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ARTICLE OPEN The ferroelectric eld-effect transistor with negative capacitance I. Lukyanchuk 1,2 , A. Razumnaya 2,3 , A. Sené 1 , Y. Tikhonov 1,3 and V. M. Vinokur 2 Integrating ferroelectric negative capacitance (NC) into the eld-effect transistor (FET) promises to break fundamental limits of power dissipation known as Boltzmann tyranny. However, realizing the stable static negative capacitance in the non-transient non- hysteretic regime remains a daunting task. The problem stems from the lack of understanding of how the fundamental origin of the NC due to the emergence of the domain state can be put in use for implementing the NC FET. Here we put forth an ingenious design for the ferroelectric domain-based eld-effect transistor with the stable reversible static negative capacitance. Using dielectric coating of the ferroelectric capacitor enables the tunability of the negative capacitance improving tremendously the performance of the eld-effect transistors. npj Computational Materials (2022)8:52 ; https://doi.org/10.1038/s41524-022-00738-2 INTRODUCTION Dimensional scalability of eld effect transistors (FETs) has reached the Boltzmann tyranny limit because of transistorsinability to handle the generated heat 1 . To reduce the power dissipation of electronics beyond this fundamental limits, negative capacitance (NC) of capacitors comprising ferroelectric materials has been proposed as a solution 2 . The FET with a negative-capacitance ferroelectric layer has gained an enormous attention of researchers 312 . However, after impressive initial progress that has resulted in a rich lore massaging the aspects of technological benets of the prospective stable static negative capacitance, the advancement in the eld decelerated consider- ably. The lack of a clear self-consistent physical picture of the origin and mechanism of the stable static negative capaci- tance 7,1114 not only retarded the craved technological progress, but has led to numerous invalid fabrications and misleading claims 9 . In this work, we put forth a foundational mechanism of the NC in ferroelectrics demonstrating inevitable emergence of the NC due to formation of polarization domains. We establish a practical design of the stable and reversible NC FET based on the domain layout. The proposed device is tunable and downscales to the 2.55 nm technology node. In what follows we review the state-of-the-art and basic concepts behind exploring ferroelectrics as the NC elements which constitute the base for our new results. We also mark the potential pitfalls in the NC implementing in the so far suggested NC FETs caused by depreciating the immanent role of domains. Figure 1 demonstrates the principles of integrating the ferro- electric layer with the NC into the FET and the crucial role of domain states. The performance of the FET is quantied by the so- called subthreshold swing SS ¼ðlog 10 I d ð Þ=V g Þ 1 that describes the response of the drain current I d to the gate voltage V g . The lower the value of the SS, the lower power the circuit consumes. In a basic bulk metal-insulator-semiconductor eld-effect transistor (MIS FET), shown in Fig. 1a, which generalizes the MOSFET structure, the subthreshold swing is SS ¼ V s log 10 I d ð Þ zfflfflfflffl ffl}|fflfflfflffl ffl{ SS b V g V s z}|{ m ; m ¼ 1 þ C s C g : (1) Here the rst factor, SS b , presents the response of I d to the voltage V s at the conducting channel region, and the second factor, the so-called body factor, m, characterizes the response of the voltage V s to the applied voltage V g . Figure 1a shows the equivalent electronic circuit, with C g and C s standing for the gate dielectric and semiconducting substrate capacitancies, respectively. The fundamental constraint of the energy/power efciency of the MIS FETs arises from the thermal injection of electrons over an energy barrier enabling drain current ow and thus preventing the reduction of factor SS b below the 60 mV dec -1 , because the body factor m >1 at C g , C s > 0. To overcome this limitation, the FETs incorporating the NC into its design has been proposed 2 . Indeed, replacing the gate dielectric with material with negative capacitance C NC would make the body factor m < 1, thus, pushing the SS below the Boltzmann limit. Ferroelectric materials appear as best candidates for realizing negative capacitance in FETs 2 . The emergence of the NC in a ferroelectric capacitor follows from the Landau double-well landscape of the capacitor energy W as a function of the applied charge Q 15 (blue line in Fig. 1b). The downward curvature of W(Q) at small Q implies that the addition of a small charge to the ferroelectric capacitor plate, induces non-zero polarization and reduces its energy. Hence the negative value of the capacitance C 1 NC ¼ d 2 W=dQ 2 . Remarkably, even the domain formation due to fundamental instability of a monodomain state 1621 , maintains the negative capacitance 16,2226 . The energy W(Q) of the multidomain state is lower then that of the monodomain state while the downward curvature at Q = 0 is conserved, see the red line in Fig. 1b illustrating an exemplary W(Q) for the capacitor hosting two domains. A detailed parsing of particularities related to the monodomain state instability and specic manifestations of the multidomain state is presented in Supplementary Note 1. 1 University of Picardie, Laboratory of Condensed Matter Physics, 80039 Amiens, France. 2 Terra Quantum AG, St. Gallerstrasse 16A, CH-9400 Rorschach, Switzerland. 3 Faculty of Physics, Southern Federal University, 5 Zorge str., 344090 Rostov-on-Don, Russia. email: [email protected] www.nature.com/npjcompumats Published in partnership with the Shanghai Institute of Ceramics of the Chinese Academy of Sciences 1234567890():,;
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Page 1: The ferroelectric field-effect transistor with negative ... - Nature

