The 41st International Conference on Micro-and Nano-Engineering …mne2015.org/wp-content/uploads/2015/09/binnenwerk... · 2015. 9. 12. · 1 The 41st International Conference on

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The 41st International Conference on Micro-and Nano-Engineering

MNE2015

World Forum The Hague, The Netherlands

September 21-24, 2015

Organising Partners

DISCLAIMER: Although care has been taken to ensure the accuracy, completeness and reliability of the information provided in this programme booklet, The MNE2015 organisation assumes no responsibility therefore.

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Content Content 2

Conference organisation and committees 4

Welcome 8

Information 9 Conference location. 9 Registration hours 9 Conference schedule 9 Sponsors – Exhibitors 9 Internet/Wifi 9 Speaker-Ready Room (Volga1) 9 Posters, best poster competition 10 Special sessions 10 Awards 10 Coffee/Lunch 10 Dinner and social events 10 Micro-& Nano-graph contest 11 Publications 11 MNE2015 on the web – book of abstracts 11 MNE Conference App 11 Oral Programme: clusters and sessions 11 Key to sessions/paper numbers 12

Oral Programme Overview 13

Tuesday Morning 22 September 2015 31 Plenary Session 1 31 A3 - Electron and Ion Beam Lithography 31 B4 - 3D Micro Manufacturing and Micro Printing 33 C1.1 - MEMS/NEMS Sensing 1 35 D5 - System Design and Fabrication 38

Tuesday Afternoon 22 September 2015 39 A5 - Materials for lithography, resists and resist processing 39 B3 -Electron/Ion Beam deposition, related technologies, applications 40 C1.2 - MEMS/NEMS Fabrication and Reliability 42 D6 - Applications 44

Tuesday Poster Session and Exhibition 46

Special Sessions 82 Single Nanometer Manufacturing (SNM) 82 Chemistry for ELectron Induced NAnofabrication (CELINA) 83

Wednesday Morning 23 September 2015 86 Plenary Session 2 86 A6 - Directed Self Assembly 86 A7 - Stencil and Tip Based Patterning 88

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B7 - Metrology 89 B8 - Self Aligned Processes 91 C5.1 - Micro and Nano devices for Physical Science - Computing 92 C5.2 - Micro and Nano devices for Physical Science - Nano Tubes and Nano Wires 93 D3 - Organ on a Chip 95 D2 - Lab on Chip 96

Wednesday Afternoon 23 September 2015 99 A1 - Photo Lithography 99 C3 - Meta Materials and their Fabrication 100 C5.3 - Micro and Nano devices for Physical Science - Instrumentation and Imaging 101 D4 - Micro and Nanofluidics for Biology and Life Sciences 102 Plenary Session 3 103

Wednesday Poster Session and Exhibition 104

Thursday Morning 24 September 2015 141 Award Ceremony 141 A4.1 - Soft Lithography 1 141 A9 - Novel Techniques 142 MEE Young Investigator Award Lecture - Late and Hot News Session 144 B1 - Pattern Transfer 144 C1.3 -MEMS/NEMS for Energy Harvesting 146 C1.4 -MEMS/NEMS graphene devices 147 D1.1 - Mechanical Sensing Elements 149 D1.2 - Sensing Systems 150

Thursday Afternoon 24 September 2015 153 A4.2 - Soft Lithography 2 153 B2 - Plasma Etching 154 C2 - Micro and Nano Fluidic Systems 155 D1.3 - Optical Sensing Elements 156 Plenary Session 5 157

List of Authors 159

Micro-Nano-graph contest ballot 189

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Conference organisation and committees Conference Chair Kees Hagen, Delft University of Technology Programme Chair Urs Staufer, Delft University of Technology MNE2015 Organizing Committee Frank Dirne, Delft University of Technology Paul Alkemade, Delft University of Technology Remco Wiegerink, University of Twente Luigi Sasso, Delft University of Technology Ageeth Bol, Eindhoven University of Technology Harm Knoops, Oxford Instruments plasma Technology Marko Blom, Micronit Microfluidics B.V. Patrick de Jager, ASML Hans Mulders,FEI Company Lucienne Dado, Ab-Initio, PCO Inge van Marion, Ab-Initio, PCO MNE International Steering Committee Anja Boisen, Technical University of Denmark – Denmark Hubert Brückl, Danube University Krems – Austria Michel Despont, CSEM – Switzerland Zahid Durrani, Imperial College London – United Kingdom Massimo Gentili (Chair), Centre for Materials and Microsystems – Italy Evangelos Gogolides, NCSR Demokritos Athens – Greece Gabi Grützner, micro resist technology GmbH – Germany Jean-Francois de Marneffe, IMEC Leuven – Belgium J. Alexander Liddle, NIST Gaithersburg – USA Shinji Matsui, University of Hyogo – Japan Francesc Pérez-Murano, CNM-CSIC Barcelona – Spain Urs Staufer, Delft University of Technology – Netherlands Christophe Vieu, LAAS-CNRS Toulouse – France MNE International Programme Committee Gabriel Abadal Universitat Autònoma de Barcelona Maan Alkaisi University of Canterbury, NZ Paul Alkemade Delft University of Technology Sternberg Andris University of Latvia Panagiotis Argitis NCSR Demokritos Gonçal Badenes ICFO Joan Bausells CSIC Uwe Behringer UBC Microelectronics Gérard Benassayag CEMES/CNRS

Ruediger Berger Max Planck Institute for Polymer Research

Iris Bergmair Sony DADC Austria AG Marko Blom Micronit Microfluidics BV

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Ageeth Bol TU-Eindhoven Martin Brandl Danube University Krems Hubert Brückl EPFL Juergen Brugger Danube University Krems Claus J. Burkhardt NMI Stefano Cabrini Lawrence Berkeley National Laboratory Victor J. Cadarso Paul Scherrer Institut Christophe Cardinaud CNRS Aline Cerf LAAS-CNRS Wen-Huei Chang National Pingtung University Hsuen-Li Chen National Taiwan University Lei Chen NIST Rebecca Cheung University of Edinburgh Jin-Woo Choi Louisiana State University Vieu Christophe University of Toulouse Vassilios Constantoudis National Center for Scientific Research

Demokritos Bo Cui University of Waterloo Neil Curson UCL Stefan De Gendt IMEC / KU-Leuven JF de Marneffe IMEC Massimo De Vittorio University of Salento Emiliano Descrovi Politecnico di Torino Panagiotis Dimitrakis NCSR Demokritos Zoran Djuric Institute of Technical Sciences of SASA Klaus Stefan Drese Fraunhofer ICT-IMM Andreas Erdmann Fraunhofer IISB Theodore H. Fedynyshyn MIT Lincoln Laboratory César Fernández-Sánchez CSIC Monika Fleischer University of Tuebingen Kristel Fobelets Imperial College London Hiroshi Fukuda Hitachi High-Technologies Corporation Sebastian Gautsch EPFL Massimo Gentili FBK Annamaria Gerardino CNR Gerald Gerlach TU Dresden Jacques Gierak LPN-CNRS Ioanna Giouroudi Vienna University of Technology Jens Gobrecht Paul Scherrer Institute Evangelos Gogolides NCSR Demokritos Markus Graf Sensirion Brian J. Grenon Grenon Consulting, Inc. Vitaliy Guzenko Paul Scherrer Institute Cornelis W. Hagen Delft University of Technology Peter Hahmann Vistec Electron Beam GmbH Lloyd Harriott University of Virginia Harry Heinzelmann CSEM Laura Heyderman ETH Zurich - Paul Scherrer Institute Bart Hoogenboom University College London Toshiro Itani EUVL Infrastructure Development

Center, Inc.

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Shi Jian Ecole Normale Supérieure de Paris Mervyn Jones Imperial College London Grigoris Kaltsas Technological Educational Institute of

Athens Songphol Kanjanachuchai Chulalongkorn University Dieter Kern Tübingen University Gyu Man Kim Kyungpook National University Beomjoon Kim The University of Tokyo Robert Kirchner Paul Scherrer Institut Eugenie Kirk Paul Scherrer Institut Harm Knoops Oxford Instruments Plasma Technology Fu-Hsiang Ko National Chiao Tung Uni Manfred Kohl KIT Richard Koops VSL Dutch Metrology Institute Anders Kristensen Technical University of Denmark Pieter Kruit TUDelft Josiane P. Lafleur University of Copenhagen Laura Lechuga ICN2 JaeJong Lee Korea Institute of Machinery and

Materials J. Alexander Liddle NIST Chun-Hung Lin National Cheng Kung University Ran Liu Fudan Universty Andreu Llobera Institut de Microelectronica de

Barcelona Hans Loeschner IMS Nanofabrication AG Leandro Lorenzelli Fondazione Bruno Kessler Regina Luttge Eindhoven University of Technology Eleni Makarona NCSR Demokritos Laurent Malaquin LAAS CNRS Adrian Martinez-Rivas Instituto Politécnico Nacional Cristina Martin-Olmos CSEM Shinji Matsui University of Hyogo Faisal Mohd-Yasin Griffith University Isabella Moser Jobst technologies Miha Mraz University of Ljubljana Xavier Munoz-Berbel IMB-CNM, CSIC Pascal Normand NCSR "Demokritos" Shunri Oda Tokyo Institute of Technology Je Hoon Oh Hanyang University Heidi Ottevaere Vrije Universiteit Brussel James Owen Zyvex Labs Tung-Ming Pan Chang Gung University Stella Pang City University of Hong Kong Francesc Perez-Murano IMB-CNM, CSIC Francesco Pieri Università di Pisa Pasqualantonio Pingue Scuola Normale Superiore Phil Prewett University of Birmingham Christelle Prinz Lund University Muhammad Aftab Rafiq Pakistan Institute of Engineering and

Applied Sciences

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Ioannis Raptis NCSR "Demokritos' Alex Robinson University of Birmingham Francois Rossi European Commission Xavier Rottenberg IMEC Luigi Sasso Delft University of Technology Steven Schofield University College London Joerg Schotter Austrian Institute of Technology GmbH Urs Staufer TU Delft Blunier Stefan ETH Zurich Ralf Steingrueber Fraunhofer Heinrich-Hertz-Institute Rafael Taboryski Technical University of Denmark Maria Tenje Uppsala University Christos Tsamis NCSR Demokritos Angeliki Tserepi NCSR Demokritos Dimitris Tsoukalas National Technial University of Athens Falco van Delft Molecular Sense Ltd. Jeroen A van Kan National University Singapore Guillermo Villanueva EPFL Katia Vutova Institute of electronics, Bulgarian

Academy of Sciences Michael Ward Birmingham City University Remco Wiegerink University of Twente Sandra Wolff TU Kaiserslautern Ioanna Zergioti National Technical University of Athens

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Welcome Welcome to MNE 2015, the 41st International Conference on Micro and Nano Engineering - welcome to The Hague, the International City of Peace and Justice! We are very happy that you join us for three days of scientific discussions, exchange of latest technology developments, and cultivating personal and professional friendship.

