-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
1 Nhm 3 - KT C in t - K56
MC LC
LI M U
.....................................................................................................................
3
Chng I: Tng quan v MEMS v la chn trc
..............................................................
4
1. Tng quan v MEMS
................................................................................................
4
2. Lch s pht trin ca MEMS
......................................................................................
6
3. Tng quan v cc loi micro motor
.............................................................................
8
3.1. ng c s dng b kch hot tnh in kiu rng lc
........................................ 8
3.1.1 Nguyn l hot ng
.............................................................................................
8
3.1.2. Cu to
................................................................................................................
9
3.1.3. ng dng
.............................................................................................................
9
3.1.4. u im, nhc
im........................................................................................
10
3.2. ng c s dng b kch hot nhit
.......................................................................
11
3.2.1. Cu to v nguyn l hot ng ca b kch hot nhit hot cold arm
........... 11
3.2.2. u im, nhc
im........................................................................................
12
3.2.3. ng dng
...........................................................................................................
12
3.3. Motor quay 2 chiu nhit ch V
.............................................................................
13
3.3.1 Cu to v nguyn l hot ng ca b kch hot nhit ch V
.......................... 13
3.3.2 u im, nhc
im........................................................................................
14
3.3.3 ng dng
...........................................................................................................
14
4. xut m hnh
.........................................................................................................
15
Chng II : Tnh ton thit k
...........................................................................................
16
1. Nguyn l hot ng
..................................................................................................
16
2. Tnh ton vi ng c
..................................................................................................
16
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
2 Nhm 3 - KT C in t - K56
ChngIII: Qu trnh ch to actuator nhit in
..............................................................
22
1. Cc Mask s dng trong qu trnh gia cng
............................................................ 22
2. Ch to bnh rng v dm:
......................................................................................
24
3.Ch to 3 trc ti bnh rng v dm.
...........................................................................
28
5.Ch to thanh truyn th hai.
......................................................................................
37
Chng IV:Kt Lun.
........................................................................................................
43
Ti liu tham kho
.............................................................................................................
44
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
3 Nhm 3 - KT C in t - K56
LI M U
Vi s pht trin ca khoa hc cng ngh trong nhng thp nin gn y, th
k
XIX c coi l th k ca k nguyn s v cng ngh cao.Xu th tp trung v
nhng
ngnh cng nghip cng ngh cao, k thut tinh vi chuyn mn t ng trong
sn xut t
khu nghin cu ch to n bc cui cng hnh thnh sn phm. p ng nhng
nhu
cu yu cu cao ca con ngi, cng nh ph hp vi s tt yu pht trin ca thi
i
nn kinh t tri thc ngy cng hon thin v tin tin hn.
Trong ngnh khoa hc cng ngh cao th lnh vc vi c in t tuy mi pht
trin
nhng c nhng ng gp to ln cho s pht trin khoa hc cng ngh ca ton
nhn
loi, c bit ngnh micromotor ch trng rt nhiu cho nhng ci tin pht
minh ng
dng su rng trong cc nghnh cng nghip, k thut iu khin t ng, t ng
ha
cao thay th lao ng trc tip ca con ngi. c s gip ca ging vin chng
em
chn ti : Vi ng c kiu nhit in lm ti nghin cu cho mn hc thit k
h thng vi c in t ca mnh.
Trong qu trnh hc tp v nghin cu, c s gip tn tnh ca thy ging
dy mn hc thit k h thng vi c in t gip chng em hon thnh ti
nghin
cu ny. Tuy c nhiu c gng nhng khng trnh khi nhng sai st v hn ch
cn
khc phc. V vy chng em rt mong c s ch bo ng gp kin t thy chng
em c th khc phc v hon thin hn ti m chng em nghin cu.
Cui cng chng em xin chn thnh cm n s quan tm ch bo tn tnh ca
thy
PGS.TS.Phm Hng Phc gip chng em hon thnh ti ny !
Trn trng cm n
H Ni, ngy 16 thng 3 nm 2015
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
4 Nhm 3 - KT C in t - K56
Chng I: Tng quan v MEMS v la chn trc
1. Tng quan v MEMS
Vo th k XX, cc thit b in t c tch hp vi s lng ngy cng ln, kch
thc ngy cng nh v chc nng ngy cng c nng cao. iu ny mang li s
bin i su sc c v mt cng ngh ln x hi. Vo cui nhng nm 50 ca th k
XX,
mt cuc cch mng ho v cng ngh micro din ra v ha hn mt tng lai cho
tt
c cc ngnh cng nghip. H thng vi c in t (Micro ElectroMechanical
Systems)
vit tt l MEMS cng c ra i v pht trin trong giai on ny.
