz)
time (min)
Protein Detection: Avidin
(a) (b)
0 10 20 30 400
50
100
150
200
250
300
−∆f (
Hz)
time (min)
Biotin-Avidin Binding Detection
Steel PZT
Clamp
0
100
200
300
400
500
0 10 20 3 0 4 0 50 60 70
time (min)−∆
f (H
z)
2µm
E coli Detection
Comparisons
Focusing Optics
Cantilever
Photodetector
Laser Diode
T. Thundat, E. A. Wachter, S. L. Sharp, and R. J. Warmack, Appl. Phys. Lett., 66, 1695 (1995).B. Ilic, D. Czaplewsli, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Batt, Appl. Phys. Lett., 77, 450 (2000).
Silicon microcantileverDisadvantages:
need a driver for actuation Need optical system for detectionQ factor ≈1 in water, in-water detection difficult Difficult for multiplexing
Silicon microcantilever Quartz Crystal Microbalance(QCM)Avidin binding on 3-mercatopropionic acid
0
200
400
600
800
1000
0 20 40 60 80
time (min)
∆f
(Hz) piezoelectric
cantilever
Cantilever of 0.7 mm long PZT with a 2.5 mm tip is already 16 times more sensitive in ∆f than the most common 5MHz QCM
Also difficult for multiplexing
QCM
QCM
2cm
Biophysical Journal,78, 487 (2000)
Mass Detection sensitivity
⎟⎟
⎠
⎞
⎜⎜
⎝
⎛=≅
∆∆
ρρπν
~~
~12236.011
421
3
2 EwLM
fmf
hphsw
LPZT
steel ∆m
J. W. Yi, W. Y. Shih, W. –H. Shih, J. Appl. Phys., 91(3), 1680-1686 (2002).
*Y. S. Fung* and Y. Y. Wong, Anal. Chem.2001, 73,5302-5309
0 5 10 15 20 25 300
100
200
300
400
500
Antibody im m obilization
-∆f(H
z)
T im e (m in)
Antibody immobilization detection
Gold
Glass
MPA with NHS+EDC
Antibody
10 MHz QCM*∆f=150 Hz PZT/glass cantilever
∆f=450 Hz*Y. S. Fung* and Y. Y. Wong, Anal. Chem.2001, 73,5302-5309
0 5 10 15 20 25 30
-350
-300
-250
-200
-150
-100
-50
0
Salmonella detection at 105 cells/ml
∆f(H
z)Time (min)
Salmonella T. at 105 cfu/ml
Salmonella detection at 105 cells/ml
Gold
Glass
MPA with NHS+EDC
Antibody
10 MHz QCM*∆f=40 Hz
PZT/glass cantilever∆f=300 Hz
*Y. S. Fung* and Y. Y. Wong, Anal. Chem.2001, 73,5302-5309
Summary for 0.4 mm long PZT/glass cantilever
Detection sensitivity: 3x10-11 g/Hz
C (cells/ml) 1x109 1x105 5x104 1x104
∆f 1400 Hz 300 Hz 180 Hz 90 Hz
∆m 42 ng 10 ng 6 ng 3 ng
Cellsneeded
3x105 4000 3000 1500
Vol. needed
4 µl 50 µl 70 µl 170 µl
Diffusiontype
Linear 3-d 3-d 3-d
Titanium
GOPTSAntibody
Salmonella T.
PZT/Ti cantileverBinding of
CSA-1
Antibody
to GOPTS
Binding of S.
Typhimurium
to Antibody
Brief Rinse in
BufferUn-Binding of S.
Typhimurium in
Glycine (pH =
2.5)
1.5 mm long PZT/Ti cantilever
Novel Coating Process for PMN-PT
Pb(Ac)2EG
Mg(OH)2 Nb2O5
500 600 700 800 900 1000
60
70
80
90
100
Soaking time: 2 hr
Bulk
den
sity
(%)
Sintering temperature (oC)20 25 30 35 40 45 50
20 µm thick PMN-PT tape
Inte
ns
ity
(a
.u.)