MNE was started in Cambridge (UK) in 1975 and since then was annually held at different locations in Europe. It is the conference that brings together engineers and scientists from all over the world to discuss recent progress and future trends in the fabrication and application of micro- and nanostructures and devices. Applications in electronics, photonics, electromechanics, environment, life sciences and biology are also discussed.

MNE 2015 continues this tradition and will present an attractive technical programme that features 6 plenary, 14 invited, and 419 contributed papers of which about 2/3 will be presented as posters. The poster session is split in two, such that also presenters have the time to visit other posters. All posters will be on display during the entire conference. The oral presentations are given in four parallel sessions, spread over three consecutive days. For the first time, we will offer a ‘late and hot news’ session, which will feature both posters and 3 oral presentations. At the moment of print, it was not clear how you, dear participants of MNE, react to this opportunity and we are very curious about your response.

MNE is a conference covering the transition of basic scientific and engineering knowledge into instrumentation and device applications and commercialisation. The industrial exhibition forms therefore an integral part of the conference, and we are very pleased that we can announce an interesting show exhibiting all the important companies in the field. These companies support the conference through their participation and sponsorship for which we are very grateful. We also thank our non-technical sponsors for their contribution to MNE. Without their help, the conference could not take place!

Since a few years, the International Steering Committee awards a prize, the MNE Fellow Award, to recognise the work of a person and his contributions to the field of MNE. We are very happy that this year’s award, sponsored by ASML, will be presented to Dr. Emile van der Drift (Delft University of Technology). Please join his award lecture on Thursday morning. Since 2014, Elsevier is sponsoring the MEE Young Investigator Award, a prize to recognise researchers in their early career for their contributions to the field of the journal Microelectronic Engineering (MEE). This year’s prize will be awarded to Stephan S. Keller. He will also present his award lecture as an invited talk on Thursday morning.

Finally, we thank the local organizing committee members, the international programme committee and the international steering committee for their support in organizing this event, and we hope that you all will have a successful memorable meeting!

Kees Hagen (Conference Chair) and Urs Staufer (Program Chair).

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Information Conference location.

The MNE2015 conference will be held in the World Forum: World Forum Churchillplein 10 2517 JW The Hague The Netherlands www.worldforum.nl

Registration hours The registration desk at the Ground Floor of the World Forum, in the Pangea area, will be open during the hours listed below. Please check in upon arrival. Badges (white) are required to attend the technical sessions. Badges with a coloured dot give access to the Welcome Reception and Conference banquet only.

Monday, September 21 1200 – 1900 hrs. Tuesday, September 22 0730 – 1800 hrs. Wednesday, September 23 0830 – 1800 hrs. Thursday, September 24 0830 – 1530 hrs.

Conference schedule The conference opens on Monday at 5 pm with the industrial exhibition and the welcome reception in the exhibition area. Here is your opportunity to meet with vendors of equipment and materials relevant to the conference, and to meet your colleagues from all over the world. The plenary session begins on Tuesday morning at 8.30 am.

Sponsors – Exhibitors The MNE2015 organisation gratefully thanks their conference sponsors and the companies participating in the industrial exhibition. Conference attendees are invited to visit the exhibition that will be open at the hours listed below.

Monday, September 21 1700 – 1900 hrs. Tuesday, September 22 0830 – 1800 hrs. Wednesday, September 23 0830 – 1800 hrs. Thursday, September 24 0830 – 1530 hrs.

Internet/Wifi Wifi is available in the conference area on level 1 (including the lecture rooms) and on the ground floor.

Network: MNE-2015 Password: MNE-2015

Speaker-Ready Room (Volga1) PLEASE NOTE THAT PRESENTERS MUST BRING A USB MEMORY STICK CONTAINING THEIR PRESENTATION and up-load their files to local PCs in the Speaker-Ready Room Volga1 (see map on back cover). For morning sessions, speakers must up-load their presentation files at the latest at 0800 in the morning on the day of the presentation; for afternoon sessions, speakers must up-load their presentation at the latest before 1300, during the break between the sessions. Technical staff will be available for assistance.

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Posters, best poster competition Posters should be mounted on Monday after registration or Tuesday morning. They will stay on display during the entire conference. There are two poster sessions: even number (2, 4, 6 ...) posters will be presented on Tuesday afternoon (1530 - 1800), odd number (1, 3, 5 ...) posters on Wednesday afternoon (1530 - 1800). Each poster board will have a poster identification number. Please leave them on display and do not block them in order to provide a means for orientation of visitors to the poster session. Posters should be removed by Thursday 1330. Prizes (sponsored by Raith GmbH) will be awarded to the best poster in each of the four clusters A, B, C, and D (see programme at inside front cover). The posters will be judged on visual impact, design and scientific content. The judges will be drawn from the international steering committee and the local programme committee. The four winners will be presented with their prizes and a commemorative certificate during the conference dinner.

Special sessions Late Tuesday afternoon two special sessions will be held in parallel to the poster session: Single Nanometer Manufacturing-SNM (an EU-FP7 project) and Chemistry for Electron-Induced Nanofabrication-CELINA (An EU COST Action). Both sessions are open to all MNE attendees.

Awards On Thursday morning, at 0830 in the World Forum Theatre, the 2015 MNE Fellowship (sponsored by ASML) will be awarded to Emile van der Drift (Delft University of Technology) and the 2015 Young Investigator Award (sponsored by Elsevier) will be awarded to Stephan S. Keller (Technical University of Denmark). Immediately after the award ceremony Emile van der Drift will give a plenary lecture "Quantitative technology, a joy forever”, and Stephan Keller will present an invited lecture at 0930 hr in the next parallel session in the World Forum Theatre.

Coffee/Lunch Coffee breaks will be between 1030 and 1100 and between 1500 and 1530 around the exhibition area. Lunch will be served during the break from 1230 and 1330, also around the exhibition area.

Dinner and social events There will be an informal welcome reception (sponsored by EV Group) on Monday evening from 1700-1900 on the first floor of the World Forum for all participants and accompanying persons. Drinks will be served, together with a selection of typical Dutch food, the perfect setting to catch up with old friends and make new ones. The conference dinner (sponsored by SPTS) on Wednesday night will be held at Madurodam (George Maduroplein 1, 2584 RZ The Hague, Phone: +31(0)704162400, Web: http://www.madurodam.nl/). The doors open at 1800, dinner will start at 2000, and the event ends at 2400. There will be no transportation organised to and from Madurodam, as it can be reached by public transportation or by foot

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from the Word Forum. There will be no entry into Madurodam without a valid badge, so please do not forget to bring it with you! Additional banquet tickets can be bought at the registration desk as long as there is seating available.

Micro-& Nano-graph contest During the conference dinner on Wednesday night John Randall from Zyvex will announce the winner of the most strange or most beautiful micro- or nano-art work (Sponsored by Zyvex).

Publications As in previous years, all presenters are kindly asked to publish their contribution in one of the four special issues to appear after peer-reviewing in the Journal of Microelectronic Engineering: ‘Micro/Nano devices and systems’, ‘Micro- and Nano-Patterning’, ‘Micro- and Nano-Technologies for Biology and Life Sciences’, and ‘Micro/Nano Fabrication 2015’. Manuscript submission deadline is 23 October 2015.

MNE2015 on the web – book of abstracts Up-to-date information on all aspects of MNE2015 can be found at www.mne2015.org A searchable pdf file containing all the abstracts can be downloaded from the website.

MNE Conference App For the first time an MNE Conference App is available and can be downloaded from the MNE2015 website, containing the scientific programme and information on the industrial exhibition. It allows you to make your own personal programme, make notes and add tags. The App can be used off-line, but being on-line offers the advantage of receiving updates, programme changes and late news.

Oral Programme: clusters and sessions The programme has been divided into four clusters, and subdivided into sessions, as follows: Cluster A: Micro- and Nanopatterning Session Session name A1 Photo Lithography A3 Electron and Ion Beam Lithography A4.1 Soft Lithography 1 A4.2 Soft Lithography 2 A5 Materials for lithography, resists and resist processing A6 Directed Self Assembly A7 Stencil and Tip Based Patterning A9 Novel Techniques Cluster B: Micro- and Nanofabrication Session Session name B1 Pattern Transfer B2 Plasma Etching

B3 Electron/Ion Beam deposition, related technologies, applications

B4 3D Micro Manufacturing and Micro Printing B7 Metrology B8 Self Aligned Processes

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Cluster C: Micro/Nano devices and systems Session Session name C1.1 MEMS/NEMS Sensing 1 C1.2 MEMS/NEMS Fabrication and Reliability C1.3 MEMS/NEMS for Energy Harvesting C1.4 MEMS/NEMS graphene devices C2 Micro and Nano Fluidic Systems C3 Meta Materials and their Fabrication C5.1 Micro and Nano devices for Physical Science – Computing C5.2

Micro and Nano devices for Physical Science - Nano Tubes and Nano Wires

C5.3 Micro and Nano devices for Physical Science Cluster D: Micro- and Nanotechnology/engineering for Life sciences and Biology Session Session name D1.1 Mechanical Sensing Elements D1.2 Sensing Systems D1.3 Optical Sensing Elements D2 Lab on Chip D3 Organ on a Chip D4 µ/n fluidics for bio/life science D5 System Design and Fabrication D6 Applications

Key to sessions/paper numbers The programme has been divided into four clusters (A,B,C and D), and subdivided into sessions (1,2,3,…). For example: A5 means session 5 in cluster A. An oral contribution will be indicated in the programme as Day-Session-c# (eg. Tue-A3-c4 is the 4th contribution in session A3 on Tuesday). The first keynote lecture on Tuesday will be indicated in the programme as Tue-Keynote-1, etc. An invited lecture will be indicated in the programme as Day-session-inv, for instance Thu-A4-inv. The posters are grouped according to the clusters A, B, C, and D. In the programme a poster will be indicated as Day-session-p#, for instance Wed-B-p34 means poster number 34 in cluster B on Wednesday.