H thng vi c in t -MEMS (Micro Electro Mechanical Systems) l h
thng
tch hp cc phn t c kh, cm bin, b kch hot v cc cu kin in t c sn
xut
bng cng ngh Micro. Hai dng sn phm chnh ca MEMS l sensor ( cm
bin) v
actuator (b kch hot)
`
Hnh 1.1: Sn phm chnh ca MEMS
MEMS
Sensor Actuator
Lc Gia
tc
Vn
tc
gc
Nhit Nhit
p
in
Tnh
in
Hp
kim
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
5 Nhm 3 - KT C in t - K56
Cng ngh vi c v ang tin xa hn nhiu so vi ngun gc ca n l cng
nghip bn dn. MEMS bao gm nhng cu trc vi c, vi sensor, vi chp hnh
v vi in
t cng c tch hp trn cng mt chip (on chip). Cc linh kin MEMS thng
c
cu to t silic. Mt thit b MEMS thng thng l mt h thng vi c tch hp
trn mt
chip m c th kt hp nhng phn c chuyn ng vi nhng yu t sinh hc, ho
hc,
quang hoc in. Kt qu l cc linh kin MEMS c th p ng vi nhiu loi li
vo:
ho, nh sng, p sut, rung ng vn tc v gia tc...Vi cc u th: c th to
ra nhng
cu trc c hc nh b tinh t v nhy cm c th, cho php tch hp cc mch in
t
hp (IC) hoc cc cu trc khc nhau, ch to hng lot, lp li cao, c th l
mt linh
kin n l hoc l mt thit b hon chnh, cng ngh vi c hin nay cho php
to ra
nhng b cm bin (sensor), nhng b chp hnh (actuator) c ng dng rng
ri trong
cuc sng. Cc b cm bin siu nh v rt tin ch ny thay th cho cc thit b
o c
k, cng knh trc y. Song cng ngh MEMS mi ang giai on u ca n v
cn rt nhiu nhng nghin cu c bn hn, su hn.
B chp hnh ( dn ng, truyn ng Actuator) l cu trc bin i cc dng
nng lng c, quang, nhit, in t, ha hc, sinh hc thnh nng lng c hc,
to ra
chuyn ng tng ng vi mt qu trnh iu kin. Kt qu ca mt qu trnh c
th
l mt tc ng di dng: ngn cn, kp cht, ko y. c ng dng trong lnh vc
t
ng ha trong cc quy trnh sn xut: motor, robot
V Micro Motor, c 2 loi ng c s dng 2 b kch hot in hnh l:
ng c s dng b kch hot tnh in (Kiu rng lc)
ng c s dng b kch hot nhit (B kch hot nhit ch V hoc b kch
hot nhit hot cold arm)
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
6 Nhm 3 - KT C in t - K56
Cm bin p sut Cm bin gia tc Con quay vi c
Micromotor Vi gng ( Micromiror ) Vi vn chuyn
Hnh 1.2: Mt s ng dng ca MEMS
2. Lch s pht trin ca MEMS
- Thp k 50
+ 1954: Charles Smith tm ra hiu ng p in tr vt liu bn dn (Silicon
- Si v
Germanium - Ge) .
+ 1958: Cm bin o bin dng (strain gauge - SG) tr thnh thng phm
(hng
Honeywell) .
+ 12/1959: Richard P. Feymann c bi thuyt trnh ni ting Plenty of
Room at the
Bottom cp tng vi ch to cc linh kin v thit b
- Thp k 60
+ 1962: Cng b cc nghin cu v n mn t ng hng vt liu si-lc trong
qui
trnh ch to bng bn dn (Transistor).
+1967: Cng b cc kt qu nghin cu v n mn t d hng (anisotropic
etching) v
n mn dng (etch-stop) vt liu si-lc.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
7 Nhm 3 - KT C in t - K56
+1967: Ra i cng ngh vi c b mt (surface micromachining).
+ 1969: Ln u tin, transistor bn dn FET c chto theo cng ngh
MEMS.
- Thp k 70
+ 1977: Cm bin p sut kiu t c ch to ln u tin.
+ 1979: Cm bin gia tc silicon u tin c ch to.
- Thp k 80
+ 1984: Linh kin MEMS trn c s vt liu polysilicon c ch to ln u
tin.
+ 1987: Thut ng MEMS chnh thc c a ra v c tha nhn ch v mt lnh
vc cng ngh mi, km theo l cc bin th tng ng, MICROSYSTEM s dng
chu u v MICROMACHINED Nht.
+ 1989: Vi ng c hot ng theo nguyn l tnh in cng c ch to thnh
cng.
- Thp k 90
+ 1993: Cm bin gia tc vi c b mt chnh thc tr thnh thng phm.
+ 1995: M ra k nguyn ca cc linh kin MEMS y-sinh.
+ 1999: Mt lot cc thit b cng ngh tin tin cho cc qui trnh ch to n
mn kh
su, ct gt bng laser, quang khc UV su (deep UV) c ch to gip ci
thin cho
cc qu trnh ch to.
- Th k 21
+ 2000: Cc b chuyn mch quang dng si quang dn tr thnh thng phm v
to
c doanh s ln.
+ 2001: Pht trin MEMS nng lng ng dng lm b ngun in trong cc thit
b di
ng.
+ 2002: nh du giai on cc linh kin MEMS c pht trin ng dng mnh
m
trong lnh vc y-sinh lm cc b phn tch ha-sinh hon chnh siu nh nh h
phn
tch DNA.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
8 Nhm 3 - KT C in t - K56
+ 2007: H thng vi vn chuyn (Microtransportation) c ch to .
