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© 2018 TSMC, Ltd
TSMC Property
0
Jyun-Ying Lin, H.L. Cheng, J.H. Yang, L.S. Jeng, Chen-Hao Huang,
Eva Su, T.C. Hsu, Felix Tsui, Shih-Fen Huang, Alexander Kalnitsky
Ultra High Density Capacitor for
Power Management Applications
Taiwan Semiconductor Manufacturing Company,
Hsin-Chu, Taiwan.
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© 2018 TSMC, Ltd
TSMC Property
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Outline
TSMC deep trench capacitor (DTC)
Equivalent series resistance and inductance
Surface mount capacitor
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© 2018 TSMC, Ltd
TSMC Property
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TSMC DTC characteristics Density,
nF/mm2 Breakdown
Voltage, V TDDB, V
Operation
Voltage, V
250 14.3 8 5.0
600 5.5 4 1.5
950 4.2 1.7 1.2
1500 5.1 1.6 1.2
Op
era
tio
n v
olt
ag
e
0
1
2
3
4
5
6
0 500 1000 1500 2000
Cap Density
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TSMC Property
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DTC Voltage Coefficient
MLCC
C1
C2
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TSMC Property
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DTC Temperature Coefficient
MLCC
C1
C2
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TSMC Property
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DTC Frequency Response
C5
C4
C3
C2
C1
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TSMC Property
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Outline and Summary
TSMC deep trench capacitor (DTC)
1500nF/mm2 is demonstrated for 1.2V operation voltage.
TCC and VCC are better than commercial capacitor.
Equivalent series resistance and inductance
Surface mount capacitor
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TSMC Property
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Capacitor in parallel
…
n
C
ESR
ESL
Single Capacitor Parallel Capacitors
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TSMC Property
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DTC Equivalent Series Resistance
C5
C4
C3
C2
C1
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TSMC Property
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DTC equivalent series inductance
C5
C4
C3
C2
C1
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© 2018 TSMC, Ltd
TSMC Property
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Outline and Summary
TSMC deep trench capacitor (DTC)
1500nF/mm2 is demonstrated for 1.2V operation voltage.
TCC and VCC are better than commercial capacitor.
Equivalent series resistance and inductance
Capacitor with in-parallel DTC cells can provide excellent
ESR and ESL.
Surface mount capacitor
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TSMC Property
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Surface Mount Capacitor
Top view
Total height
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TSMC Property
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DTC Equivalent Series Inductance
MLCC
C1
C2
0.2uF
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TSMC Property
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DTC Equivalent Series Resistance
MLCC
C1
C2
0.2uF
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© 2018 TSMC, Ltd
TSMC Property
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0.001
0.01
0.1
1
10
100
1.E+05 1.E+06 1.E+07 1.E+08 1.E+09 1.E+10
Imp
ed
ance
(O
hm
)
Frequency (Hz)
DTC Impedance
MLCC
C1
C2
0.2uF
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© 2018 TSMC, Ltd
TSMC Property
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Summary
TSMC deep trench capacitor (DTC)
1500nF/mm2 is demonstrated for 1.2V operation voltage.
TCC and VCC are superior to commercial capacitors.
Equivalent series resistance and inductance
Capacitor with in-parallel DTC cells can provide excellent
ESR and ESL.
Surface mount capacitor
Low ESR and ESL can be achieved by interconnection
optimization.
DTC process offers thin IPD thickness (<70um).