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Oral Programme Overview

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n of

met

allic

nan

ostr

uctu

res

by c

hara

cter

pro

ject

ion

base

d el

ectr

on

beam

lith

ogra

phy

and

hard

mas

k lif

t-of

f tec

hniq

ue

Tors

ten

Har

zend

orf e

t al.

Tue-

B4-c

6 An

eff

ectiv

e ap

proa

ch fo

r red

ucin

g su

rfac

e ro

ughn

ess

of P

MM

A in

gr

aysc

ale

EBL

by th

erm

al ra

diat

ion

indu

ced

loca

l ref

low

Ch

en X

u et

al.

Tue-

C1-c

6 M

EMS

mec

hani

sm fo

r res

onan

ce

freq

uenc

y tu

ning

N

ao T

aked

a et

al.

Tue-

D5-

c4

Fast

and

Lar

ge A

rea

Fabr

icat

ion

of

Hie

rarc

hica

l Sup

er H

ydro

phob

ic S

ilico

n Su

rfac

es

Ghi

o S.

et a

l.

1230

-133

0

L

unch

Bre

ak, l

unch

ser

ved

in th

e Ex

hibi

tion

Area

Page 15

15

Tu

esda

y M

orni

ng 2

2 Se

ptem

ber 2

015

830

WF

Thea

tre

Ch

airs

: Kee

s H

agen

and

Urs

Sta

ufer

(TU

-Del

ft, N

L)

O

peni

ng

900

Tue-

Keyn

ote-

1

Nan

o-Li

thog

raph

y

‘WF

Thea

tre’

C

hair:

Kee

s H

agen

(TU

-Del

ft, N

L)

P

iete

r Kru

it 93

0 Tu

e-Ke

ynot

e-2

Nan

o Fo

unta

in P

robe

Tec

hnol

ogy

for I

n Vi

tro

Sing

le C

ell S

tudi

es

‘WF

Thea

tre’

C

hair:

Urs

Sta

ufer

(TU

-Del

ft, N

L)

Hor

acio

Esp

inos

a 10

30

Brea

k/Ex

hibi

tion

sess

ion

A3.

Ele

ctro

n an

d Io

n Be

am

Lith

ogra

phy

Chai

r: J.

Ale

xand

er L

iddl

e (N

IST,

USA

)

B4. 3

D M

icro

Man

ufac

turin

g an

d M

icro

Pri

ntin

g

Ch

air:

Mas

sim

o G

entil

i (Fo

ndaz

ione

Br

uno

Kess

ler,

IT)

C1.1

. MEM

S/N

EMS

Sens

ing

1 Ch

air:

Ste

rnbe

rg A

ndris

(Uni

v. o

f Lat

via,

LV

)

D5.

Sys

tem

Des

ign

and

Fabr

icat

ion

Chai

r: Jo

an B

ause

lls (C

SIC,

ES)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Mis

siss

ippi

’ 11

00

Tue

A3-

c1

Opt

imiz

atio

n of

ele

ctro

n be

am

litho

grap

hic

expo

sure

of P

MM

A

impl

anta

tion

mas

ks w

ith h

igh

aspe

ct

ratio

cov

erin

g a

topo

grap

hic

step

Je

ns B

olte

n et

al.

Tue-

B4-c

1 In

vers

ed p

yram

id-s

hape

d ca

ve a

rray

s w

ith n

ano-

open

ing

cap

fabr

icat

ed b

y la

ser i

nter

fero

met

ric

litho

grap

hy a

nd

wet

etc

hing

W

eijie

Sun

et a

l.

Tue-

C1-c

1 Fa

bric

atio

n, c

hara

cter

isat

ion

and

beha

viou

r of v

ery

low

-pow

er g

as

sens

ing

devi

ces

base

d on

sin

gle

nano

wir

es

J. Sa

mà

et a

l.

Tue-

D5-

inv

Tech

nolo

gies

for p

oint

-of-

care

di

agno

stic

s M

. Irm

sche

r et a

l.

1115

Tu

e A

3-c2

To

war

d Le

ss T

han

50 n

m-L

ine

and

Spac

e N

egat

ive

Tone

Pat

tern

Fa

bric

atio

n by

Ele

ctro

n Be

am

Lith

ogra

phy

usin

g N

EB-2

2 M

akot

o O

kada

et a

l.

Tue-

B4-c

2 N

ovel

Ope

n Ch

anne

l Mic

rone

edle

A

rray

Fab

rica

tion

by 3

D L

aser

Li

thog

raph

y an

d M

icro

mou

ldin

g Te

chni

ques

Za

hra

Fara

ji Ra

d et

al.

Tue-

C1-c

2 In

tegr

atio

n of

ZnO

nan

ostr

uctu

res

onto

a

mic

ro h

ot p

late

for g

as s

ensi

ng

A. T

omm

asi e

t al.

1130

Tu

e A

3-c3

Ch

arac

teri

zatio

n fo

r the

pho

tom

ask

fabr

icat

ion

base

d on

a n

ovel

tech

niqu

e of

hig

h-re

solu

tion

with

a n

on-

chem

ical

ly a

mpl

ified

resi

st a

nd a

pos

t-ex

posu

re b

ake

Hid

etat

su M

iyos

hi e

t al.

Tue-

B4-c

3 H

igh

thro

ughp

ut fa

bric

atio

n of

hi

erar

chic

al p

hoto

nic

nano

stru

ctur

es

N. S

chne

ider

et a

l.

Tue-

C1-c

3 In

tegr

ated

sm

art g

as fl

ow s

enso

r wit

h 2.

6 m

W to

tal p

ower

con

sum

ptio

n an

d 80

dB

dyna

mic

rang

e M

assi

mo

Piot

to e

t al.

Tue-

D5-

c1

Fabr

icat

ion

of a

sm

art c

onta

ct le

ns

plat

form

for t

he d

iagn

osis

of d

ry e

ye

dise

ase

Sajin

a Ti

nku

et a

l.

1145

Tu

e A

3-c4

Fo

cuse

d io

n be

am c

urre

nt d

ensi

ty

prof

ile d

eriv

atio

n fr

om s

ingl

e cr

ysta

l am

orph

izat

ion

regi

on w

idth

s –

anal

ysis

m

etho

d Yu

val G

reen

zwei

g et

al.

Tue-

B4-c

4 Fa

bric

atin

g hi

gh d

ensi

ty m

etal

st

ruct

ures

usi

ng a

six

-fol

d lin

e m

ultip

lyin

g sc

hem

e J.

Bosg

ra e

t al.

Tue-

C1-c

4 Fl

exib

le M

agne

tore

sist

ive

Dev

ices

with

H

igh-

Perf

orm

ance

Sen

sors

H

. Fon

seca

et a

l.

Tue-

D5-

c2

Top-

dow

n Zi

nc O

xide

Nan

owir

es b

y Io

n Be

am E

tchi

ng fo

r Bio

sens

ing

App

licat

ions

Ka

i Sun

et a

l.

1200

Tu

e A

3-c5

Pr

oxim

ity E

ffec

t Qua

ntifi

catio

n an

d D

ose

Opt

imis

atio

n fo

r Hig

h Re

solu

tion

H

eliu

m Io

n Be

am L

ithog

raph

y Xi

aoqi

ng S

hi e

t al.

Tue-

B4-c

5 M

onol

ithic

mic

ro-o

ptic

al c

ompo

nent

s:

adva

ncin

g fr

om n

ovel

mas

ter

fabr

icat

ion

met

hodo

logy

tow

ards

hig

h-vo

lum

e m

anuf

actu

ring

sch

emes

L.

Jaco

t-D

esco

mbe

s et

al.

Tue-

C1-c

5 H

igh

Freq

uenc

y se

lf-se

nsin

g pi

ezor

esis

tive

SPM

can

tilev

ers

wit

h a

nove

l des

ign

W. E

ngl e

t al.

Tue-

D5-

c3

On-

chip

gla

ss m

icro

fluid

ic tr

ap a

nd

stor

age

of h

elic

al m

agne

tic m

icro

robo

t Ba

rbot

Ant

oine

et a

l.

1215

Tu

e A

3-c6

Fa

bric

atio

n of

met

allic

nan

ostr

uctu

res

by c

hara

cter

pro

ject

ion

base

d el

ectr

on

beam

lith

ogra

phy

and

hard

mas

k lif

t-of

f tec

hniq

ue

Tors

ten

Har

zend

orf e

t al.

Tue-

B4-c

6 A

n ef

fect

ive

appr

oach

for r

educ

ing

surf

ace

roug

hnes

s of

PM

MA

in

gray

scal

e EB

L by

ther

mal

radi

atio

n in

duce

d lo

cal r

eflo

w

Chen

Xu

et a

l.

Tue-

C1-c

6 M

EMS

mec

hani

sm fo

r res

onan

ce

freq

uenc

y tu

ning

N

ao T

aked

a et

al.

Tue-

D5-

c4

Fast

and

Lar

ge A

rea

Fabr

icat

ion

of

Hie

rarc

hica

l Sup

er H

ydro

phob

ic S

ilico

n Su

rfac

es

Ghi

o S.

et a

l.

1230

-133

0

L

unch

Bre

ak, l

unch

ser

ved

in th

e Ex

hibi

tion

Area

Page 16

16

Ea

rly T

uesd

ay A

fter

noon

22

Sept

embe

r 201

5 se

ssio

n A5

. Mat

eria

ls fo

r lith

ogra

phy,

re

sist

s an

d re

sist

pro

cess

ing

Ch

air:

Robe

rt K

irchn

er (P

SI, C

H)

B3. E

lect

ron/

Ion

Beam

de

posi

tion,

rela

ted

tech

nolo

gies

, app

licat

ions

Ch

air:

Clau

s J. B

urkh

ardt

(NM

I, DE

)

C1.2

. MEM

S/N

EMS

Fabr

icat

ion

and

Relia

bilit

y

Chai

r: Re

becc

a Ch

eung

(Uni

v. o

f Ed

inbu

rgh,

UK)

D6.