Hnh 1.3: Micro motor rng lc
3. Tng quan v cc loi micro motor
3.1. ng c s dng b kch hot tnh in kiu rng lc
3.1.1 Nguyn l hot ng
Hnh 1.4: Tnh in kiu rng lc
B kch hot tnh in kiu rng lc c nguyn l hot ng nh sau: Khi ta
t
vo 2 bn t c xp song song nh hnh v mt hiu in th th gia chng sinh
ra lc
tnh in theo phng php tuyn, lc ny lm cho hai bn t b ht vo vi
nhau.
Lc tnh in theo phng php tuyn Fn:
= 020
2
Trong :
A: Din tch phn rng lc (bn t) trng nhau, A = h.y0
, 0: Cc hng s in mi, h: B rng rng lc (bn t).
V: in p t, y0: Phn rng lc trng nhau.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
9 Nhm 3 - KT C in t - K56
3.1.2. Cu to
Cu to b kch hot tnh in kiu rng lc bao gm cc bn t in c xp
song song, an xen ln nhau (hnh v). Trong , c mt bn cc l bn cc c
nh, bn
cc kia c th di ng c. Khi ta t vo 2 bn cc ny mt hiu in th V, th
lc
tnh in sinh ra gia 2 bn cc s ht bn cc di ng v gn pha vi bn cc c
nh.
trn bn cc di ng c th c gn vi cc thanh nhm truyn chuyn ng ra
ngoi.
Hnh 1.5: Cu to tnh in kiu rng lc
3.1.3. ng dng
B kch hot nhit kiu rng lc c ng dng v ch to rt rng ri trong
nhiu lnh vc khc nhau nh: cng nghip, y sinh, . trn th gii, th cu
trc truyn
ng tnh in kiu rng lc c ng dng t nhng nm 1989 l: Cho xc nh v
tr a cc u ln u tin ch to. Tip sau l vi ng c hot ng theo nguyn
l
tnh in ( Rotary electrostatic micromotor) cng c ch to thnh
cng.
Hnh 1.6: Vi cu trc ca ng c tnh in
Nm 2007: H thng vi vn chuyn (microtransportation) s dng b kch
hot tnh in
kiu rng lc c ch to thnh cng.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
10 Nhm 3 - KT C in t - K56
Hnh 1.7: Microtransportation
Hin nay, vic ch to micro motor s dng b kch hot tnh in kiu rng
lc
t c mt s thnh tu nht nh. Trong tng lai ng dng ca micro motor
s
ngy cng nhiu v quan trng hn do nhng u th vt tri ca cc chi tit
kch thc
micro m cc chi tit kch thc thng khng th c. V vy, nghin cu v ch
to
micro motor s l mt lnh vc khoa hc v cng nghip pht trin mnh m
trong tng
lai.
Hnh 1.8: ng c quay mt chiu s dng b kch hot tnh in kiu rng lc
3.1.4. u im, nhc im
u im: Tiu hao nng lng thp, thch hp vi mch IC
Nhc im: Kt cu phc tp, cc bn t c xu hng b ht li vi nhau gy mt
cu trc t dn n d hng linh kin.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
11 Nhm 3 - KT C in t - K56
3.2. ng c s dng b kch hot nhit
a) B kch hot dng s gin n b) B kch hot cp nhit ca cht kh , cht
lng
c) B kch hot hot cold arm d)B kch hot dm ch V
Hnh 1.9: Cc b kch hot nhit( Electrothermal Actuator)
3.2.1. Cu to v nguyn l hot ng ca b kch hot nhit hot cold arm
Hnh 1.10: Thermal actuator hot cold arm (one hot arm)
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
12 Nhm 3 - KT C in t - K56
Cu to ca b kch hot nhit dng hot- cold arm c th hin nh hnh v.
t
vo hai u ngm ca b kch hot mt hiu in th V, v trong cc thanh hot
arm v
cold arm u c in tr sut m hot arm thng mng hn so vi cold arm, nn
in tr
ca hot arm tr nn cao hn so vi cold arm. Khi mt dng in i qua hot
v cold arm,
th nhit to ra trong hot arm ln hn nhit to ra trong cold arm. Dn
n thanh hot arm
dn n v nhit ln hn cold arm, thanh hot arm c cu trc n hi gin ra y
cong v
pha thanh cold arm, b kch hot chuyn ng. Khi hiu in th bng 0, lc
ny nhit
trang cc thanh hot v cold arm tr v nhit mi trng, tr v v tr ban
u, b
kch hot khng chuyn ng.
3.2.2. u im, nhc im
u im: Kt cu n gin, d thit k, khi hot ng cn in p u vo thp
Nhc im: Hot ng da vo s thay i nhit v dn n ca vt liu
lm dm. Km nhy hn kt cu tnh in.
3.2.3. ng dng
Hin nay cc ng c quay, tnh tin s dng b kch hot nhit hot cold
arm
ang c nghin cu, thit k v ch to rng ri trong nhiu lnh vc. Di y l
mt
s m hnh ng c s dng b kch hot nhit hot cold arm ca i hc Texas
Christian, M.