ARTICLE OPEN

The ferroelectric field-effect transistor with negativecapacitanceI. Luk’yanchuk1,2, A. Razumnaya 2,3, A. Sené1, Y. Tikhonov1,3 and V. M. Vinokur2✉

Integrating ferroelectric negative capacitance (NC) into the field-effect transistor (FET) promises to break fundamental limits ofpower dissipation known as Boltzmann tyranny. However, realizing the stable static negative capacitance in the non-transient non-hysteretic regime remains a daunting task. The problem stems from the lack of understanding of how the fundamental origin of theNC due to the emergence of the domain state can be put in use for implementing the NC FET. Here we put forth an ingeniousdesign for the ferroelectric domain-based field-effect transistor with the stable reversible static negative capacitance. Usingdielectric coating of the ferroelectric capacitor enables the tunability of the negative capacitance improving tremendously theperformance of the field-effect transistors.

npj Computational Materials (2022) 8:52 ; https://doi.org/10.1038/s41524-022-00738-2

INTRODUCTIONDimensional scalability of field effect transistors (FETs) hasreached the Boltzmann tyranny limit because of transistors’inability to handle the generated heat1. To reduce the powerdissipation of electronics beyond this fundamental limits,negative capacitance (NC) of capacitors comprising ferroelectricmaterials has been proposed as a solution2. The FET with anegative-capacitance ferroelectric layer has gained an enormousattention of researchers3–12. However, after impressive initialprogress that has resulted in a rich lore massaging the aspects oftechnological benefits of the prospective stable static negativecapacitance, the advancement in the field decelerated consider-ably. The lack of a clear self-consistent physical picture of theorigin and mechanism of the stable static negative capaci-tance7,11–14 not only retarded the craved technological progress,but has led to numerous invalid fabrications and misleadingclaims9.In this work, we put forth a foundational mechanism of the NC

in ferroelectrics demonstrating inevitable emergence of the NCdue to formation of polarization domains. We establish a practicaldesign of the stable and reversible NC FET based on the domainlayout. The proposed device is tunable and downscales to the2.5–5 nm technology node.In what follows we review the state-of-the-art and basic

concepts behind exploring ferroelectrics as the NC elementswhich constitute the base for our new results. We also mark thepotential pitfalls in the NC implementing in the so far suggestedNC FETs caused by depreciating the immanent role of domains.Figure 1 demonstrates the principles of integrating the ferro-electric layer with the NC into the FET and the crucial role ofdomain states. The performance of the FET is quantified by the so-called subthreshold swing S S ¼ ð∂ log10Idð Þ=∂VgÞ�1 that describesthe response of the drain current Id to the gate voltage Vg. Thelower the value of the SS, the lower power the circuit consumes. Ina basic bulk metal-insulator-semiconductor field-effect transistor(MIS FET), shown in Fig. 1a, which generalizes the MOSFET

structure, the subthreshold swing is

S S ¼ ∂Vs∂ log10Idð Þ

zfflfflfflfflfflffl}|fflfflfflfflfflffl{S Sb

∂Vg∂Vs

z}|{m

; m ¼ 1þ CsCg

:(1)

Here the first factor, SSb, presents the response of Id to the voltageVs at the conducting channel region, and the second factor, theso-called body factor, m, characterizes the response of the voltageVs to the applied voltage Vg. Figure 1a shows the equivalentelectronic circuit, with Cg and Cs standing for the gate dielectricand semiconducting substrate capacitancies, respectively.The fundamental constraint of the energy/power efficiency of

the MIS FETs arises from the thermal injection of electrons over anenergy barrier enabling drain current flow and thus preventingthe reduction of factor SSb below the 60 mV dec−1, because thebody factor m > 1 at Cg, Cs > 0. To overcome this limitation, theFETs incorporating the NC into its design has been proposed2.Indeed, replacing the gate dielectric with material with negativecapacitance CNC would make the body factor m < 1, thus, pushingthe SS below the Boltzmann limit.Ferroelectric materials appear as best candidates for realizing

negative capacitance in FETs2. The emergence of the NC in aferroelectric capacitor follows from the Landau double-welllandscape of the capacitor energy W as a function of the appliedcharge Q15 (blue line in Fig. 1b). The downward curvature of W(Q)at small Q implies that the addition of a small charge to theferroelectric capacitor plate, induces non-zero polarization andreduces its energy. Hence the negative value of the capacitanceC�1NC ¼ d2W=dQ2. Remarkably, even the domain formation due to

fundamental instability of a monodomain state16–21, maintains thenegative capacitance16,22–26. The energy W(Q) of the multidomainstate is lower then that of the monodomain state while thedownward curvature at Q= 0 is conserved, see the red line in Fig.1b illustrating an exemplary W(Q) for the capacitor hosting twodomains. A detailed parsing of particularities related to themonodomain state instability and specific manifestations of themultidomain state is presented in Supplementary Note 1.