App

licat

ions

Ch

air:

Luig

i Sas

so (T

U D

elft

, NL)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Mis

siss

ippi

’ 13

30

Tue-

A5-in

v Re

sist

mat

eria

l opt

ions

for e

xtre

me

ultr

avio

let l

ithog

raph

y T.

Koz

awa

Tue-

B3-c

1 M

imic

king

the

iride

scen

t col

or o

f fre

e-st

andi

ng M

orph

o bu

tter

fly w

ing

scal

es

fabr

icat

ed b

y e-

beam

lith

ogra

phy

Sich

ao Z

hang

et a

l.

Tue-

C1-c

7 Fa

bric

atio

n of

a fr

eest

andi

ng

nano

fluid

ic g

as c

hann

el b

etw

een

two

met

al m

embr

anes

G

.J. R

adem

aker

et a

l.

Tue-

D6-

inv

Sem

icon

duct

or N

anow

ires,

a P

rom

isin

g To

ol fo

r Cel

l Sen

sing

C.

Prin

z

1345

Tu

e-B3

-c2

Nan

omag

nets

as

build

ing

bloc

ks o

f lo

gic

gate

s - 3

D n

ano

man

ufac

turin

g of

na

nom

agne

t ass

embl

ies

by e

lect

ron

beam

indu

ced

depo

sitio

n H

.D. W

anze

nboe

ck e

t al.

Tue-

C1-c

8 H

ydro

ther

mal

gro

wth

of c

-axi

s na

noro

d-ba

sed

ZnO

film

s fo

r SAW

se

nsin

g ap

plic

atio

ns

G. R

ius e

t al.

1400

Tu

e-A5

-c1

Char

acte

rizat

ion

of th

e an

isot

ropy

of

sem

i-cry

stal

line

poly

mer

s af

ter

nano

impr

int b

y sp

ectr

osco

pic

ellip

som

etry

Si

Wan

g et

al.

Tue-

B3-c

3 Ph

otol

umin

esce

nce

Emis

sion

from

a

nano

fabr

icat

ed S

cann

ing

Prob

e Ti

p M

ade

of E

pita

xial

Ger

man

ium

M

.Bol

lani

et a

l.

Tue-

C1-c

9 Ef

fect

of f

luor

ine

surf

ace

mod

ifica

tion

on re

sona

nce

of a

car

bon

nano

reso

nato

r fab

ricat

ed b

y FI

B/EB

du

al-b

eam

lith

ogra

phy

R. K

omet

ani e

t al.

Tue-

D6-

c1

Cell

Dire

ctio

n Sw

itchi

ng a

nd M

etas

tasi

s Sc

reen

ing

by D

esig

ned

Topo

grap

hy

S.F.

Zho

u et

al.

1415

Tu

e-A5

-c2

Hig

hly

exte

nded

PD

MS

stam

p lif

e-tim

e en

able

d by

the

new

org

anic

pho

to-

cura

ble

soft

NIL

resi

st “

mr-

NIL

210”

M

artin

Mes

sers

chm

idt e

t al.

Tue-

B3-c

4 Pa

ralle

l im

agin

g in

a 1

96-B

eam

SEM

Y.

Ren

et a

l.

Tue-

C1-c

10

Mas

s se

nsor

util

isin

g th

e m

ode-

loca

lisat

ion

effe

ct in

an

elec

tro-

st

atic

ally

-cou

pled

MEM

S re

sona

tor p

air

fabr

icat

ed u

sing

an

SOI p

roce

ss

Gra

ham

S. W

ood

et a

l.

Tue-

D6-

c2

Subs

trat

e-In

depe

nden

t Im

mob

iliza

tion

of M

onol

ayer

Met

al N

anop

artic

les

Arra

y vi

a Se

lf-As

sem

bly

for E

ffic

ient

An

tibio

film

Coa

tings

Sh

ang-

Yi Y

i et a

l.

1430

Tu

e-A5

-c3

Patt

ern

colla

pse

miti

gatio

n in

inor

gani

c re

sist

s vi

a a

poly

mer

free

ze te

chni

que

Tero

S. K

ulm

ala

et a

l.

Tue-

B3-in

v Fo

cuse

d el

ectr

on b

eam

indu

ced

depo

sitio

n of

met

allic

bin

ary

allo

y na

nost

ruct

ures

em

ploy

ing

a he

tero

nucl

ear p

recu

rsor

M

. Hut

h et

al.

Tue-

C1-c

11

Nov

el S

aw T

ooth

Gat

e fo

r Stic

tion

and

Pull-

in V

olta

ge C

ontr

olle

d O

hmic

Si

licon

NEM

S Sw

itch

L. B

oodh

oo e

t al.

Tue-

D6-

c3

In s

itu p

rote

in c

ryst

alliz

atio

n on

m

icro

fabr

icat

ed c

hips

for s

eria

l cr

ysta

llogr

aphy

. N

adia

Opa

ra e

t al.

1445

Tu

e-A5

-c4

Mul

tipho

ton

Lase

r Abl

atio

n Li

thog

raph

y (M

P-LA

L) u

sing

375

nm

Co

ntin

uous

Wav

e La

ser E

nabl

ing

Patt

erni

ng d

own

to th

e 30

nm

Reg

ime

and

beyo

nd

T. M

anou

ras e

t al.

Tue-

C1-c

12

Expo

sing

the

trib

olog

ical

run-

in o

f po

lysi

licon

MEM

S si

dew

alls

in s

lidin

g co

ntac

t usi

ng in

-situ

forc

e m

easu

rem

ents

with

AFM

-like

re

solu

tion

Jaap

Kok

oria

n et

al.

Tue-

D6-

c4

Rapi

d Pr

otot

ypin

g fo

r Mic

roflu

idic

s an

d N

euro

-Eng

inee

ring

Anth

ony

Leon

ard

et a

l.

1500

-153

0

B

reak

/Exh

ibiti

on

Page 17

17

Ea

rly T

uesd

ay A

fter

noon

22

Sept

embe

r 201

5 se

ssio

n A5

. Mat

eria

ls fo

r lith

ogra

phy,

re

sist

s and

resi

st p

roce

ssin

g

Chai

r: Ro

bert

Kirc

hner

(PSI

, CH)

B3. E

lect

ron/

Ion

Beam

de

posi

tion,

rela

ted

tech

nolo

gies

, app

licat

ions

Ch

air:

Clau

s J. B

urkh

ardt

(NM

I, DE

)

C1.2

. MEM

S/N

EMS

Fabr

icat

ion

and

Relia

bilit

y

Chai

r: Re

becc

a Ch

eung

(Uni

v. o

f Ed

inbu

rgh,

UK)

D6. A

pplic

atio

ns

Chai

r: Lu

igi S

asso

(TU

Del

ft, N

L)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Miss

issip

pi’

1330

Tu

e-A5

-inv

Resi

st m

ater

ial o

ptio

ns fo

r ext

rem

e ul

trav

iole

t lith

ogra

phy

T. K

ozaw

a

Tue-

B3-c

1 M

imic

king

the

iride

scen

t col

or o

f fre

e-st

andi

ng M

orph

o bu

tter

fly w

ing

scal

es

fabr

icat

ed b

y e-

beam

lith

ogra

phy

Sich

ao Z

hang

et a

l.

Tue-

C1-c

7 Fa

bric

atio

n of

a fr

eest

andi

ng

nano

fluid

ic g

as c

hann

el b

etw

een

two

met

al m

embr

anes

G.

J. Ra

dem

aker

et a

l.

Tue-

D6-in

v Se

mic

ondu

ctor

Nan

owire

s, a

Pro

mis

ing

Tool

for C

ell S

ensi

ng

C.Pr

inz

13

45

Tue-

B3-c

2 N

anom

agne

ts a

s bui

ldin

g bl

ocks

of

logi

c ga

tes -

3D

nano

man

ufac

turin

g of

na

nom

agne

t ass

embl

ies b

y el

ectr

on

beam

indu

ced

depo

sitio

n H.

D. W

anze

nboe

ck e

t al.

Tue-

C1-c

8 Hy

drot

herm

al g

row

th o

f c-a

xis

nano

rod-

base

d Zn

O fi

lms f

or S

AW

sens

ing

appl

icat

ions

G.

Riu

s et a

l.

1400

Tu

e-A5

-c1

Char

acte

rizat

ion

of th

e an

isot

ropy

of

sem

i-cry

stal

line

poly

mer

s aft

er

nano

impr

int b

y sp

ectr

osco

pic

ellip

som

etry

Si

Wan

g et

al.

Tue-

B3-c

3 Ph

otol

umin

esce

nce

Emis

sion

from

a

nano

fabr

icat

ed S

cann

ing

Prob

e Ti

p M

ade

of E

pita

xial

Ger

man

ium

M

.Bol

lani

et a

l.

Tue-

C1-c

9 Ef

fect

of f

luor

ine

surf

ace

mod

ifica

tion

on re

sona

nce

of a

car

bon

nano

reso

nato

r fab

ricat

ed b

y FI

B/EB

du

al-b

eam

lith

ogra

phy

R. K

omet

ani e

t al.

Tue-

D6-c

1 Ce

ll Di

rect

ion

Switc

hing

and

Met

asta

sis

Scre

enin

g by

Des

igne

d To

pogr

aphy

S.

F. Z

hou

et a

l.

1415

Tu

e-A5

-c2

High

ly e

xten

ded

PDM

S st

amp

life-

time

enab

led

by th

e ne

w o

rgan

ic p

hoto

-cu

rabl

e so

ft N

IL re

sist

“m

r-N

IL21

0”

Mar

tin M

esse

rsch

mid

t et a

l.

Tue-

B3-c

4 Pa

ralle

l im

agin

g in

a 1

96-B

eam

SEM

Y.

Ren

et a

l.

Tue-

C1-c

10

Mas

s sen

sor u

tilis

ing

the

mod

e-lo

calis

atio

n ef

fect

in a

n el

ectr

o-

stat

ical

ly-c

oupl

ed M

EMS

reso

nato

r pai

r fa

bric

ated

usi

ng a

n SO

I pro

cess

Gr

aham

S. W

ood

et a

l.