Hnh 1.11: Micro motor tnh tin 2 chiu s dng b kch hot nhit hot
cold arm
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
13 Nhm 3 - KT C in t - K56
Hnh 1.12: Micro motor quay s dng b kch hot hot cold arm
3.3. Motor quay 2 chiu nhit ch V
3.3.1 Cu to v nguyn l hot ng ca b kch hot nhit ch V
Hnh 1.13: B kch hot nhit ch V
Trong b kch hot nhit ch V (hnh v), dm V c kch thc b rt nh hn
so
vi chiu di L ( L 100.b ). t hiu in th dng xung (f) vo hai u ca b
kch
hot nhit ch V. Lc hiu in th gia hai u ngm l V, dm mnh c in tr
sut
do s nng ln v c s gin n v nhit . Cng gn v pha ngm th dm ch V
cng
gin n nh v pha u ngm nhit gn nh bng vi mi trng nn s gin n l
khng ng k. Cng xa pha ngm th s gin n cng ln ko theo dm y tnh tin
v
pha trc. Lc hiu in th gia hai u ngm l 0, lc ny nhit trong dm ch
V
bng vi nhit mi trng do dm ch V s dch chuyn v v tr ban u ko
theo
dm y cng tr v v tr ban u.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
14 Nhm 3 - KT C in t - K56
3.3.2 u im, nhc im
u im: Kt cu n gin, d thit k, khi hot ng cn in p u vo thp.
Nhc im: Hot ng da vo s thay i nhit v dn n ca vt liu
lm dm. Km nhy hn kt cu tnh in.
3.3.3 ng dng
M hnh ca mt s ng c s dng b kch hot nhit ch V:
Hnh 1.14: Cu to vi ng c (Hi ngh c hc KT 9/4/2014)
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 10, NO. 2, JUNE
2001
Hnh 1.15:Vi ng c s dng b kch hot nhit ch V
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
15 Nhm 3 - KT C in t - K56
Trong thc t hin nay cc ngnh khoa hc v cng nghip v MEMS pht
trin ln tm cao, t c nhiu thnh tu ng k nhng lnh vc v Micro motor
c
bit l micro motor s dng b kch hot nhit ch V ang l vn kh mi m,
cha
pht trin xng tm vi nhng u vit m b kch hot ny mang li. V vy, nhm
chng
em mnh dn chn ti Tnh ton, thit k v ch to Motor nhit in 1
chiu
ch V. Nhm mc ch chnh l gii thiu quy trnh thit k mt Motor theo
quy trnh
MEMS vi b kch hot nhit ch V.
4. xut m hnh
Da vo yu cu l ch to motor quay hai chiu nhit ch V v s tham kho
cc
kt cu trc . Nhm chng em thng nht tng ca m hnh nh sau :
Hnh 1.15: M hnh cu trc
M hnh gm 2 dm ch V, 2 thanh dn truyn v 2 bnh rng n khp vi
nhau
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
16 Nhm 3 - KT C in t - K56
Chng II : Tnh ton thit k
1. Nguyn l hot ng
H thng kch hot ch V t vung gc theo hai phng Ox v Oy , 1 thanh ko
v 1
thanh y lm cho c cu culit gn trn bnh rng chuyn ng, ko theo h
thng bnh
rng chuyn ng.
u im:
Nguyn l hot ng n gin.
Nhc im:
Kt cu kh cng knh.
Chuyn ng lc ca cult c hin tng git khi chuyn ng vi tn s ln.
2. Tnh ton vi ng c
Hnh 2.1: Cu trc dm ch V
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
17 Nhm 3 - KT C in t - K56
Phng trnh truyn nhit trong cc dm ch V:
- 2
2
20
d Tk J
dx
(1) (Trch ti liu 3)
Trong :
T l nhit ti v tr x
k l h s dn nhit ca vt liu
l in tr sut ca dm, J l mt dng in
Nghim ca phng trnh trn c biu din nh sau :
- 2 2
2 2 2 2 2 2 2
1 1( )
AL ALAx Ax
r AL AL AL AL
B B e B eT x T e e
A A e e A e e
(2)
Vi cc thng s ban u c ly theo tiu chun
rT =200C Nhit phng
2
2(2 ) O
UB
L k ,
2A B , L=1000 m , U=30V, =4.10-6 , 3 01,25.10 / C
1200o m , k=1,5.10-4 W/ m K
Thay vo ta c :
29
6 2 4
305.10
(2.1000.10 ) .1200.1,5.10B
=> A2=B ; =1,25.103 => A=2500;
=>2
800B
A
2
2 2
2
2 2
10.07585818003
10.9241418201
AL
AL AL
AL
AL AL
e
e e
e
e e
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
18 Nhm 3 - KT C in t - K56
(3)
=> 0ax ( 1000) 396mT T L C
Hnh 2.2: Phn b nhit vi dch chuyn
Ta i tnh chuyn v ca dm:
Hnh 2.3: S tnh chuyn v dm
Coi - h s gin di l hng s ta c gin di ca dm V l:
1 2 1 2
2
0
[T(x)-T ] [ . ]
L
AL AL
r
C C C CBL dr L e e
A A A A A
(4)
0.001250000000 -0.001250000000( ) : 820.0000000 -60.68654402
-739.3134561x xT x e e
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
19 Nhm 3 - KT C in t - K56
2 2
1 22 2 2 2 2 2
1 1,
