Thermco Model 2400, 2600 & 2800 Furnaces Characterised Processes: • Silicon Nitride (standard) • Silicon Nitride (low stress) • Ramped Temp Polysilicon • Uniform grain Polysiliccon • TEOS • VLTO • BPSG • High temperature Oxide (HTO) • Dry Oxide • Wet Oxide • POCl3 or BBr3 • Forming gas anneal • H2 anneal (with 100% H2) • High temperature drive in • Alloy or low temp anneal • H2 anneal (with 100% H2) Applications Thermco’s Model 2400, 2600 and 2800 Mini Diffusion Furnaces are designed to accomodate up to four-process chambers and used for processing Semiconductor, PV , LED, Nano and MEMS substrates up to 200 mm in diameter. The difference between the model numbers is simply the maximum wafer size capability with 2400 having 100mm, 2600 having 150mm and 2800 having 200mm. The furnace mainframe is compatible to Thermco 2000 series mini load stations and source cabinets whilst the construction is the same high quality as our full size production systems. The systems offer a reduced footprint and smaller loadsize, ideal for extra capacity or R&D applications. Control System The furnace is controlled by the industry leading Thermco TMX controller, recognised as one of the most flexible and reliable furnace control systems available with an installed base of thousands of units. The TMX PC controller combines the tried and trusted recipe and system control formats of earlier generation TMX products that customers liked but with new updated and very reliable PC based hardware and improved graphic functions. The system comprises one MUX computer for recipe generation and status overview and one control computer per tube. www.thermcosystems.com
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Control SystemThefurnaceiscontrolledbytheindustryleadingThermcoTMXcontroller,recognisedasoneofthemostflexibleandreliablefurnacecontrolsystemsavailablewithaninstalledbaseofthousandsofunits.TheTMXPCcontrollercombinesthetriedandtrustedrecipeandsystemcontrolformatsofearliergenerationTMXproductsthatcustomerslikedbutwithnewupdatedandveryreliablePCbasedhardwareandimprovedgraphicfunctions.ThesystemcomprisesoneMUXcomputerforrecipegenerationandstatusoverviewandonecontrolcomputerpertube.
www.thermcosystems.com
Model 2400, 2600& 2800 Mini Furnaces
Physical DescriptionMaterials and constructionThefurnacemainframeisconstructedofweldedandformedcoldrolledsteel,paintedwithindustrialgradewaterbaseenamelpaint.Partsandcomponentsthataresubjectedtoelevatedtemperaturesareconstructedfromstainlesssteel.Arefractoryblanketmaterialwithareflectivecoatingisusedontheinsidewallsofthestructuretoreducethetemperatureoftheouterskintoambientlevels.
Power System:Maximumreliabilitywithsecondaryoperated,zero-crossoverfiredSCRpowercontrollers.HighlyefficientdirectconvectionorforcedaircoolingofallSCRs.