1University of Picardie, Laboratory of Condensed Matter Physics, 80039 Amiens, France. 2Terra Quantum AG, St. Gallerstrasse 16A, CH-9400 Rorschach, Switzerland. 3Faculty ofPhysics, Southern Federal University, 5 Zorge str., 344090 Rostov-on-Don, Russia. ✉email: [email protected]

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An inevitable multidomain formation posits the need for adetailed exploring possible ways of realization design of the NCFETs. While the multidomain configuration preserves the NC, thedomain formation may trigger some undesired effects detrimentalto realizing the NC FET. In particular, domains cause inhomoge-neous charge21 and electric field27 distribution, endangering theconducting channel in the most commonly discussed metal-ferroelectric-semiconducting MFS FETs (Fig. 1c), as the voltagedispersion they cause becomes comparable with the transistoroperation voltage. This problem can be mended by putting theferroelectric layer into the pretransitional (incipient) regime justabove the transition temperature, where the NC effect stillpersists, but the field-induced polarization distribution is uni-form5,28,29. However, this would limit the desirable decreasing ofthe body factor keeping it above 0.9929. Another way out isintroducing an intermediate dielectric (insulating) buffer layerbetween the ferroelectric and semiconductor10, which corre-sponds to MFIS FET architecture shown in Fig. 1d. This, in its turn,would not help much because smoothing the field nonuniformitywould occur only at distances well exceeding the spatial scale onwhich the NC potential amplification effect is still actual. Adetailed analysis of particularities related to pitfalls of thediscussed above architectures of the specific multidomain stateis presented in Supplementary Note 2.The design with the floating gate electrode placed between

ferroelectric and dielectric layers30,31 appeared to resolve thisproblem and to level the field inhomogeneities right below theelectrode. The resulting MFMIS structure is the conventional FETwith the overimposed MFM capacitor, see Fig. 1e. This architecturehas attracted some critique32, since it was believed that the anti-parallel domains formation inside the MFM capacitor woulddestabilize the NC. However, as we established in Luk’yanchuket al.24, it is precisely the two-domain configuration that providesthe stable and operable NC because of the possibility of

manipulating the domain wall by the applied charges, notaccounted for in Hoffmann et al.32.Here we introduce and devise the working regime of the MFMIS

FET in which the NC effect emerges from the integrated MFMcapacitor hosting two domains. We show that the MFMISarchitecture not only free from the perils mentioned above butallows for an enormous improving MFMIS FET characteristics bycoating the MFM capacitor with the dielectric capacitor in parallelconnection. The proposed coating design that we call c-MFMISFET, shown in Fig. 1f, provides degrees of freedom enabling acomplete tunability of the dielectric parameters of the NC FET.

RESULTS AND DISCUSSIONTwo-domain negative capacitance of the MFM capacitorThe nanodot-scale two-domain MFM is a major element of theMFMIS FET enabling the NC response via the charge-controlledmotion of the DW. Following24, we discuss in detail the negativecapacitance of the MFM capacitor, which is the base of ourproposed device. Shown in Fig. 2a is the general view of MFMISFET. Figure 2b presents the vertical and horizontal cross-sectionsof a nanoscale ferroelectric disc-shape MFM capacitor integratedin the MFMIS FET. At the zero charge Qf at the electrodes of theMFM capacitor, corresponding to the zero voltage at thetransistor, the DW sits in the middle of the capacitor, see lefthand side of Fig. 2b. The intrinsic charges at the respectiveelectrodes redistribute in order to compensate the depolarizationcharges of each domain (keeping the total charge Qf= 0) and tobanish the electric field inside the ferroelectric disc, reducing thusthe electrostatic energy. The finite charge Qf, induced by thevoltage V= Vg applied to the transistor gate, displaces the DWfrom its middle zero-voltage position, see right hand side ofpanels b. Accordingly, the intrinsic charges rearrange (maintaining

Fig. 1 Stability and feasibility of the ferroelectric-based NC FETs. a Bulk MIS FET. Pale blue: p-type semiconducting substrate; dusty blue:source (S) and drain (D) of n-doped regions connected by conducting channel; sky blue: bottom ground electrode. The gate stack: gateelectrode and oxide gate dielectric layer (yellow green). Right: equivalent circuit comprising gate dielectric capacitance, Cg, and capacitance tothe ground, Cs, of the substrate. Solid lines depict electrodes, dashed lines depict interfaces without electrodes; Vg is the applied gate voltage,Vs is the channel potential. b The normalized energy, W/∣W0∣, and polarization states of the ferroelectric (orange) capacitor as a function of thenormalized driving charge Q/Q0. Here Q0 and W0 are the equilibrium charge and energy of the monodomain short-circuited capacitor,respectively. The unstable energy branch (dashed line) depicts the energy of the monodomain state. The energy of a stable two-domain stateis shown by the red curve. Pluses and minuses show the distribution of charges at the plates. c Multidomain structure of the MFS FET withredistributed electric charges at the top gate electrode and fringing electric fields (red loops) at the FS interface. Ferroelectric capacitance CNC< 0 replaces Cg > 0 of the MIS FET. d MFIS FET incorporates the dielectric layer with Cd > 0. e MFMIS FET integrating a floating gate electrodeinto the MFIS FET between ferroelectric and dielectric layers. f The coated c-MFMIS FET: the dielectric shell (yellow) with Cc > 0 coats theferroelectric layer.