2θ (degree)
PMN-PT/Cu Microcantilevers
20 µmCu PMN-PT10 µm
Freestanding PMN-PT film
400 µm-40 -20 0 20 40
-40
-20
0
20
40
P (µ
C/c
m2 )
E (kV/cm)
1 cm
PMN-PT/Cu Microcantilevers
0 5 1 0 1 5 2 0 2 5 3 0
0
2 0
4 0
6 0
8 0
1 0 0
Tip
dis
pla
ce
me
nt
(µm
)
V o l t a g e ( v )
1 s t r u n ( 0 - 1 0 V ) 2 n d r u n ( 0 - 2 0 V ) 3 r d r u n ( 0 - 1 5 V ) 4 t h r u n ( 0 - 1 5 V ) 5 t h r u n ( 0 - 2 5 V ) 6 t h r u n ( 0 - 2 5 V ) *
( * : d e c r e a s e f r o m V m a x )
2 mm long PMN-PT/Cu cantilever
PMN-PTCuVDC
Laser displacement
meter
0 4 8 1 20
5 0 0
1 0 0 0
1 5 0 0
d3
1 (
10
-12m
/V)
E l e c t r i c f i e l d ( k V / c m )
1 s t r u n ( 0 - 1 0 V ) 2 n d r u n ( 0 - 1 5 V ) 3 r d r u n ( 0 - 1 5 V ) 4 t h r u n ( 0 - 1 5 V ) 5 t h r u n ( 0 - 2 5 V )
)tt(tEE)tt3t2t2(tEtE2tEtE
VL3hd
21121
212
22
122114
22
24
12
1231 +
++++⋅=
ZnO2 d31 < 10Bulk PMN-PT d31 ~ 250
PMN-PT single crystal cut in (100) d31 ~ 1500
R T
E
PMN-PT/Cu Microcantilevers
4 0 0 0 0 8 0 0 0 0 1 2 0 0 0 0
- 8 0
- 6 0
- 4 0
- 2 0
Ph
as
e A
ng
le (
de
gre
e)
F r e q u e n c y ( H z )
Peak 1
Peak 2
Peak 3
Q ~ 100
0.6 mm long PMN-PT/Cu cantileverPMN-PT 20 µm thick, Cu 5 µm thick
PMN-PTCuVAC
Humidity Sensing
2 4 2 5 2 6 2 7 2 8 2 9 3 0 3 1 3 2 3 3
6 9 3 0 0
6 9 3 5 0
6 9 4 0 0
6 9 4 5 0
6 9 5 0 0
6 9 5 5 0
6 9 6 0 0
6 9 6 5 0
2n
d P
ea
k F
req
ue
nc
y (
Hz
)
R e l a t i v e H u m i d i t y ( % )
b y d e s i c c a n t f l o w i n g H
2O / N
2 m i x t u r e
2nd peak
Slope=43 Hz/RH%
2 5 2 6 2 7 2 8 2 9 3 0 3 11 3 6 0 0 0
1 3 6 1 0 0
1 3 6 2 0 0
1 3 6 3 0 0
1 3 6 4 0 0
1 3 6 5 0 0
R e l a t i v e H u m i d i t y ( % )
b y d e s i c c a n t f l o w i n g H
2O / N
2 m i x t u r e
3rd peak
Slope=70 Hz/RH%
∆m/ ∆f ~10-12 g/Hz
Piezoelectric Microcantilever FabricationAntibodypad on Au
Au/Ti driving electrode Au/Ti sensing
electrode
SiO2PMN-PT/PZT
Al2O3
Si3N4
100 µm
PZT/Mo microcantilevers
1µm
-800 -600 -400 -200 0 200 400 600 800
-80
-60
-40
-20
0
20
40
60
80
Pr=27.5µC/cm2
Pmax=69µC/cm2
PZT (50 Layers)
P
olar
izat
ion
(µC
/cm
2 )
Drive Field (kV/cm)
Dielectric constant >1500
∆m/∆f = 10-15 g/Hz for 50 µm long cantilever
ConclusionsHigh piezoelectric PMN-PT films have been successfully made with
better than specially cut single-crystal piezoelectric properties
Array PMN-PT/Cu microcantilevers 500 µm long were made showing better than 10-12 g/Hz
we demonstrated in-situ real time detection of Salmonella in standingwater with PZT/glass and PZT/Ti cantilevers with various immobilization schemes
0.4 mm long PZT/glass cantilevers of 3x10-11 g/Hz sensitivity 3-4 times more sensitive than 10MHz QCM in protein/molecular detection, 6-7 times more sensitive than 10MHz QCM’s planar detection in cell detection
The better than 104 cfu/ml detection sensitivity comparable to a 10 MHz QCM, better than commercial ELISA, and tapered optical fiber sensors
Further sensitivity improvement includes using PMN-PT/Cu microcantilevers, using a flow cells
Ceramic Processing and Sensor Group
Students:
Q. Zhu, J.-P. McGovern, H. Luo, C. Martorano, Z. Shen, H. Li, H.D. Li, H. Yegingil, J. Bermudez, Y. Chiu,
Collaborators:
R. Mutharasan, I. Chaiken, N. Robertson, R. Rest, P. Loll, A. Saunders, A. Brooks, F. Garcia, E. Papazoglou, B. Onaral, R. Lec, K. Pourrezai, Compex Inc., ExxonMobil