Tue-

D6-c

2 Su

bstr

ate-

Inde

pend

ent I

mm

obili

zatio

n of

Mon

olay

er M

etal

Nan

opar

ticle

s Ar

ray

via

Self-

Asse

mbl

y fo

r Effi

cien

t An

tibio

film

Coa

tings

Sh

ang-

Yi Y

i et a

l.

1430

Tu

e-A5

-c3

Patt

ern

colla

pse

miti

gatio

n in

inor

gani

c re

sist

s via

a p

olym

er fr

eeze

tech

niqu

e Te

ro S

. Kul

mal

a et

al.

Tue-

B3-in

v Fo

cuse

d el

ectr

on b

eam

indu

ced

depo

sitio

n of

met

allic

bin

ary

allo

y na

nost

ruct

ures

em

ploy

ing

a he

tero

nucl

ear p

recu

rsor

M

. Hut

h et

al.

Tue-

C1-c

11

Nov

el S

aw T

ooth

Gat

e fo

r Stic

tion

and

Pull-

in V

olta

ge C

ontr

olle

d O

hmic

Si

licon

NEM

S Sw

itch

L. B

oodh

oo e

t al.

Tue-

D6-c

3 In

situ

pro

tein

cry

stal

lizat

ion

on

mic

rofa

bric

ated

chi

ps fo

r ser

ial

crys

tallo

grap

hy.

Nad

ia O

para

et a

l. 14

45

Tue-

A5-c

4 M

ultip

hoto

n La

ser A

blat

ion

Lith

ogra

phy

(MP -

LAL)

usi

ng 3

75 n

m

Cont

inuo

us W

ave

Lase

r Ena

blin

g Pa

tter

ning

dow

n to

the

30 n

m R

egim

e an

d be

yond

T.

Man

oura

s et a

l.

Tue-

C1-c

12

Expo

sing

the

trib

olog

ical

run-

in o

f po

lysi

licon

MEM

S si

dew

alls

in sl

idin

g co

ntac

t usi

ng in

-situ

forc

e m

easu

rem

ents

with

AFM

-like

re

solu

tion

Jaap

Kok

oria

n et

al.

Tue-

D6-c

4 Ra

pid

Prot

otyp

ing

for M

icro

fluid

ics

and

Neu

ro-E

ngin

eerin

g An

thon

y Le

onar

d et

al.

1500

-153

0

B

reak

/Exh

ibiti

on

Page 18

18

Late

Tue

sday

Aft

erno

on 2

2 Se

ptem

ber 2

015

1530

Po

ster

sess

ion

1 (e

ven

num

bers

) / E

xhib

ition

Unt

il 18

00

sess

ion

Spec

ial s

essi

on S

1. S

ingl

e N

anom

eter

Man

ufac

turin

g (S

NM

) Ch

air:

Ivo

Rang

elow

(TU

-Ilm

enau

)

Sp

ecia

l ses

sion

S2.

Che

mis

try

for E

Lect

ron

Indu

ced

NAn

ofab

ricat

ion

(CEL

INA)

Ch

air:

Ivo

Utk

e (E

MPA

, CH)

ro

om

‘Am

azon

’ ‘M

ississ

ippi

’ 17

00

Tue-

S1-c

1 In

trod

uctio

n to

Sin

gle

Nan

omet

er

Man

ufac

turin

g fo

r bey

ond

CMO

S de

vice

s (SN

M)

Ivo

W. R

ange

low

Tue-

S2-c

1 Ch

emis

try

for E

lect

ron

Indu

ced

Nan

ofab

ricat

ion:

Intr

oduc

tion

to C

OST

Ac

tion

CM13

01 –

CEL

INA

Pe

tra

Swid

erek

et a

l. 17

05

Tue-

S1-c

2 Ch

arge

d pa

rtic

le si

ngle

nan

omet

er

nano

fabr

icat

ion

Phili

p Pr

ewet

t

Tue-

S2-c

2 Fo

cuse

d el

ectr

on b

eam

indu

ced

proc

essi

ng (F

EBIP

) as m

askl

ess 3

D di

rect

-writ

e na

nolit

hogr

aphy

pla

tfor

m

H.D.

Wan

zenb

oeck

et a

l. 17

25

Tue-

S1-c

3 Th

erm

al a

nd O

xida

tion

Scan

ning

Pro

be

Lith

ogra

phy

Felix

Hol

zner

1735

Tu

e-S2

-c3

Focu

sed

elec

tron

indu

ced

proc

essi

ng in

a

surf

ace

scie

nce

appr

oach

Hu

bert

us M

arba

ch

1745

Tue-

S1-c

4 Si

ngle

nan

omet

er p

atte

rn tr

ansf

er

Mik

e Co

oke

1800

Tu

e-S1

-c4

Cont

inue

d En

d of

pos

ter s

essio

n 1

Tue-

S2-c

3 Co

ntin

ued

1805

Tu

e-S1

-c5

3D-A

FM/M

etro

logy

for s

ub 3

nm

Mar

ijn v

an V

eghe

l

Tu

e-S2

-c4

Shap

e co

ntro

l in

high

reso

lutio

n El

ectr

on B

eam

Indu

ced

Depo

sitio

n

S. H

ari e

t al.

1820

Tue-

S2-c

5 Fo

cuse

d el

ectr

on a

nd io

n be

am

indu

ced

depo

sitio

n on

flex

ible

and

tr

ansp

aren

t pol

ycar

bona

te su

bstr

ates

J.

M. d

e Te

resa

et a

l.

1825

Tu

e-S1

-c6

Sub-

10nm

dev

ice

deve

lopm

ent w

ithin

th

e SN

M P

roje

ct

Zahi

d Du

rran

i

1835

Tue-

S2-c

6 Th

e SE

M a

s rea

ctio

n ch

ambe

r: de

velo

ping

nan

ogra

nula

r Pt-

C ad

ditiv

e ch

emis

try

on th

e na

nom

eter

scal

e A.

A.M

. Al-M

aras

hdeh

et a

l.

1845

End

of S

peci

al se

ssio

n S1

1850

End

of S

peci

al se

ssio

n S2

Page 19

19

Late

Tue

sday

Aft

erno

on 2

2 Se

ptem

ber 2

015

1530

Po

ster

sess

ion

1 (e

ven

num

bers

) / E

xhib

ition

Unt

il 18

00

sess

ion

Spec

ial s

essi

on S

1. S

ingl

e N

anom

eter

Man

ufac

turin

g (S

NM

) Ch

air:

Ivo

Rang

elow

(TU

-Ilm

enau

)

Sp

ecia

l ses

sion

S2.

Che

mis

try

for E

Lect

ron

Indu

ced

NAn

ofab

ricat

ion

(CEL

INA)

Ch

air:

Ivo

Utk

e (E

MPA

, CH)

ro

om

‘Am

azon

’ ‘M

ississ

ippi

’ 17

00

Tue-

S1-c

1 In

trod

uctio

n to

Sin

gle

Nan

omet

er

Man

ufac

turin

g fo

r bey

ond

CMO

S de

vice

s (SN

M)

Ivo

W. R

ange

low

Tue-

S2-c

1 Ch

emis

try

for E

lect

ron

Indu

ced

Nan

ofab

ricat

ion:

Intr

oduc

tion

to C

OST

Ac

tion

CM13

01 –

CEL

INA

Pe

tra

Swid

erek

et a

l. 17

05

Tue-

S1-c

2 Ch

arge

d pa

rtic

le si

ngle

nan

omet

er

nano

fabr

icat

ion

Phili

p Pr

ewet

t

Tue-

S2-c

2 Fo

cuse

d el

ectr

on b

eam

indu

ced

proc

essi

ng (F

EBIP

) as m

askl

ess 3

D di

rect

-writ

e na

nolit

hogr

aphy

pla

tfor

m

H.D.

Wan

zenb

oeck

et a

l. 17

25

Tue-

S1-c

3 Th

erm

al a

nd O

xida

tion

Scan

ning

Pro

be

Lith

ogra

phy

Felix

Hol

zner

1735

Tu

e-S2

-c3

Focu

sed

elec

tron

indu

ced

proc

essi

ng in

a

surf

ace

scie

nce

appr

oach

Hu

bert

us M

arba

ch

1745

Tue-

S1-c

4 Si

ngle

nan

omet

er p

atte

rn tr

ansf

er

Mik

e Co

oke

1800

Tu

e-S1

-c4

Cont

inue

d En

d of

pos

ter s

essio

n 1

Tue-

S2-c

3 Co

ntin

ued

1805

Tu

e-S1

-c5

3D-A

FM/M

etro

logy

for s

ub 3

nm

Mar

ijn v

an V

eghe

l

Tu

e-S2

-c4

Shap

e co

ntro

l in

high

reso

lutio

n El

ectr

on B

eam

Indu

ced

Depo

sitio

n

S. H

ari e

t al.

1820

Tue-

S2-c

5 Fo

cuse

d el

ectr

on a

nd io

n be

am

indu

ced

depo

sitio

n on

flex

ible

and

tr

ansp

aren

t pol

ycar

bona

te su

bstr

ates

J.

M. d

e Te

resa

et a

l.

1825

Tu

e-S1

-c6

Sub-

10nm

dev

ice

deve

lopm

ent w

ithin

th

e SN

M P

roje

ct

Zahi

d Du

rran

i

1835

Tue-

S2-c

6 Th

e SE

M a

s rea

ctio

n ch

ambe

r: de

velo

ping

nan

ogra

nula

r Pt-

C ad

ditiv

e ch

emis

try

on th

e na

nom

eter

scal

e A.

A.M

. Al-M

aras

hdeh

et a

l.

