The MEMS Handbook - GBV

The

MEMS Handbook Edited by

Mohamed Gad-el-Hak University of Notre Dame

(g) CRC PRESS

Boca Raton London New York Washington, D.C.

Contents

Preface v

Editor-in-Chief vii

Contributors ix

I Background and Fundamentals

1 Introduction Mohamed Gad-el-Hak 1-1

2 Scaling of Micromechanical Devices William Trimmer

and Robert H. Stroud 2-1

3 Mechanical Properties of MEMS Materials William N. Sharpe, Jr. 3-1

4 Flow Physics Mohamed Gad-el-Hak 4-1 5 Integrated Simulation for MEMS: Coupling Flow-

Structure-Thermal-Electrical Domains Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko and Kartikeya Mayaram 5-1

6 Liquid Flows in Microchannels Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago and Joshua I. Molho 6-1

7 Burnett Simulations of Flows in Microdevices Ramesh К Agarwal

and Keon-Young Yun 7-1

8 Molecular-Based Microfluidic Simulation Models AH Beskok 8-1

9 Lubrication in MEMS Kenneth S. Breuer 9-1 xiii

1 0 Physics of Thin Liquid Films Alexander Own 10-1

1 1 Bubble/Drop Transport in Microchannels Hsueh-Chia Chang 11-1

1 2 Fundamentals of Control Theory Bill Goodwine 12-1

1 3 Model-Based Flow Control for Distributed

Architectures Thomas R. Bewley 13-1

1 4 Soft Computing in Control Mihir Sen and Bill Goodwine 14-1

II Design and Fabrication

1 5 Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany 15-1

1 6 MEMS Fabrication Marc J. Madou 16-1

1 7 LIGA and Other Replication Techniques Marc J. Madou 17-1

1 8 X-Ray-Based Fabrication Todd Christenson 18-1

1 9 Electrochemical Fabrication (EFAB™) Adam L. Cohen 19-1

2 0 Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS Roberts. Okojie .' 20-1

2 1 Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide Glenn M. Beheim 21-1

2 2 Microfabricated Chemical Sensors for Aerospace Applications Gary W. Hunter, Chung-Chiun Liu and Darby B. Makel 22-1

2 3 Packaging of Harsh-Environment MEMS Devices Liang-Yu Chen and Jih-Fen Lei 23-1

xiv

Ill Applications of MEMS

2 4 Inertial Sensors Paul L. Bergstrom and Gary G. Li 24-1

2 5 Micromachined Pressure Sensors Jae-Sung Park, Chester Wilson and Yogesh B. Gianchandani 25-1

2 6 Sensors and Actuators for Turbulent Flows Lennart Löfdahl and Mohamed Gad-el-Hak 26-1

2 7 Surface-Micromachined Mechanisms Andrew D. Oliver

and David W. Plummer 27-1

2 8 Microrobotics Thorbjörn Ebefors and Göran Stemme 28-1

2 9 Microscale Vacuum Pumps E. Phillip Muntz and Stephen E. Vargo 29-1

3 0 Microdroplet Generators Fan-Gang Tseng 30-1

3 1 Micro Heat Pipes and Micro Heat Spreaders G.P. "Bud" Peterson 31-1

3 2 MicroChannel Heat Sinks Yitshak Zohar 32-1

3 3 Flow Control Mohamed Gad-el-Hak 33-1

IV The Future

3 4 Reactive Control for Skin-Friction Reduction Haecheon Choi 34-1

3 5 Towards MEMS Autonomous Control of Free-Shear Flows Ahmed Naguib 35-1

3 6 Fabrication Technologies for Nanoelectromechanical Systems Gary H. Bernstein, Holly V. Goodson and Gregory L. Snider 36-1

Index 1-1

XV