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the total charge Qf) to compensate the depolarization fields ofnow unequal domains.The NC response arises since the length, hence the energy of

the displacing DW, is sensitive to the shape of a ferroelectriccapacitor. To ensure the best controlled performance of the NC,we choose a disc-like form of a capacitor. When moving apartfrom the middle, the DW not only compensates the electric fieldarising due to the charge transferred to the electrodes but,minimizing its surface self-energy, shrinks in the width w andbends because of the cylindrical shape of a ferroelectric. As aresult, the DW overshoots towards the edge beyond theelectrostatics-demanded equilibrium position at which the inter-nal electric field would have disappeared. Hence the net electricfield does not vanish but flips over and goes from the negativelycharged electrode to the positively charged one. This counter-intuitive outcome precisely expresses the phenomenon of thenegative capacitance. Note, however, that at some threshold valueof the applied charge, Q�

f , when it becomes approximately equalto the depolarization charge of the uniformly oriented polariza-tion, Q0, the DW reaches the edge of the ferroelectric layer andleaves the sample. The monodomain state with positive capaci-tance restores; this corresponds to the termination of the redbranch in Fig. 1b.The quantitative description of the NC of the disk-shape two-

domain ferroelectric capacitor is given by Luk’yanchuk et al.24

CNC ¼ �γ2Df

ξ0Cf ; (2)

where we explicitly spotlighted the capacitance Cf= ε0εfSf/df > 0,which is the capacitance of the monodomain MFM capacitor inthe stable state at Q= ±Q0= ±SfP0 (minima of the W(Q)dependence in Fig. 1b). The negative factor,− γ2Df/ξ0, reflectsthe features brought in by the DW displacement in the two-domain configuration. Here Df and df are the diameter and heightof the capacitor, respectively, Sf ¼ πD2

f =4 is the area of theferroelectric plate surfaces, and P0 is the polarization of theferroelectric in the equilibrium state. The coherence length ξ0≃

1nm describes the DW thickness, the dimensionless geometricfactor γ2 ≈ 4.24 reflects the internal profile of polarization insidethe DW and the DW bending in the cylindrical gate, and εf and ε0are the dielectric constant of the ferroelectric material and thevacuum permittivity, respectively.Figure 1b displays the energy advantage of the two-domain

state (whose energy is shown by the red curve), with respect tothe usually considered uniform NC state (the blue dashed curve),both states preserving the same charge Q at the electrodes. Tocreate the two-domain state from the uniformly-polarized stateone has to suppress polarization in a fraction of the ferroelectricoccupied by the DW, while to depolarize the monodomain stateby the electric field due to the uniformly distributed charge Q, onewould have had to suppress the ferroelectricity within the wholevolume which is much more energetically costly.As a next step, we integrate the MFM two-domain NC-capacitor

into the MFMIS FET architecture.

The MFMIS FETThis device comprises the gate stack overimposed on asemiconducting substrate in which the source and drain partsare connected by the gate-operated conducting channel, see Fig.2a. The gate stack includes the MFM capacitor and the gateinsulating layer separating it from the substrate. This is the high-κdielectric layer, preventing a charge leakage between the lowercapacitor’s plate and the semiconducting channel.The top MFM capacitor plate is the gate electrode connecting

the transistor to the external voltage source. The bottom capacitorelectrode is an intermediate electrically isolated floating gateelectrode of the transistor that preserves the entire charge, mostcommonly the zero total charge, constant, stabilizing the ferro-electric two-domain state. Furthermore, the floating gate makesthe potential along the ferroelectric interface even, maintaining,therefore, a uniform electric field across the gate stack andsubstrate. Along the way, the floating gate resolves a frequentissue of neutralizing the parasitic charges that may be trapped by

Fig. 2 Functioning of the MFMIS FET. a A three-dimensional sketch of the MFMIS FET comprising a disc-shape ferroelectric capacitor with thenegative capacitance. b Vertical and horizontal cross-sections of the MFMIS FET. At the zero gate voltage V= 0 (left hand side), the equilibriumlocation of the DW is in the middle of the ferroelectric disc. At the finite applied voltage, V= Vg, the DW displaces from the middle and bends(right hand side). c A sketch of the coated MFMIS FET, in which the ferroelectric disc is sheathed by the dielectric shell. The dielectric shellshares the top-gate and floating-gate electrodes with the ferroelectric disc, hence making a complimentary capacitor going in parallel withthe ferroelectric capacitor. d Rectangular modification of the c-MFMIS FET. The extended area of coating and gate dielectric layer capacitorsenhances the performance of the NC FET. e Normalized gate capacitance cg as function of the coating size Lc. Colored areas show threedistinct regimes of the gate functioning. f The sketch of the electric field (red arrows) and polarizations (black arrows) distribution inside thec-MFMIS FET upon applying voltage to the gate electrode.

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interfaces during the fabrication and functioning. Maintaining theworking charge and providing a regular rubbing out the parasiteleaking charges with the removal time faster than the leakagetime31 is achieved via the standard discharging methods. Forinstance, it is implemented by either harnessing the Fowler-Nordheim tunneling and the hot electrons injection33, or bycircuiting the gate by the auxiliary charge-carrying current, IQ,contact, see Fig. 1e, to a certain source for a given combination ofelectric inputs ensuring the proper sequence of discharging andhigh resistance modes34.An effective electronic circuit of the MFMIS FET, shown in

Fig. 1e, is similar to that of the multidomain MFIS FET (Fig. 1d). Thedifference is that now the task of leveling the depolarization fieldinhomogeneities is taken by the floating gate electrode. Therefore,the gate dielectric layer can be safely engineered as an utmostlythin one, down to the technologically-acceptable limit of a fewnanometers. This increases Cd with respect to ∣CNC∣, opening doorsto making the gate capacitance negative, C�1

g ¼ C�1d � jC�1

NC j< 0.Yet it is hard to achieve a required largeness of Cd with respect to∣CNC∣ due to the restrictions imposed by materials compatible withthe silicon CMOS technologies. To meet the challenge, we devise acoated c-MFMIS FET that critically changes the situation andbreaks ground for the unlimited enhancement of the performanceof the NC FET transistor.