1845

End

of S

peci

al se

ssio

n S1

1850

End

of S

peci

al se

ssio

n S2

Page 20

20

Ea

rly

Wed

nesd

ay M

orni

ng 2

3 Se

ptem

ber

2015

83

0 W

ed-K

eyno

te-3

D

evel

opm

ent o

f blo

ck c

opol

ymer

s to

cre

ate

com

plex

mat

eria

l nan

opat

tern

s

‘WF

Thea

tre’

C

hair

: Die

ter K

ern

(Uni

v. T

uebi

ngen

, D

E)

Mic

hael

Mor

ris

915

Relo

catio

n se

ssio

n A

6. D

irec

ted

Self

Ass

embl

y Ch

air:

Chr

isto

phe

Vieu

(Uni

v. o

f To

ulou

se, F

R)

B7. M

etro

logy

Ch

air:

Har

m K

noop

s (T

U E

indh

oven

, NL)

C5

.1. M

icro

and

Nan

o de

vice

s fo

r Ph

ysic

al S

cien

ce -

Com

puti

ng

Chai

r: V

icto

r Cad

arso

(PSI

, CH

)

D3.

Org

an o

n a

Chip

Ch

air:

Ste

lla P

ang

(City

Uni

v. o

f Hon

g Ko

ng, H

K)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Mis

siss

ippi

’ 93

0 W

ed-A

6-c1

Ca

ptur

e pr

obab

ility

of a

ssem

bly

defe

cts

in 1

4 nm

hal

f-pi

tch

line/

spac

e D

SA p

atte

rns

H.P

atha

ngi e

t al.

Wed

-B7-

c1

Imag

ing

and

mod

el s

imul

atio

n of

tr

ench

es o

n a

silic

on s

urfa

ce in

hel

ium

io

n m

icro

scop

y P.

F.A

. Alk

emad

e et

al.

Wed

-C5-

inv

Evol

utio

n of

Sup

erco

nduc

ting

Qua

ntum

Pr

oces

sors

Le

onar

do D

iCar

lo

Wed

-D3-

c1

Skin

-on-

chip

: in

tegr

atio

n of

ski

n ti

ssue

an

d m

icro

syst

ems

engi

neer

ing

Berg

ers

Lam

bert

et a

l.

945

Wed

-A6-

c2

Ord

erin

g of

eit

her

nano

-dot

arr

ays

or

nano

-line

s al

ong

EB-d

raw

n re

sist

gui

de

lines

usi

ng P

S-PD

MS

self-

asse

mbl

y w

ith

a m

olec

ular

wei

ght o

f 1.4

6 kg

/mol

Su

mio

Hos

aka

et a

l.

Wed

-B7-

c2

Dia

mon

d sc

anni

ng p

robe

s w

ith

sub-

nano

met

er r

esol

utio

n fo

r ad

vanc

ed

nano

elec

tron

ics

devi

ce c

hara

cter

izat

ion

T. H

ants

chel

et a

l.

Wed

-D3-

c2

Mic

roel

ectr

ode

arra

y w

ith

inte

grat

ed

siev

ing

stru

ctur

e fo

r au

tom

ated

cel

l po

siti

onin

g B.

Sch

urin

k et a

l.

1000

W

ed-A

6-c3

D

eter

min

atio

n of

the

inte

rfac

ial

ener

gies

in c

hem

ical

gui

ding

pat

tern

s fo

r di

rect

ed s

elf-

asse

mbl

y of

blo

ck c

o-po

lym

ers

Laur

a Ev

ange

lio e

t al.

Wed

-B7-

c3

Elec

tric

Fie

lds

in S

cann

ing

Elec

tron

M

icro

scop

y Si

mul

atio

ns

K. T

. Ara

t et a

l.

Wed

-C5-

c1

Qua

ntum

Cel

lula

r A

utom

ata:

Des

ign

and

Fabr

icat

ion

wit

h th

e N

anod

amas

cene

Pro

cess

G

abri

el D

roul

ers

et a

l.

Wed

-D3-

inv

Org

ans-

on-c

hip

by s

elec

tive

ass

embl

y of

pri

mar

y ce

lls e

nabl

ed b

y di

elec

trop

hore

sis

in m

icro

fluid

ic

devi

ces

M.S

telz

le

1015

W

ed-A

6-c4

Ch

arac

teri

zati

on o

f Hal

f-pi

tch

15 n

m

Met

al W

ire

Circ

uit

Fabr

icat

ed b

y D

irec

ted

Self-

asse

mbl

y of

PS-

b-PM

MA

Y.

Kas

ahar

a et

al.

Wed

-B7-

c4

Usi

ng P

iezo

resp

onse

For

ce M

icro

scop

y fo

r se

mic

ondu

ctor

ZnO

nan

owir

es

G. M

urill

o et

al.

Wed

-C5-

c2

Scal

ing

and

Inte

grat

ion

of M

emri

stiv

e N

anod

evic

es U

sing

Nan

oim

prin

t Li

thog

raph

y Sh

uang

Pi e

t al.

Wed

-D3-

inv

Cont

inue

d

1030

-110

0

B

reak

/Exh

ibiti

on

sess

ion

A7.

Ste

ncil

and

Tip

Base

d Pa

tter

ning

Ch

air:

Pas

qual

anto

nio

Ping

ue (S

cuol

a N

orm

ale

Supe

rior

PIS

A, I

T)

B8. S

elf A

ligne

d Pr

oces

ses

Chai

r: M

onik

a Fl

eisc

her

(Uni

v.

Tueb

inge

n, D

E)

C5.2

. μ/n

ano

- dev

ices

for

Phys

ical

Sci

ence

–Nan

o Tu

bes

and

Nan

o W

ires

Ch

air:

Zah

id D

uran

i (Im

peri

al C

olle

ge

Lond

on, U

K)

D2.

Lab

on

Chip

Ch

air:

Anj

a Bo

isen

(DTU

, DK)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Mis

siss

ippi

’ 11

00

Wed

-A7-

c1

Etch

ing

thro

ugh

nano

sten

cils

for

high

re

solu

tion

and

larg

e-sc

ale

patt

erni

ng o

f op

tica

l nan

oant

enna

arr

ays

Vale

ntin

Fla

urau

d et

al.

Wed

-B8-

inv

Stra

tegi

es fo

r se

lect

ive

atom

ic la

yer

depo

siti

on o

n pa

tter

ned

subs

trat

es

A.J.

M.M

acku

s et

al.

Wed

-C5-

c3

TEM

stu

dy o

f Sch

ottk

y ju

ncti

ons

for

reco

nfig

urab

le s

ilico

n na

now

ire

devi

ces

S. B

aner

jee

et a

l.

Wed

-D2-

c1

Mic

rore

acto

r w

ith

inte

grat

ed m

icro

-m

ixer

and

hea

ted

nebu

lizer

for

mas

s sp

ectr

omet

ric

chem

ical

rea

ctio

n an

alys

is

G.S

cott

i et a

l. 11

15

Wed

-A7-

c2

Dir

ect f

abri

cati

on o

f thi

n fil

m la

yer

MoS

2 fie

ld-e

ffec

t na

nosc

ale

tran

sist

ors

by o

xida

tion

sca

nnin

g pr

obe

litho

grap

hy

Fran

cisc

o M

. Esp

inos

a et

al.

Wed

-C5-

c4

Fabr

icat

ion

of a

sus

pend

ed s

ilico

n na

now

ire

sing

le h

ole

tran

sist

or b

y fo

cuse

d io

n be

am im

plan

tati

on

J.Llo

bet e

t al.

Wed

-D2-

c2

Rese

alab

le fl

owce

lls w

ith

inte

grat

ed

oxyg

en s

ensi

ng la

yers

for

enzy

mat

ic

reac

tion

stu

dies

M

artin

a Vi

efhu

es e

t al.

Page 21

21

Ea

rly W

edne

sday

Mor

ning

23

Sept

embe

r 201

5 83

0 W

ed-K

eyno

te-3

D

evel

opm

ent o

f blo

ck c

opol

ymer

s to

cre

ate

com

plex

mat

eria

l nan

opat

tern

s

‘WF

Thea

tre’

C

hair:

Die

ter K

ern

(Uni

v. T

uebi

ngen

, D

E)

Mic

hael

Mor

ris

915

Relo

catio

n se

ssio

n A6

. Dire

cted

Sel

f Ass

embl

y Ch

air:

Chr

isto

phe

Vieu

(Uni

v. o

f To

ulou

se, F

R)

B7. M

etro

logy

Ch

air:

Har

m K

noop

s (T

U E

indh

oven

, NL)

C5

.1. M

icro

and

Nan

o de

vice

s fo

r Phy

sica

l Sci

ence

- Co

mpu

ting

Chai

r: V

icto

r Cad

arso

(PSI

, CH

)

D3.

Org

an o

n a

Chip

Ch

air:

Ste

lla P

ang

(City

Uni

v. o

f Hon

g Ko

ng, H

K)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Mis

siss

ippi

’ 93

0 W

ed-A

6-c1

Ca

ptur

e pr

obab

ility

of a

ssem

bly

defe

cts

in 1

4 nm

hal

f-pi

tch

line/

spac

e D

SA p

atte

rns

H.P

atha

ngi e

t al.

Wed

-B7-

c1

Imag

ing

and

mod

el s

imul

atio

n of

tr

ench

es o

n a

silic

on s

urfa

ce in

hel

ium

io

n m

icro

scop

y P.

F.A.

Alk

emad

e et

al.

Wed

-C5-

inv

Evol

utio

n of

Sup

erco

nduc

ting

Qua

ntum

Pr

oces

sors

Le

onar

do D

iCar

lo

Wed

-D3-

c1

Skin

-on-

chip

: in

tegr

atio

n of

ski

n tis

sue

and

mic

rosy

stem

s en

gine

erin

g Be

rger

s La

mbe

rt e

t al.

945

Wed

-A6-

c2

Ord

erin

g of

eith

er n

ano-

dot a

rray

s or

na

no-li

nes

alon

g EB

-dra

wn

resi

st g

uide

lin

es u

sing

PS-

PDM

S se

lf-as

sem

bly

with

a

mol

ecul

ar w

eigh

t of 1

.46

kg/m

ol

Sum

io H

osak

a et

al.

Wed

-B7-

c2

Dia

mon

d sc

anni

ng p

robe

s w

ith s

ub-

nano

met

er re

solu

tion

for a

dvan

ced

nano

elec

tron

ics

devi

ce c

hara

cter

izat

ion

T. H

ants

chel

et a

l.

Wed

-D3-

c2

Mic

roel

ectr

ode

arra

y w

ith in

tegr

ated

si

evin

g st

ruct

ure

for a

utom

ated

cel

l po

sitio

ning

B.