AL AL
AL AL AL AL
B e B eC C
A e e A e e
Thay s ta c:
=1,03 mL
Chuyn v ca dm y : ( gc chn 20 )
(4)2 2 2( ) os sinD L L L c L
(5)
6 2 6 2 2 0 6 0((1000 1,03).10 ) (1000.10 ) os (2 ) (1000.10
).sin(2 )
22,33
c
m
- dch chuyn tng hp ca thanh y khi c cu hot ng :
Trong mt chu k quay ca vi ng c, im t ca thanh y trn bnh rng s
di
chuyn ht qung ng bng chu vi ca vng trn cha im t , ng thi di
chuyn ht khong dch chuyn ca thanh dm do tc ng ca dm ch V gy ra ,
tc l
:
2 2R D
7,11D
R m
Lc y trn dm ch V
Hnh 2.5: S lc dm ch V
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
20 Nhm 3 - KT C in t - K56
Lc sinh ra do bin dng nhit trn dm ch V:
b
LF EA EA
L
(6)
Vi: E l m un n hi ca vt liu silicon ( chn E =169 GPa)
A l din tch mt ct ngang ca dm V
Lc sinh ra trn dm y theo quy tc tng hp lc :
9 6 6 0
er
1,032 sin . os 2.5.169.10 .(6.10 ).(30.10 ). .sin(2 )
1000
10,33( )
th mal
LF nEA c
L
mN
(7)
n : s cp dm
Lc ma st ca bnh rng vi nn :
6 2 5 102329 188 10 10 0 38 9 8 10ms ms
F V N . . . .( . ) . . , , . ( ) (8)
Phng trnh cn bng lc: er 0th mal msF F F (9)
Suy ra: erth mal msF F F
erth malF >> msF nn ta b qua lc ma st.
-Tnh ton cc momen trn bnh rng
Momen m dm y tc dng tm quay ca bnh rng:
3 6 7
er er15 10 7 11 10 1 07 10
th mal th malM F R N m . . . , . , . ( . ) (10)
- Momen cn trn bnh rng.
Suy ra: 9 6 132 94 10 188 10 5 5 10c
M Fms R . , . . . , . (Nm)
Trong :
Fms_ Lc ma st ca bnh rng vi nn.
R_Bn knh ca khp tc ng quay bnh rng.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
21 Nhm 3 - KT C in t - K56
Phng trnh cn bng moment:er 0th mal cM M M (11)
Suy ra: erth mal cM M M
Ta thy erth malM >> Mc nn bnh rng quay c vi cc thng s dm y
v kch
thc nh tnh.
-Vn tc quay ca bnh rng
Ta c vn tc di ca bnh rng
Dv
t
(12)
Vi :
D =22,33 m
t l thi gian t lc dm y chm khp trn bnh rng n lc n y ht hnh
trnh
22,33 m. Ta c th coi thi gian ny gn bng thi gian cp in vo dm V.
Ngun cp
50 hz nn ly t=0,01s
Suy ra:
6322 33 10 2 233 10
1 0 01
2
Dv m s
f
, ., . ( / )
,. (13)
=> v
wR
;
Vi R l khong cch t tm bnh rng n tm ca trc
=>
3
6
2,233.10314,1(rad/ s)
7,11.10w
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
22 Nhm 3 - KT C in t - K56
ChngIII: Qu trnh ch to actuator nhit in
Hnh 3.1. Actuator nhit in.
1. Cc Mask s dng trong qu trnh gia cng
gia cng vi ng c nh yu cu, ta s dng 4 mask nh sau
+ Mask 1: To cu trc bnh rng v cc dm kch hot nhit ch V.
+ Mask 2: To cu trc trc trn cc dm V v trn bnh rng
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
23 Nhm 3 - KT C in t - K56
+ Mask 3 : To cu trc ca tay quay 1 v gi .
+ Mask 4: To cu trc ca tay quay 2
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
24 Nhm 3 - KT C in t - K56
2. Ch to bnh rng v dm:
Bc 1: Chun b tm wafer v ph cht cm quang photoresist:
Chun b tm wafer. Tm wafer dng trong qu trnh ch to l tm silicon
trn
lp cch in SOI ( Silicon OnInsulating layer). Tm wafer gm c 3 lp
chnh:
Hnh 3.2 Cu trc tm wafer
Lp Si c b dy 30 m .
Lp SiO2 c b dy 4 m .
Lp Silicon nn c b dy 450 m .
Trc khi gia cng cn a tm wafer vo bung sch ra cc tp cht trn
b mt bng cch dng dung dch axeton cng nghip ra trong vng 5 pht.
Sau
ra li bng nc sch. Tip theo ra bng hn hp dung dch 2 4 2 2H SO H
O
t l 4:1 (nc Piraha). Sy kh loi b m trn b mt nhit 100-200.
Photoresist l mt cht cn quang c tnh nhy sng dng .Trc khi ph
photoresist ta tin hnh ph mt lp ha cht OPA tng cng kh nng kt
dnh gia b mt tm wafer v cht photoresist sau a tm wafer ln my
quay tc cao gi cht v quay vi tc vi nghn vng/pht photoresist
vng u trn b mt tm wafer .Thc hin sy kh s b lm bay hi c trong
photoresist
Bc 2: Qu trnh quang khc ch to bnh rng v dm:
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
25 Nhm 3 - KT C in t - K56
a mask cha hnh nh ca bnh rng v dm v tm wafer vo my quang
khc thc hin qu trnh chp chiu.