The c-MFMIS FETThe coating of the ferroelectric layer with the dielectric oxidesheath confined by the same electrodes, see Fig. 2c, dstraightforwardly incorporates an additional capacitor with thecapacitance Cc > 0 in parallel to CNC. This results in a radicalimprovement of the controlled tuning of the gate capacitance. Inparticular, manipulating with the sizes of the coating oxide layerand with the geometrical design of the device as a whole, providesa broad variation in its performance characteristics and functioningregimes. The panels (c) and (d) exemplify possible designs. Thepanel (c) shows an annulus-like coating capacitor, while panel (d)displays a rectangular design of the coating layer and, in addition,the possibility of increasing the area of the floating gate electrodewith respect to the top gate electrode. The latter design allows forcontrollable increasing capacitances of the coating and gate-dielectric layers most efficiently, maintaining the miniaturization ofthe device. Note, that in all the geometries, the core ferroelectricshould maintain its disc-like shape ensuring the optimal manipula-tion with the DW.Shown in Fig. 1f is the equivalent circuit of c-MFIS FET. The

important advance is that the gate capacitance becomes

Cg ¼ 1

C�1d þ ðCc � jCNC jÞ�1 ; (3)

which permits tuning Cg over the widest range of values by theappropriate modifying the parameters of the coating capacitor.We reveal the rich dependence of Cg on the coating layer size, Lcchoosing the rectangular geometry of the coating layer (Fig. 2c).The capacitance of the disk-shape two-domain ferroelectriccapacitor, CNC, is given by Eq. (2). The capacitances of the coatingand gate dielectric layers are taken in a standard form as Cc=ε0εcSc/dc and Cd= ε0εdSd/dd, respectively. Here Sf ¼ πD2

f =4, Sc ¼L2c � Sf and Sd ¼ L2d are areas of the ferroelectric, coating dielectricand gate dielectric plate surfaces, respectively.The behavior of Cg defined by Eq. (3) is most generic and does

not depend critically on the specific choice of materials. Forpractical applications, we choose both, the coating layer and thegate-dielectric layer, be composed of the Si-compatible dielectricHfO2 with the respective dielectric constants εc, εd beingapproximately equal to 25. The ferroelectric disc of the diameterDf≃ 6 nm and thickness df≃ 3 nm, can be fabricated out of theferroelectric phase of HfO2 or its Zr-based modification,

Hf0.5Zr0.5O2 with εf≃ 5013. In fact, εf is the only relevant materialparameter that defines the NC properties of the two-domainferrolectric layer; therefore, the consideration applies equally wellto other similar ferroelectrics, for instance, to perovskite oxides,like strained PbTiO3 with about the same εf. The height of the gatedielectric layer is taken as dd≃ 3 nm, whereas the thickness of thecoating layer, dc, is equal to df. The size of the rectangular floating-gate electrode, Ld, defining the size of the gate dielectric capacitor,is taken as 1.2Lc.Figure 2e displays the derived normalized gate capacitance, cg

= Cg/Sd as function of Lc. The presented cg(Lc) dependencies arethe Eq. (3) plots, into which the given above capacitancies, CNC,Cc(Lc) and Cd(Lc) are substituted. Looking at the plots, onediscriminates the three distinct regimes of the gate functioningset by two critical sizes, Lc1 < Lc2, of the coating layer: (i) the super-capacitance, Lc < Lc1, (ii) the negative-capacitance, Lc1 < Lc < Lc2,and (iii) the near-zero capacitance, Lc2 < Lc. All these three distinctregimes are of tremendous relevance for applications. Below, werestrict ourselves to the detailed analysis of the NC regime, i.e., theregime where cg < 0, leaving the detailed discussion of regimes (i)and (iii) to forthcoming publication. Note that although in the NCregime the average polarization of the ferroelectric nanodot isaligned with the voltage drop across the capacitor, the electricfield inside the coated layer is directed oppositely to it.Accordingly, the polarization induced inside the dielectric oxidesheath is opposite to the polarization of the ferroelectric nanodot,see Fig. 2f. It is important that the absolute value of the NCcapacitance can be done arbitrary small on approach to theresonance regime ∣CNC∣= Cc of Equation (3), i.e., upon L− Lc2→0−. In this regime the nonlinear effects in the Q− V characteristicsof the MFM capacitor become of prime relevance.An unrestricted range of variation of cg, from minus infinity to

zero, as seen from Fig. 2e, allows for the unlimited tuning of themagnitude of the gate NC. In particular, the possibility of making itarbitrary small, enables us to overcome a previously insurmoun-table obstacle of the proper matching between the gate, Cg, andsubstrate, Cs, capacitancies and obtain the desirable value of thebody factor

m ¼ 1þ Cs

Cg¼ 1þ Cs

Cdþ Cs

Cc � jCNCj ; (4)

within the NC FET operational interval 0 <m < 1, getting thus theremarkably low values of SS(1), the task not achievable bypreviously suggested architectures.Now the task is to find the optimal coating size Lc, given the