Sch

urin

k et a

l.

1000

W

ed-A

6-c3

D

eter

min

atio

n of

the

inte

rfac

ial

ener

gies

in c

hem

ical

gui

ding

pat

tern

s fo

r dire

cted

sel

f-as

sem

bly

of b

lock

co-

poly

mer

s La

ura

Evan

gelio

et a

l.

Wed

-B7-

c3

Elec

tric

Fie

lds

in S

cann

ing

Elec

tron

M

icro

scop

y Si

mul

atio

ns

K. T

. Ara

t et a

l.

Wed

-C5-

c1

Qua

ntum

Cel

lula

r Aut

omat

a: D

esig

n an

d Fa

bric

atio

n w

ith th

e N

anod

amas

cene

Pro

cess

G

abrie

l Dro

uler

s et

al.

Wed

-D3-

inv

Org

ans-

on-c

hip

by s

elec

tive

asse

mbl

y of

prim

ary

cells

ena

bled

by

diel

ectr

opho

resi

s in

mic

roflu

idic

de

vice

s M

.Ste

lzle

1015

W

ed-A

6-c4

Ch

arac

teriz

atio

n of

Hal

f-pi

tch

15 n

m

Met

al W

ire C

ircu

it Fa

bric

ated

by

Dire

cted

Sel

f-as

sem

bly

of P

S-b-

PMM

A

Y. K

asah

ara

et a

l.

Wed

-B7-

c4

Usi

ng P

iezo

resp

onse

For

ce M

icro

scop

y fo

r sem

icon

duct

or Z

nO n

anow

ires

G. M

urill

o et

al.

Wed

-C5-

c2

Scal

ing

and

Inte

grat

ion

of M

emris

tive

Nan

odev

ices

Usi

ng N

anoi

mpr

int

Lith

ogra

phy

Shua

ng P

i et a

l.

Wed

-D3-

inv

Cont

inue

d

1030

-110

0

B

reak

/Exh

ibiti

on

sess

ion

A7. S

tenc

il an

d Ti

p Ba

sed

Patt

erni

ng

Chai

r: P

asqu

alan

toni

o Pi

ngue

(Scu

ola

Nor

mal

e Su

perio

r PIS

A, IT

)

B8. S

elf A

ligne

d Pr

oces

ses

Chai

r: M

onik

a Fl

eisc

her (

Uni

v.

Tueb

inge

n, D

E)

C5.2

. μ/n

ano

- dev

ices

for

Phys

ical

Sci

ence

–Nan

o Tu

bes

and

Nan

o W

ires

Chai

r: Z

ahid

Dur

ani (

Impe

rial C

olle

ge

Lond

on, U

K)

D2.

Lab

on

Chip

Ch

air:

Anj

a Bo

isen

(DTU

, DK)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Mis

siss

ippi

’ 11

00

Wed

-A7-

c1

Etch

ing

thro

ugh

nano

sten

cils

for h

igh

reso

lutio

n an

d la

rge-

scal

e pa

tter

ning

of

optic

al n

anoa

nten

na a

rray

s Va

lent

in F

laur

aud

et a

l.

Wed

-B8-

inv

Stra

tegi

es fo

r sel

ectiv

e at

omic

laye

r de

posi

tion

on p

atte

rned

sub

stra

tes

A.J.M

.Mac

kus

et a

l.

Wed

-C5-

c3

TEM

stu

dy o

f Sch

ottk

y ju

nctio

ns fo

r re

conf

igur

able

sili

con

nano

wire

dev

ices

S.

Ban

erje

e et

al.

Wed

-D2-

c1

Mic

rore

acto

r with

inte

grat

ed m

icro

-m

ixer

and

hea

ted

nebu

lizer

for m

ass

spec

trom

etric

che

mic

al re

actio

n an

alys

is

G.S

cott

i et a

l. 11

15

Wed

-A7-

c2

Dire

ct fa

bric

atio

n of

thin

film

laye

r M

oS2

field

-eff

ect n

anos

cale

tran

sist

ors

by o

xida

tion

scan

ning

pro

be

litho

grap

hy

Fran

cisc

o M

. Esp

inos

a et

al.

Wed

-C5-

c4

Fabr

icat

ion

of a

sus

pend

ed s

ilico

n na

now

ire s

ingl

e ho

le tr

ansi

stor

by

focu

sed

ion

beam

impl

anta

tion

J.Llo

bet e

t al.

Wed

-D2-

c2

Rese

alab

le fl

owce

lls w

ith in

tegr

ated

ox

ygen

sen

sing

laye

rs fo

r enz

ymat

ic

reac

tion

stud

ies

Mar

tina

Vief

hues

et a

l.

Page 22

22

La

te W

edne

sday

Mor

ning

23

Sept

embe

r 201

5 ro

om

‘Am

azon

’ ‘Y

angt

ze’

‘WF

Thea

tre’

‘M

issi

ssip

pi’

1130

W

ed-A

7-c3

Li

ft-o

ff p

roce

sses

for a

void

ing

subs

trat

e da

mag

e fr

om c

harg

ed p

artic

les

duri

ng

litho

grap

hy

Mar

tin S

pies

er e

t al.

Wed

-B8-

c1

Are

a se

lect

ive

grow

th o

f cha

lcog

enid

e m

ater

ials

ont

o pa

tter

ned

subs

trat

es b

y ch

emic

al v

apor

dep

ositi

on

Ruom

eng

Hua

ng et

al.

Wed

-C5-

c5

GaA

s/In

Sb c

ore-

shel

l nan

owir

es a

nd

InSb

nan

otub

es

Tors

ten

Rieg

er e

t al.

Wed

-D2-

c3

Mon

olith

ical

ly in

tegr

ated

pho

toni

c pl

atfo

rm fo

r Poi

nt-o

f-N

eed

appl

icat

ion

in fo

od s

afet

y Μ.Ang

elop

oulou

et a

l. 11

45

Wed

-A7-

c4

Fiel

d Em

issi

on S

cann

ing

Prob

e Li

thog

raph

y an

d Et

chin

g at

Cry

ogen

ic

Tem

pera

ture

s –

A C

lose

d Lo

op

Tech

nolo

gy to

war

ds b

eyon

d CM

OS

Dev

ice

Man

ufac

turi

ng

M.K

aest

ner e

t al.

Wed

-B8-

c2

Nan

ocry

stal

Sel

f-A

ssem

bly

of C

dSe/

CdS

Hol

low

Dom

es in

qua

si c

onta

ct-f

ree

cond

ition

s An

gelo

Acc

ardo

et a

l.

Wed

-C5-

c6

Fabr

icat

ion

and

char

acte

riza

tion

of

tunn

el b

arri

ers

in a

mul

ti-w

alle

d ca

rbon

na

notu

be fo

rmed

by

focu

sed

ion

beam

te

chni

que

H. T

omiz

awa

et a

l.

Wed

-D2-

c4

A C

apill

ary-

Dri

ven

Mic

rosy

stem

for

DN

A A

mpl

ifica

tion

Dir

ect f

rom

Who

le

Bloo

d Be

njam

in Jo

nes

et a

l.

1200

W

ed-A

7-in

v A

dvan

ced

Scan

ning

Pro

be L

ithog

raph

y A.

Knol

l

Wed

-B8-

c3

Fabr

icat

ion

of H

igh-

reso

lutio

n, S

elf-

alig

ned

Palla

dium

Ele

ctro

des

for

Nan

ores

onat

ors

Laur

a Ve

ra Je

nni e

t al.

Wed

-C5-

c7

Impr

ovin

g th

e D

oubl

e La

yer

Capa

cita

nce

of S

ilico

n N

anow

ire

Arr

ays

with

Roo

m T

empe

ratu

re Io

nic

Liqu

ids

Abdu

rrah

man

Sho

ugee

et a

l.

Wed

-D2-

c5

Peri

odic

con

vect

ion

of s

uper

para

mag

- ne

tic b

eads

wit

hin

a m

icro

fluid

ic

chan

nel b

y in

terl

ocke

d, e

lect

ropl

ated

st

ruct

ures

act

ivat

ed b

y a

stat

ic fi

eld

Thie

s Ja

n-W

ilhel

m e

t al.

1145

W

ed-B

8-c4

Cr

ysta

llini

ty v

aria

tions

ove

r the

leng

th

of v

ertic

ally

alig

ned

carb

on n

anot

ubes

gr

own

by c

hem

ical

vap

our d

epos

ition

S.

Vol

lebr

egt e

t al.

Wed

-C5-

c8

Opt

imiz

atio

n of

3-D

N-c

hann

el T

win

Si

licon

Nan

owir

e M

OSF

ET

Izza

ti O

mar

et a

l.

Wed

-D2-

c6

Nan

oim

prin

ted

phot

onic

cry

stal

sla

b se

nsor

for l

abel

-fre

e di

ffus

ion

mon

itori

ng

Kris

tian

Tølb

øl S

øren

sen

et a

l. 12

30-1

330

Lun

ch B

reak

, lun

ch s

erve

d in

the

Exhi

bitio

n Ar

ea

Earl

y W

edne

sday

Aft

erno

on 2

3 Se

ptem

ber 2

015

sess

ion

A1.

Pho

to L

ithog

raph

y Ch

air:

Pau

l Alk

emad

e (T

U D

elft

, NL)

C3

. Met

a M

ater

ials

and

thei

r Fa

bric

atio

n Ch

air:

And

ers

Kris

tens

en (D

TU, D

K)

C5.3

. μ/n

ano-

devi

ces

for

Phys

.Sci

ence

- In

stru

men

tatio

n an

d Im

agin

g Ch

air:

Ric

hard

Koo

ps (V

SL, N

L)

D4.

Mic

ro a

nd N

anof

luid

ics

for

Biol

ogy

and

Life

Sci

ence

s

Chai

r: A

lber

t van

der

Ber

g (U

niv.

Tw

ente

, NL)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Mis

siss

ippi

’ 13

30

Wed

-A1-

c1

Tow

ards

Sin

gle

Phot

on L

ithog

raph

y H

ilde

Har

dtde

gen

et a

l.

Wed

-C3-

inv

Rece

nt p

rogr

ess

in h

yper

bolic

, chi

ral

and

3D m

etam

ater

ials

: Phy

sics

, Fa

bric

atio

n an

d A

pplic

atio

ns

Min

kyun

g Ki

m e

t al.