Ngun pht sng tia t ngoi c khuch i sau chiu qua mask. H s
c chiu sng chuyn hnh nh ln nn, vng chiu sng s b phn hy
bc tip theo, vng khng b chiu sng chnh l lp cu trc ca bnh rng
v
dm.
Sau khi c quang khc dng cht ra NMD3( dng cho photoresist
dng)
ra b phn photoresist b phn hy. Sau thc hin sy kh phophoresist
cng hon
ton ta c hnh nh nh sau:
Bc 3: Qu trnh n mn kh hot ha su (DRIE)
u tin qu trnh n mn silicon bng vic s dng kh SF6. c im ca
kh SF6 l to thnh lung plasma bn vo b mt silicon, n s tc dng
vi
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
26 Nhm 3 - KT C in t - K56
silicon v to thnh sn phm bay ln, ng thi ta nhit. Sn phm ca phn
ng
bay ln s c mt thit b ht ra ngoi.
Cc phn ng l:
Cc phn ng phn ly Cc phn ng Ion ha
6 5e SF SF F e 6 5 2e SF SF F e
5 4e SF SF F e 6 3 2 2e SF SF F F e
4 3e SF SF F e 4 3 2e SF SF F e
Cc phn ng thu c:
6 5e SF SF F
4 3e SF SF F
4 3 2e SF SF F e
Flo t do t qu trnh phn ly s n mn silicon:
1iF iFx xS F S vi x:=1..3.
Qu trnh lng ng polyme. Phun kh 4 8C F vo cc b mt, cht ny to
thnh
mt lp bo v. Sau khi ph xong th tip tc bn ph. Tuy nhin khi bn ph,
kh
6SF s c mt n v y, khi c mt n th lung tia plasma khng c tc
dng,
cn c xung y th c thng c lp nha bo v c to thnh, ch gi li
thnh bn. Cc qu trnh lp i lp li to nn mt thnh bc rt nh. Qu trnh
n
mn ch dng li khi gp b mt SiO2
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
27 Nhm 3 - KT C in t - K56
Bc 5: Loi b cht cm quang:
loi b lp photoresist ta dng dung dch Remover 106 ra lp
photoresist. Sau sy kh chip.
Hnh 34.3:M hnh dm v bnh rng actuator nhit in:
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
28 Nhm 3 - KT C in t - K56
3.Ch to 3 trc ti bnh rng v dm.
Bc 1: Ph cht cm quang :
Trc khi ph photoresist ta tin hnh ph mt lp ha cht OPA tng
cng kh nng kt dnh gia b mt chi tit v cht photoresist. Sau a
chi
tit ln my quay tc cao gi cht v quay vi tc vi nghn vng/pht
photoresist vng u trn b mt chi tit .Thc hin sy kh s b lm bay
hi
c trong photoresist.
Bc 2: Qu trnh quang khc ch to trc trn bnh rng v dm:
a mask cha hnh nh ca trc v chi tit vo my quang khc thc hin
qu trnh chp chiu.
Ngun pht sng tia t ngoi c khuch i sau chiu qua mask. H s
c chiu sng chuyn hnh nh ln nn, vng chiu sng s b phn hy v
ra tri hnh thnh cc l phc v cho qu trnh to trc.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
29 Nhm 3 - KT C in t - K56
Sau khi c quang khc dng cht ra NMD3( dng cho photoresist
dng)
ra b phn photoresist b phn hy. Sau thc hin sy kh
phophoresist
cn li cng hon ton ta c hnh nh nh sau:
Bc 3: Qu trnh phun ph silic:
Tin hnh ph mt lp silic ln b mt ca chi tit va c to thnh bc 2.
Bc 4: Ph cht cm quang m:
Trc khi ph photoresist ta tin hnh ph mt lp ha cht OPA tng
cng kh nng kt dnh gia b mt chi tit v cht photoresist. Sau a
chi
tit ln my quay tc cao gi cht v quay vi tc vi nghn vng/pht
photoresist vng u trn b mt chi tit .Thc hin sy kh s b lm bay
hi
c trong photoresist.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
30 Nhm 3 - KT C in t - K56
Bc 5: Qu trnh quang khc:
a mask cha hnh nh ca trc v chi tit vo my quang khc thc hin
qu trnh chp chiu.
Ngun pht sng tia t ngoi c khuch i sau chiu qua mask. H s c
chiu sng chuyn hnh nh ln nn, vng chiu sng s khng b phn hy v
ra tri hnh thnh mt trc
Sau khi c quang khc dng cht ra xylen ( dng cho photoresist m)
ra
b phn photoresist b phn hy. Sau thc hin sy kh phophoresist cn
li
cng hon ton ta c hnh nh nh sau:
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
31 Nhm 3 - KT C in t - K56
Bc 6: Qu trnh n mn kh hot ha su (DRIE):
u tin qu trnh n mn silicon bng vic s dng kh SF6. c im ca
kh SF6 l to thnh lung plasma bn vo b mt silicon, n s tc dng
vi
silicon v to thnh sn phm bay ln, ng thi ta nhit. Sn phm ca phn
ng
bay ln s c mt thit b ht ra ngoi.