normalized substrate capacitance cs= Cs/Sd, that ensures match-ing to targeted value of m. To that end, we employ Eq. (4) whichdefines the implicit Lc dependence of cs at given m. The shown inFig. 3a family of Lc(cs) curves for different m, confined between m= 0 (red) and m= 1 (brown) characteristics, represents the stableworking interval for our exemplary c-MFMIS FET.The region below the brown line where m > 1, i.e., SS > 60 mV

dec−1, corresponds to small sizes of the coating layer, Lc < Lc1. Theregion above the m= 0 curve but below the Lc= Lc2 line is thehysteretic loss of the reversibility region. Therefore, the properchoice of Lc, in the interval Lc1 < Lc < Lc2, enables the desiredmagnitude of m for a given value of the substrate capacitance cs.Although in our model example, the lateral size of the coatinglayer varies between Lc1 ≈ 24 nm and Lc2 ≈ 38 nm, it can besignificantly reduced down to practically the diameter of theferroelectric disc, by increasing the dielectric constant of thecoating material by factor of four.

Practical design. Optimal match between gate and substrateThe established characteristics of the c-MFMIS FET enable us to gobeyond the past prima facie technological concepts and turn tothe practical design in relevant industrial environment. The critical

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challenge9 emerging when engineering the NC FET, is thecomplex and highly nonlinear nature of Cs since the lattercomprises contributions from the capacitance of the depletedlayer, from the quantum capacitance due to charge carriersinjected into the conducting channel, from the interface charges,and, finally, from the source/drain geometrical capacitancies.While being of a relatively low value when coming mainly fromthe capacitance of the depletion layer in the low-conductingregime at small voltages, Cs increases dramatically, typically byorder of magnitude, due to the injection of conducting electronsinto the channel caused by the gate bias near and above thethreshold value.Using our established concept of Lc(cs,m) characteristics, Fig. 3a,

enables the determining an optimal match between the NC gatecapacitance and the semiconducting substrate capacitanceensuring the best-performance SS and stability of the transistor.To exemplify the nonlinear behavior of the substrate, we take thenormalized capacitance csths ’ 10�2 Fm−2 in the low-voltagesubthreshold regime and cths ’ 10�1 Fm−2 in the high-voltagenear-threshold regime. Next, we set the condition m= 0 at thesteepest point of the Id(Vg) curve, i.e., in the near-threshold gatevoltage where cs ¼ cths . This condition visualized by the point A inFig. 3a, provides us with the optimal value of the size of thecoating layer, Loptc � 28 nm. Decreasing the gate voltage Vg tosubthreshold values, reduces cs and moves it to the left from thepoint A along the black line until reaching the point Bcorresponding to cs ¼ csths at Vg ≈ 0. The body factor at the pointB is m= 0.9 which gives SS ≈ 54 mV dec−1.The possible transfer Id(Vg) characteristics9 are schematically

illustrated in Fig. 3b. The optimal characteristic (red line) derivedaccording to the devised above operating procedure starts withthe relatively modest SS ≈ 54 mV dec−1, steepens upon theincrease in Vg, and reaches its steepest value in the near-thresholdregion. The location of points A and B corresponds to thecapacitancies cths and csths of panel a. The optimal regime maintainsthe steep slope of the Id(Vg) dependence over the entire voltageworking range and includes not only the subthreshold, but alsonear- and above threshold regimes, preserving the stable andhysteresis free I–Vg transfer characteristics at the same time.Because of the nonlinearity of cs, the transfer characteristics of

the designed c-MFMIS FET with Lc ¼ Loptc demonstrates the betterperformance at the same on-off current switching ratio, Ion/Ioff,than the shown by the green curve commonly assumed NC FETwith the voltage-independent substrate capacitance cs (althoughhaving the steeper initial SS). At the same time, an attempt to

engineer the NC FET having the nonlinear cs with an initiallysteeper SS (exemplified by the blue curve), results in the hystereticswitching instability.

Practical design. Compact gate modelIn order to provide incorporating the two-domain c-MFMIS FETarchitecture into the industrially-standardized circuiting, wedesign the scalable compact model describing the Qg–Vgcharacteristics of the coated NC gate stack. In the low-voltageand low-charge operational mode of the NC FET, this compactmodel is defined by the linear relation Qg= CgVg, where Cg isgiven by Eqs. (2) and (3). Looking forward to extensiveapplications of our compact model for the description of thec-MFMIS FET, we expand the compact model’s working range overto the nonlinear regime where substantial shifts of the domainwall and even its escape from the sample may occur.The complete set of the Qg–Vg characteristics of the gate is

defined by the individual electric properties of its components,including the gate dielectric capacitor, coating capacitor, and theMFM capacitor which form the equivalent circuit shown in Fig. 1fand which are characterized by the linear, Vd ¼ C�1

d Qd ,Vc ¼ C�1

c Qc , and nonlinear, Vf ¼ Vf Qfð Þ, constitutive relationsrespectively. In general, the Vg–Qg characteristics can beparametrically plotted as functions of the running parameter Qf