Wed

-C5-

c9

Dop

ant I

mag

ing

of P

ower

Se

mic

ondu

ctor

Dev

ice

Cros

s Se

ctio

ns

U. G

ysin

et a

l.

Wed

-D4-

c1

Prep

arat

ion

of h

ighl

y po

rous

PLG

A

mic

ropa

rtic

les

usin

g dr

ople

t fis

sion

and

ge

latin

por

ogen

Ch

ul M

in K

im e

t al.

1345

W

ed-A

1-c2

Fa

bric

atio

n of

hig

h-as

pect

-rat

io

pola

rize

rs w

ith

Dis

plac

emen

t Tal

bot

Lith

ogra

phy

Chris

tian

Dai

s et

al.

Wed

-C5-

c10

Expe

rim

enta

l sys

tem

com

bine

d w

ith

a m

icro

mac

hine

and

dou

ble-

tilt T

EM

hold

er

Taka

aki S

ato

et a

l.

Wed

-D4-

c2

SU-8

mic

ro-p

illar

s su

spen

ded

on S

i3N

4 m

embr

anes

: a s

uper

hydr

opho

- bic

chi

p fo

r in-

situ

X-r

ay d

iffra

ctio

n st

udie

s on

bi

o-so

ft m

atte

r A.

Acca

rdo

et a

l. 14

00

Wed

-A1-

c3

Thro

ugh-

Waf

er P

hoto

litho

grap

hic

Expo

sure

for C

ontr

ol o

f Res

ist S

idew

all

Prof

ile

L. W

ang

et a

l.

Wav

elen

gth

Sele

ctiv

e M

etam

ater

ial

Abs

orbe

r for

The

rmal

Det

ecto

rs

A. S

hosh

i et a

l.

Wed

-C5-

c11

Mic

rofa

bric

atio

n of

an

inte

grat

ed

phot

ocon

duct

ive

switc

h an

d U

ltraf

ast

Beam

Bla

nker

G

erw

ard

Wep

pelm

an e

t al.

Wed

-D4-

c3

Act

ive

poro

us v

alve

s fo

r dro

plet

flow

m

anip

ulat

ion

in o

pen

chan

nel f

luid

ics

N. V

ourd

as e

t al.

Page 23

23

La

te W

edne

sday

Mor

ning

23

Sept

embe

r 201

5 ro

om

‘Am

azon

’ ‘Y

angt

ze’

‘WF

Thea

tre’

‘M

ississ

ippi

’ 11

30

Wed

-A7-

c3

Lift

-off

proc

esse

s for

avo

idin

g su

bstr

ate

dam

age

from

cha

rged

par

ticle

s dur

ing

litho

grap

hy

Mar

tin S

pies

er e

t al.

Wed

-B8-

c1

Area

sele

ctiv

e gr

owth

of c

halc

ogen

ide

mat

eria

ls o

nto

patt

erne

d su

bstr

ates

by

chem

ical

vap

or d

epos

ition

Ru

omen

g Hu

ang et

al.

Wed

-C5-

c5

GaA

s/In

Sb c

ore-

shel

l nan

owire

s and

In

Sb n

anot

ubes

To

rste

n Ri

eger

et a

l.

Wed

-D2-

c3

Mon

olith

ical

ly in

tegr

ated

pho

toni

c pl

atfo

rm fo

r Poi

nt-o

f-Nee

d ap

plic

atio

n in

food

safe

ty

Μ.Ang

elop

oulou

et a

l. 11

45

Wed

-A7-

c4

Fiel

d Em

issi

on S

cann

ing

Prob

e Li

thog

raph

y an

d Et

chin

g at

Cry

ogen

ic

Tem

pera

ture

s – A

Clo

sed

Loop

Te

chno

logy

tow

ards

bey

ond

CMO

S De

vice

Man

ufac

turin

g M

.Kae

stne

r et a

l.

Wed

-B8-

c2

Nan

ocry

stal

Sel

f-Ass

embl

y of

CdS

e/Cd

S Ho

llow

Dom

es in

qua

si c

onta

ct-fr

ee

cond

ition

s An

gelo

Acc

ardo

et a

l.

Wed

-C5-

c6

Fabr

icat

ion

and

char

acte

rizat

ion

of

tunn

el b

arrie

rs in

a m

ulti-

wal

led

carb

on

nano

tube

form

ed b

y fo

cuse

d io

n be

am

tech

niqu

e H.

Tom

izaw

a et

al.

Wed

-D2-

c4

A Ca

pilla

ry-D

riven

Mic

rosy

stem

for

DNA

Ampl

ifica

tion

Dire

ct fr

om W

hole

Bl

ood

Benj

amin

Jone

s et a

l.

1200

W

ed-A

7-in

v Ad

vanc

ed S

cann

ing

Prob

e Li

thog

raph

y A.

Knol

l

Wed

-B8-

c3

Fabr

icat

ion

of H

igh-

reso

lutio

n, S

elf-

alig

ned

Palla

dium

Ele

ctro

des f

or

Nan

ores

onat

ors

Laur

a Ve

ra Je

nni e

t al.

Wed

-C5-

c7

Impr

ovin

g th

e Do

uble

Lay

er

Capa

cita

nce

of S

ilico

n N

anow

ire A

rray

s w

ith R

oom

Tem

pera

ture

Ioni

c Li

quid

s Ab

durr

ahm

an S

houg

ee e

t al.

Wed

-D2-

c5

Perio

dic

conv

ectio

n of

supe

rpar

amag

- ne

tic b

eads

with

in a

mic

roflu

idic

ch

anne

l by

inte

rlock

ed, e

lect

ropl

ated

st

ruct

ures

act

ivat

ed b

y a

stat

ic fi

eld

Thie

s Jan

-Wilh

elm

et a

l. 11

45

Wed

-B8-

c4

Crys

talli

nity

var

iatio

ns o

ver t

he le

ngth

of

ver

tical

ly a

ligne

d ca

rbon

nan

otub

es

grow

n by

che

mic

al v

apou

r dep

ositi

on

S. V

olle

breg

t et a

l.

Wed

-C5-

c8

Opt

imiz

atio

n of

3-D

N-c

hann

el T

win

Si

licon

Nan

owire

MO

SFET

Iz

zati

Om

ar e

t al.

Wed

-D2-

c6

Nan

oim

prin

ted

phot

onic

cry

stal

slab

se

nsor

for l

abel

-free

diff

usio

n m

onito

ring

Krist

ian

Tølb

øl S

øren

sen

et a

l. 12

30-1

330

Lunc

h Br

eak,

lunc

h se

rved

in th

e Ex

hibi

tion

Area

Early

Wed

nesd

ay A

fter

noon

23

Sept

embe

r 201

5 se

ssio

n A1

. Pho

to L

ithog

raph

y Ch

air:

Paul

Alk

emad

e (T

U D

elft

, NL)

C3

. Met

a M

ater

ials

and

thei

r Fa

bric

atio

n Ch

air:

Ande

rs K

riste

nsen

(DTU

, DK)

C5.3

. μ/n

ano-

devi

ces f

or

Phys

.Sci

ence

- In

stru

men

tatio

n an

d Im

agin

g Ch

air:

Rich

ard

Koop

s (VS

L, N

L)

D4. M

icro

and

Nan

oflu

idic

s for

Bi

olog

y an

d Li

fe S

cien

ces

Ch

air:

Albe

rt v

an d

er B

erg

(Uni

v.

Twen

te, N

L)

room

‘A

maz

on’

‘Yan

gtze

’ ‘W

F Th

eatr

e’

‘Miss

issip

pi’

1330

W

ed-A

1-c1

To

war

ds S

ingl

e Ph

oton

Lith

ogra

phy

Hild

e Ha

rdtd

egen

et a

l.

Wed

-C3-

inv

Rece

nt p

rogr

ess i

n hy

perb

olic

, chi

ral

and

3D m

etam

ater

ials

: Phy

sics

, Fa

bric

atio

n an

d Ap

plic

atio

ns

Min

kyun

g Ki

m e

t al.

Wed

-C5-

c9

Dopa

nt Im

agin

g of

Pow

er

Sem

icon

duct

or D

evic

e Cr

oss S

ectio

ns

U. G

ysin

et a

l.

Wed

-D4-

c1

Prep

arat

ion

of h

ighl

y po

rous

PLG

A m

icro

part

icle

s usi

ng d

ropl

et fi

ssio

n an

d ge

latin

por

ogen

Ch

ul M

in K

im e

t al.

1345

W

ed-A

1-c2

Fa

bric

atio

n of

hig

h-as

pect

-rat

io

pola

rizer

s with

Dis

plac

emen

t Tal

bot

Lith

ogra

phy

Chris

tian

Dais

et a

l.

Wed

-C5-

c10

Expe

rimen

tal s

yste

m c

ombi

ned

with

a

mic

rom

achi

ne a

nd d

oubl

e-til

t TEM

ho

lder

Ta

kaak

i Sat

o et

al.

Wed

-D4-

c2

SU-8

mic

ro-p

illar

s sus

pend

ed o

n Si

3N4

mem

bran

es: a

supe

rhyd

roph

o- b

ic c

hip

for i

n-si

tu X

-ray

diff

ract

ion

stud

ies o

n bi

o-so

ft m

atte

r A.

Acca

rdo

et a

l. 14

00

Wed

-A1-

c3

Thro

ugh-

Waf

er P

hoto

litho

grap

hic

Expo

sure

for C

ontr

ol o

f Res

ist S

idew

all

Prof

ile

L. W

ang

et a

l.

Wav

elen

gth

Sele

ctiv

e M

etam

ater

ial

Abso

rber

for T

herm

al D

etec

tors

A.

Sho

shi e

t al.

Wed

-C5-

c11

Mic

rofa

bric

atio

n of

an

inte

grat

ed

phot

ocon

duct

ive

switc

h an

d U

ltraf

ast

Beam

Bla

nker

Ge

rwar

d W

eppe

lman

et a

l.

Wed

-D4-

c3

Activ

e po

rous

val

ves f

or d

ropl

et fl

ow

man

ipul

atio

n in

ope

n ch

anne

l flu

idic

s N

. Vou

rdas

et a

l.