Qu trnh lng ng polyme. Phun kh 4 8C F vo cc b mt, cht ny to
thnh mt lp bo v.Sau khi ph xong th tip tc bn ph. Tuy nhin khi
bn
ph, kh 6SF s c mt n v y, khi c mt n th lung tia plasma khng
c
tc dng, cn c xung y th c thng c lp nha bo v c to thnh, ch
gi li thnh bn. Cc qu trnh lp i lp li to nn mt thnh bc rt nh.
Qu
trnh n mn ch dng li khi gp b mt PSG.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
32 Nhm 3 - KT C in t - K56
loi b lp photoresist m v dng ta dng dung dch Remover 106 ra
lp photoresist. Sau sy kh chi tit.
Hnh 3.4:M hnh 3 trc aturator nhit in.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
33 Nhm 3 - KT C in t - K56
4.Ch to thanh truyn th nht v gi .
Bc 1: Ph lp hy sinh v lp silic cn to hnh:
Ta chn vt liu lm lp hy sinh l PSG. PSG kt ta bo gic trn nn
khng
phng, b n mn bi dung dch 49% HF m khng nh hng ti cu trc
silic.
chn gia PSG v silic ca dung dch n mn ny rt ln ( 105 ).
Lp PSG c to thnh trn b mt silic qua kt ta kh ha ( CVD). Qu
trnh sy bin cc lp SiO2 c sn trong mi trng oxi ha giu photpho (
PH3
hay POCl3 ) thnh PSG.
Sau khi ph lp hy sinh ta tip tc ph lp 1 lp silic ln trn lp hy
sinh PSG ny.
Ph silic :
Bc 2: Ph cht cm quang photoresist dng ln nn silic :
Trc khi ph photoresist ta tin hnh ph mt lp ha cht OPA tng
cng kh nng kt dnh gia b mt silic v cht photoresist sau a khi
ln
my quay tc cao gi cht v quay vi tc vi nghn vng/pht
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
34 Nhm 3 - KT C in t - K56
photoresist vng u trn b mt tm wafer .Thc hin sy kh s b lm
bay
hi c trong photoresist.
Bc 3: Qa trnh quang khc ch to tay chuyn 1 v gi :
a mt n cha hnh nh ca tay chuyn v khi va to vo my quang khc
thc hin qu trnh chp chiu.
Ngun pht sng tia t ngoi c khuch i sau chiu qua mask. H s
c chiu sng chuyn hnh nh ln nn, vng chiu sng s b phn hy
bc tip theo, vng khng b chiu sng chnh l lp cu trc ca tay
chuyn.
Sau khi c quang khc dng cht ra NMD3( dng cho photoresist
dng)
ra b phn photoresist b phn hy. Sau thc hin sy kh .
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
35 Nhm 3 - KT C in t - K56
Bc 4: Qu trnh n mn kh hot ha su (DRIE):
u tin qu trnh n mn silicon bng vic s dng kh SF6. c im ca kh
SF6 l to thnh lung plasma bn vo b mt silicon, n s tc dng vi
silicon v to
thnh cn phm bay ln, ng thi ta nhit. Sn phm ca phn ng bay ln s c
mt
thit b ht ra ngoi.
Qu trnh lng ng polyme. Phun kh 4 8C F vo cc b mt, cht ny to
thnh
mt lp bo v.Sau khi ph xong th tip tc bn ph. Tuy nhin khi bn ph,
kh 6SF s
c mt n v y, khi c mt n th lung tia plasma khng c tc dng, cn c
xung
y th c thng c lp nha bo v c to thnh, ch gi li thnh bn. Cc qu
trnh
lp i lp li to nn mt thnh bc rt nh. Qu trnh n mn ch dng li khi gp
b mt
PSG.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
36 Nhm 3 - KT C in t - K56
Bc 5: Loi b photoresist v n mn bc bay HF:
loi b lp photoresist ta dng dung dch Remover 106 ra lp
photoresist.
sau sy kh.
n mn bc bay bng dung dch 49%HF nhm n mn lp PSG nm di cc
thit k sau khi n mn kh.
t Actuator ln gi, nung nng HF nng 49% ln 30-40 . Khi axit s
bc hi mnh lit ln khi v s n mn lp PSG gia trong cc rnh vi tc
240
nm/pht .
Cc sn phm kh to ra c ht ra ngoi. Sau qu trnh bc bay HF Actuator
s
c sy kh.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
37 Nhm 3 - KT C in t - K56
Hnh 3.4: M hnh aturator nhit in sau khi hon thnh bc 5.
5.Ch to thanh truyn th hai.
Bc 1: Ph lp hy sinh v lp silic cn to hnh:
Ta chn vt liu lm lp hy sinh l PSG. PSG kt ta bo gic trn nn
khng
phng, b n mn bi dung dch 49% HF m khng nh hng ti cu trc
silic.
chn gia PSG v silic ca dung dch n mn ny rt ln ( 105).