Vg ¼ 1þ CcCd

� �Vf ðQf Þ þ Qf

Cd

Qg ¼ CcVf ðQf Þ þ Qf ;(5)

based on the relations Qg=Qd=Qc+Qf, Vg= Vd+ Vf, and Vf= Vdfor the circuit in Fig. 1f.The nonlinear constitutive relation, Vf Qfð Þ, of the MFM

capacitor is the core relation that defines different regimes ofthe gate functioning. Shown in the Fig. 3c, are the results of thephase-field simulations (crosses), see Methods, and the analyticaloutcome of the developed scalable compact model (solid lines).The Qf–Vf characteristic reveals two different operational modes ofthe MFM capacitors. The NC low-charge branch, V2 Qfð Þ (redcurve), corresponds to the two-domain state where the domainwall motion is responsible for the electric properties of capacitor.The high-charge branch, V1 Qfð Þ (blue curve), with the positivedifferential capacitance, Cf= dV/dQ > 0, corresponds to themonodomain state where the domain wall is gone. As a result,the Qf-Vf characteristic of the ferroelectric capacitor is presented

Fig. 3 Practical design of the c-MFMIS FET. a A set of Lc(cs) dependencies for determining the optimal parameters for the gate-substratematch in the c-MFMIS FET. The arrows define the procedure for selecting the optimal coating size Loptc providing the best performance andstability of the transistor. b Transport characteristics Id(Vg) of the representative c-MFMIS FETs. The red curve shows Id(Vg) for the optimallydesigned c-MFMIS FET. The green and blue curves show the Id(Vg) dependencies for transistors with the steeper SS having the voltage-independent (green) and nonlinear in voltage (blue, with hysteresis) substrate capacitancies. c The charge-voltage characteristics, Vf(Qf), of thedisc-shape MFM capacitor. The monodomain and two-domain operational regions are displayed as the turquoise and purple, respectively,inter-shaded regions. The threshold charges ±Q�

f at which the domain wall leaves the ferroelectric nanodot, mark the transition from thenegative capacitance two-domain region (red curve) to the positive capacitance monodomain region (blue curves). The crosses stand for theresults of the numerical simulations.

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by the synthetic dependence

Vf Qfð Þ ¼ V2ðQf Þ if Qfj j<Q�f

V1ðQf Þ if Qfj j>Q�f

�(6)

where Q�f is the charge at which the branches V2 Qfð Þ and

V1 Qfð Þ meet.The corresponding to the monodomain state branch of the Vf-

Qf characteristic, is given by the parametric dependence of V1(Qf)upon the polarization P,

V1ðPÞ ¼ �df 2a�3P þ 4a�33P3 þ 6a333P5

� �QðPÞ ¼ �Sf P � ε0εi

V1ðPÞdf

� �;

(7)

derived from the uniform Ginzburg-Landau equation. Thecoefficients a�3, a�33 and a333, and the background dielectricconstant εi are defended in Methods.For the V2(Qf) function describing the two-domain case we use

the analytical approximation24

V2ðQf Þ � � 0:27ψ Qf=Q0ð Þ

Qf

Cf

ξ0D; (8)

where ψ(s) (0 < s < 1), introduced in Luk’yanchuk et al.24, is thefunction accounting for the geometry of the system which we fitby

ψðsÞ � 1:0� 0:027s� 0:95s2 � 0:34s3 þ 0:32s4� �1=2

: (9)

In the linear in Qf approximation, where s→ 0, Eq. (8) gives CNC inEq. (2).Combining branches given by Eqs. (7) and (8) provides an

excellent approximation for the results of the numerical simula-tions of the compact model, see Fig. 3c. The slight overshoots at±Q�

f correspond to numerical singularities appearing at themoments where the DW leaves the MFM capacitor.To summarize, the achieved understanding that the funda-

mental mechanisms of the NC is the domain action, bestowsclosing the gap between the concept of the ferroelectric negativecapacitance and its realization in electronic devices. It enablesdesigning a stable NC-based FET, whose coating-shell architectureof the gate promises a notable enhancement of prospectiveperformance and high tunability of characteristics allowing theperfect match with advanced FET architectures. Our findings layout the way for scaling the NC FET nanoelectronics down to 2.5–5nm technology nodes via utilizing the CMOS-compatible ultra-thinand ultra-small ferroelectric disc as a core of the NC gate.

METHODSFunctionalTo carry out the numerical modeling of polarization structures in aferroelectric layer, we use the most thoroughly studied free energyfunctional for the PbTiO3,

F ¼ Ra�i ðum; TÞP2i þ a�ij P

2i P

2j þ aijkP2i P

2j P

2k

h ii�j�k

þ 12Gijklð∂iPjÞð∂kPlÞ þ ð∂iφÞPi � 1

2 ε0εið∇φÞ2�d3r;

(10)

where the sum is taken over the cyclically permutated indices {i, j, k, l}= {1,2, 3} (or {x, y, z}). Functional Eq. (10) includes the Ginzburg-Landau (GL)energy of the strained ferroelectric layer35 written in a form given in36 (thesquare-bracketed term), the polarization gradient energy37 (the term withcoefficients Gijkl), and the electrostatic energy, including the coupling ofpolarization with electric field19, Ei=− ∂iφ, described through theelectrostatic potential φ (the two last terms). The strain-renormalized GLcoefficients for the PbTiO3 layer (accounting partially for the elastic energy)are taken as35, a�1,a

�2 = 3.8 × 105(T− 479∘C)− 11 × 109um C−2m2N−1, a�3 =

3.8 × 105(T− 479∘C)+ 9.5 × 109um C−2m2N−1, a�11, a�22 = 0.42 × 109

C−4m6N, a�33 = 0.05 × 109 C−4m6N, a�13,a�23 = 0.45 × 109 C−4m6N, a�12 =

0.73 × 109 C−4m6N, a111, a222, a333 = 0.26 × 109 C−6m10N, and a123 =−3.7 × 109 C−6m10N. The misfit strain is taken as um=−0.013. The

gradient coefficients are taken as for PbTiO3 bulk material37 (with allpossible cubic index permutations), G1111 = 2.77 × 10−10 C−2m4N, G1122 =0.0, and G1212 = 1.38 × 10−10 C−2m4N. The background dielectric constantof the non-polar ions was taken as εi≃ 1038 for PbTiO3 and εi≃ 25 forsemiconducting layer. The vacuum permittivity is ε0= 8.85 × 10−12

CV−1m−1.

