The Saguaro from MGI, USA The Sonora Series MGI, USA Automated Batch Wafer Handling 1203 West Geneva Drive Tempe, Arizona 1203 West Geneva Drive Tempe, Arizona USA USA Tel: +1 480 967 8011 Tel: +1 480 967 8011 [email protected]
Feb 25, 2016
The Saguaro from MGI, USA
The Sonora Series
MGI, USAAutomated Batch Wafer Handling
1203 West Geneva Drive Tempe, Arizona USA1203 West Geneva Drive Tempe, Arizona USATel: +1 480 967 8011Tel: +1 480 967 8011
SONORA SERIES SOLAR CELL SONORA SERIES SOLAR CELL 3 Stage Back-to-Back Same Slot or Back-to-Back Proximity Transfer
4 Plastic Cassettes (4 X 50) into a 100 Slot Quartz Carrier (0.1875”-4.76mm Pitch).
3 Stage High-Density3 Stage High-Density
Single Slot Low Density or Single Slot High Density
25, 50, 100, 200, 250, 300, 350, OR 400 Solar cell capacity
Conventional and Contiguous 125 mm, 156 mm, 125 & 156 mm
Sonora Vacuum SeriesSonora Vacuum Series
Key System Features
Typical WPH
Two plastic cassettes into a 100-slot process carrier ≧3000 WAFER PER HOUR
Four plastic cassettes into a 200-slot process carrier ≧3600 WAFER PER HOUR
Versatile system accommodates a wide range of wafer thickness and wafer sizes.
Wafers: 125 mm X 125 mm or 156 mm X 156 mm (rectangular or pseudosquare).
Easy to change platforms to accommodate different cassettes.
Options include:Safety Light CurtainMulti colored light tower with audible alarmSerial CommunicationsParallel Communications PortsNetworking capabilitiesUPS – uninterruptible power supply
Warranty = 1 Year
Facility RequirementsFacility RequirementsDimensions:3-Stage - Four Plastic Cassettes, One 200-slot
Process Carrier66.25” (W) X 35” (D) X 98” (H)168.2 cm (W) X 89 cm (D) X 249 cm (H)Weight:275 lbs, 125 kgSystem Power:USA110Vac ±10%, 50/60Hz, 4 amps, single phaseEurope / Asia220-240Vac ±10%, 50/60Hz, 2 amps, single phase
Compressed Air - 85 - 100 PSI, 586 - 689 Kpa
Temperature - 5º C (41º F) to 40º C (140º F)
Humidity - 10% to 90% non-condensing
Classification - Class 10 clean room≧
Automated batch wafer handling systems use the most current effective method for moving Solar Cell wafers from transport or wet process cassettes to process Quartz / Silicon Carbide carriers. This system is designed to provide high throughput yet maintaining high yields. The Sonora SVAC systems are configured to batch transfer 25, 50 or 100 wafers at a time. This system can accommodate 125 mm X 125 mm and 156 mm X 156 mm wafers with little or no tooling change.