Lp PSG c to thnh trn b mt silic qua kt ta kh ha ( CVD). Qu
trnh sy bin cc lp SiO2 c sn trong mi trng oxi ha giu photpho (
PH3
hay POCl3 ) thnh PSG
Sau khi ph lp hy sinh ta tip tc ph lp 1 lp silic ln trn lp hy
sinh PSG ny.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
38 Nhm 3 - KT C in t - K56
Ph silic :
Bc 2: Ph cht cm quang photoresist dng ln nn silic :
Trc khi ph photoresist ta tin hnh ph mt lp ha cht OPA tng
cng kh nng kt dnh gia b mt silic v cht photoresist sau a khi
ln
my quay tc cao gi cht v quay vi tc vi nghn vng/pht
photoresist vng u trn b mt tm wafer .Thc hin sy kh s b lm
bay
hi c trong photoresist.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
39 Nhm 3 - KT C in t - K56
Bc 3: Qa trnh quang khc ch to tay chuyn 2:
a mt n cha hnh nh ca tay chuyn v khi va to vo my quang khc
thc
hin qu trnh chp chiu.
Ngun pht sng tia t ngoi c khuch i sau chiu qua mask. H s
c chiu sng chuyn hnh nh ln nn, vng chiu sng s b phn hy
bc tip theo, vng khng b chiu sng chnh l lp cu trc ca tay
chuyn.
Sau khi c quang khc dng cht ra NMD3( dng cho photoresist
dng)
ra b phn photoresist b phn hy. Sau thc hin sy kh
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
40 Nhm 3 - KT C in t - K56
Bc 4: Qu trnh n mn kh hot ha su (DRIE):
u tin qu trnh n mn silicon bng vic s dng kh SF6. c im ca kh
SF6 l to thnh lung plasma bn vo b mt silicon, n s tc dng vi
silicon v to
thnh cn phm bay ln, ng thi ta nhit. Sn phm ca phn ng bay ln s c
mt
thit b ht ra ngoi
Qu trnh lng ng polyme. Phun kh 4 8C F vo cc b mt, cht ny to
thnh
mt lp bo v.Sau khi ph xong th tip tc bn ph. Tuy nhin khi bn ph,
kh 6SF s
c mt n v y, khi c mt n th lung tia plasma khng c tc dng, cn c
xung
y th c thng c lp nha bo v c to thnh, ch gi li thnh bn. Cc qu
trnh
lp i lp li to nn mt thnh bc rt nh. Qu trnh n mn ch dng li khi gp
b mt
PSG
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
41 Nhm 3 - KT C in t - K56
Bc 5: Loi b photoresist v n mn bc bay HF:
loi b lp photoresist ta dng dung dch Remover 106 ra lp
photoresist.
sau sy kh.
n mn bc bay bng dung dch 49%HF nhm n mn lp PSG nm di cc
thit k sau khi n mn kh.
t Actuator ln gi, nung nng HF nng 49% ln 30-40 . Khi axit s
bc hi mnh lit ln khi v s n mn lp PSG gia trong cc rnh vi tc
240
nm/pht .
Cc sn phm kh to ra c ht ra ngoi. Sau qu trnh bc bay HF Actuator
s
c sy kh.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
42 Nhm 3 - KT C in t - K56
Hnh 4.5:M hnh sau khi hon thnh
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
43 Nhm 3 - KT C in t - K56
Chng IV:Kt Lun
Qua thi gian tm hiu v cc lnh vc vi c in t chng em c nhng hiu bit
nht
nh v ngnh m mnh ang theo hc, thng qua bi tp ln chng em t c
kt
mt s kt qu nht nh:
Mt s k nng lm vic nhm
xut tng thit k c mt c cu micro motor
Tm hiu v cc phng gia cng MEMS
Tuy nhin bn cnh nhng g t c chng em vn cn nhiu thiu st
Kh nng ng dng c cu vo thc t cn hn ch
Vic tnh ton cc kch thc cn hn ch cha tht chnh xc
nh hng pht trin:
Tip tc hon thin c cu
Ti u ha.
Gim hiu in th vo tit kim nng lng.
-
Thit k h thng vi c in t GVHD: PGS.TS Phm Hng Phc
-------------------------------------------------------------------------------------------------------------------------------
44 Nhm 3 - KT C in t - K56
Ti liu tham kho
1. TS.Nguyn Nam Trung , C s cng ngh vi c in t v vi h thng , Nh
xut
bn khoa hc k thut H Ni 2001.
2. PGS-TS. Phm Hng Phc , Bi ging mn hc Nhp mn vi c in t v
Thit k h thng vi c in t , B Mn C S Thit K My V Robot, Vin
C Kh, i hc Bch Khoa H Ni.
3. Nguyn Tun Khoa, Slide Tnh ton cc h dn ng trong MEMS.
4. TS.Trng c Phc, Slide bi ging CAD/CAM/CNC II, i hc Bch Khoa
H
Ni.
5. Nguyn Tin Dng, Bo co Hi ngh c hc KT 9-4-2014_Nguyn Tin
Dng.
6. Vin k s in, in t, Bo co JOURNAL OF
MICROELECTROMECHANICAL SYSTEMS, VOL. 10, NO. 2, JUNE 2001
7. Ti liu hc Solidworks v phn mn khc c t hc trn Youtube.