Phase-field simulationsThe minimum of the energy functional Eq. (10) is found by solvingrelaxation equation

�γ∂P∂t

¼ δFδP

; (11)

where δF/δP is the variational derivative of Eq. (10); the time-scaleparameter γ, which does not influence the sought energy minimum istaken equal to unity. The electrostatic Poisson equation ε0εi∇2φ=∇ ⋅ P,describing the spatial distribution of the polarization, is solved on the eachrespective relaxation step.For practical implementation of simulations, we have used the open-

source FEniCS computing platform39. To create the tetrahedral finite-element meshes we used an open-source 3D mesh generator gmsh40. Forthe case of the MFM capacitor, the computational region is a cylindricalvolume Ω, restricted by the side boundary, ∂Ωs, and by the top, ∂Ωt, andbottom, ∂Ωb, boundaries, see Fig. 4a. For the case of the MFSMheterostructure, the computational region is a rectangular box Ω, thatincludes the ferroelectric layer, ΩF, and the semiconducting layer, ΩS, seeFig. 4b. The computational region, Ω, is restricted by the left, right, frontand back-side boundaries ∂Ωs and by the top, ∂Ωt, and bottom, ∂Ωb,boundaries.The solutions for the polarization, P(r), and electrical potential, φ(r),

distribution were sought in the functional space of the piece-wise linearpolynomials. For simulation of the MFM-capacitor, controlled by charge Q,we use free boundary conditions for P(r) on the whole surface of thecylinder. At the same time, it was assumed that the electrodes producealmost uniform z-directed electric field, Ez=− ∂zφ, spreading throughthe capacitor. The boundary constraint �Q=Sf ¼ Pz þ ε0εiEz was used atthe electrode interfaces to fix the applied charge Q that tunes thedisplacement of the DW in the spontaneously emerging two-domainstructure. The bar denotes averaging over the interface surface.For simulation of the MFSM heterostructure, the relaxation Eq. (11) was

solved for the ferroelectric part of the sample while the electrostaticPoisson equation was solved for the whole domain. Boundary conditionsfor all the variables were taken to be periodic in the x direction. The size ofthe simulation rectangular box in x-direction, corresponding to the periodof the spontaneously emerging domain structure was considered as anenergy-minimizing parameter which was optimized for each series ofcalculations. Boundary conditions for P on ∂Ωt and ∂Ωb as well as on thefront- and back surface boundaries of the rectangular box were taken asfree boundary conditions. The Dirichlet boundary conditions were imposedon φ at the bottom and top surfaces of the box such that φ(∂Ωb)=−U/2and φ(∂Ωt)=+U/2, to reproduce the application of the voltage U to theelectrodes. The effective charge at the electrode was calculated asQ ¼ �Sf ðP þ ε0εiEzÞ.To approximate the time derivative in Eq. (11), we used the variable-time

BDF2 stepper41. The initial conditions for polarization distribution weretaken to be random in the range of−10−6–10−6 C m−2 for the polarization

Fig. 4 Finite-element meshes. a Cylindrical mesh used for two-domain simulations in the MFM setup. b Front-side view ofrectangular mesh used for multi-domain simulations in the MFSMsetup. The red and blue colors correspond to the up- and down-polarization directions, respectively.

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magnitude at the first time-step of simulation. The system of the nonlinearequations arising from the discretization of Eq. (11) was solved using theNewton-based nonlinear solver with line search and generalized minimalresidual method with the restart42,43. On each time step of the simulationin MFSM heterostructure, the linear system of equations obtained from thediscretization of electrostatic Poisson equation was solved separately usinga generalized minimal residual method with restart.

DATA AVAILABILITYThe data generated and analyzed during this study are available from thecorresponding author upon reasonable request.

Received: 25 August 2021; Accepted: 24 February 2022;

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ACKNOWLEDGEMENTSThis work was supported by H2020 RISE-MELON action (I.L.), and by Terra QuantumAG (I.L., A.R., and V.M.V.). The work of V.M.V. was supported in part by FulbrightFoundation.

AUTHOR CONTRIBUTIONSI.L., Y.T., A.R., A.S. and V.M.V. conceived the work and performed calculations. I.L. andV.M.V. wrote the manuscript.

COMPETING INTERESTSThe authors declare no competing interests.

ADDITIONAL INFORMATIONSupplementary information The online version contains supplementary materialavailable at https://doi.org/10.1038/s41524-022-00738-2.

Correspondence and requests for materials should be addressed to V. M. Vinokur.

Reprints and permission information is available at http://www.nature.com/reprints

Publisher’s note Springer Nature remains neutral with regard to jurisdictional claimsin published maps and institutional affiliations.

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