Three-dimensional micro electromechanical system piezoelectric ultrasound transducer Arman Hajati, Dimitre Latev, Deane Gardner, Azadeh Hajati, Darren Imai et al. Citation: Appl. Phys. Lett. 101, 253101 (2012); doi: 10.1063/1.4772469 View online: http://dx.doi.org/10.1063/1.4772469 View Table of Contents: http://apl.aip.org/resource/1/APPLAB/v101/i25 Published by the American Institute of Physics. Related Articles Efficient counter-propagating wave acoustic micro-particle manipulation Appl. Phys. Lett. 101, 233501 (2012) Piezoelectric and electrostrictive effects in ferroelectret ultrasonic transducers J. Appl. Phys. 112, 084505 (2012) Piezoelectric resonator arrays for tunable acoustic waveguides and metamaterials J. Appl. Phys. 112, 064902 (2012) Focused high frequency needle transducer for ultrasonic imaging and trapping Appl. Phys. Lett. 101, 024105 (2012) A rigid, monolithic but still scannable cavity ring-down spectroscopy cell Rev. Sci. Instrum. 83, 043115 (2012) Additional information on Appl. Phys. Lett. Journal Homepage: http://apl.aip.org/ Journal Information: http://apl.aip.org/about/about_the_journal Top downloads: http://apl.aip.org/features/most_downloaded Information for Authors: http://apl.aip.org/authors
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Three-dimensional micro electromechanical system piezoelectricultrasound transducerArman Hajati, Dimitre Latev, Deane Gardner, Azadeh Hajati, Darren Imai et al. Citation: Appl. Phys. Lett. 101, 253101 (2012); doi: 10.1063/1.4772469 View online: http://dx.doi.org/10.1063/1.4772469 View Table of Contents: http://apl.aip.org/resource/1/APPLAB/v101/i25 Published by the American Institute of Physics. Related ArticlesEfficient counter-propagating wave acoustic micro-particle manipulation Appl. Phys. Lett. 101, 233501 (2012) Piezoelectric and electrostrictive effects in ferroelectret ultrasonic transducers J. Appl. Phys. 112, 084505 (2012) Piezoelectric resonator arrays for tunable acoustic waveguides and metamaterials J. Appl. Phys. 112, 064902 (2012) Focused high frequency needle transducer for ultrasonic imaging and trapping Appl. Phys. Lett. 101, 024105 (2012) A rigid, monolithic but still scannable cavity ring-down spectroscopy cell Rev. Sci. Instrum. 83, 043115 (2012) Additional information on Appl. Phys. Lett.Journal Homepage: http://apl.aip.org/ Journal Information: http://apl.aip.org/about/about_the_journal Top downloads: http://apl.aip.org/features/most_downloaded Information for Authors: http://apl.aip.org/authors
features such as high sensitivity (more than 100 kPa/V), ad-
justable wide-bandwidth frequency response (greater than
55%), CMOS-compatible low transmit voltage (2-20 V), low
electrical impedance (less than 50 X), efficient electrome-
chanical coupling (greater than 45%), and reliable mono-
lithic fabrication. We envision that Clarinet TechnologyTM
can be implemented as a desirable solution in various
medical imaging applications. Exploiting its small form-
factor, high sensitivity, low voltage level, and low imped-
ance well matched to micro-coaxial cables, the transducer
can be incorporated into high performance endoscopy ultra-
sound (EUS) catheters to achieve high quality GI imaging
especially in depicting the gut wall as a series of layers
correlating with histologic features.28 Similarly, it enables
low-voltage and miniaturized transesophageal echocardio-
gram (TEE) and intracardiac echocardiogram (ICE) probes
that can provide superior image quality.29,30 In addition, this
technology is an obvious solution for high-frequency, high
resolution, and miniaturized intravascular ultrasound (IVUS)
to provide accurate quantitative and qualitative information
regarding the lumen and outer vessel wall.31 Besides in-vivoimaging, it can enable high performance, low-power, low-
voltage, and portable 3D/4D sonography32 and an affordable
3D ultrasound stethoscope. Finally, the integration of low-
voltage CMOS chips with the MEMS structure can enable
unforeseen applications.
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FIG. 6. Measured time-domain acoustic pulse and its corresponding FFT
spectrum measured at 9 mm depth by hydrophone. 4 channels are excited by
100 ns pulse trains.
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