Text Book: Silicon VLSI Technology Fundamentals Practice …zyang/Teaching/20182019SpringECE541/... · 2015. 2. 11. · Evolution of IC FabricationEvolution of IC Fabrication •
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Introduction - Chapter 1
Text Book:Silicon VLSI Technology
Fundamentals Practice andFundamentals, Practice and Modeling
Authors: J D Plummer M D DealAuthors: J. D. Plummer, M. D. Deal, and P. B. Griffin
SILICON VLSI TECHNOLOGYFundamentals, Practice and ModelingBy Plummer, Deal & Griffin
• This course is basically about silicon chip fabrication• This course is basically about silicon chip fabrication, the technologies used to manufacture ICs.
• We will place a special emphasis on computer simulation tools to help understand these processes and as design toolsand as design tools.
• These simulation tools are more sophisticated inThese simulation tools are more sophisticated in some technology areas than in others, but in all areas they have made tremendous progress in recent
SILICON VLSI TECHNOLOGYFundamentals, Practice and ModelingBy Plummer, Deal & Griffin
• Decreasing: feature size (line widths line spacing• Decreasing: feature size (line widths, line spacing, layer depth, layer-to-layer tolerances), power per active component, operating voltage
• Increasing: chip size, wafer size, circuit density, circuit complexity speed and reliabilitycircuit complexity, speed, and reliability
• Economics: virtuous economic and developmentEconomics: virtuous economic and development cycle
SILICON VLSI TECHNOLOGYFundamentals, Practice and ModelingBy Plummer, Deal & Griffin
Min Supply Voltage (volts) 1.8-2.5 1.5-1.8 1.2-1.5 0.9-1.2 0.8-1.1 0.7-1-0 06-0.9 0.5-0.8 0.5-0.7 Min Supply Voltage (volts) 1.8 2.5 1.5 1.8 1.2 1.5 0.9 1.2 0.8 1.1 0.7 1 0 06 0.9 0.5 0.8 0.5 0.7
ITRS at http://public.itrs.net/ (2003 version + 2004 update) – on class website.• Assumes CMOS technology dominates over entire roadmap.gy p• 2 year cycle moving to 3 years (scaling + innovation now required).
• 1990 IBM demo of Å scale “lithography”.• Technology appears to be capable of making structures much smaller than
SILICON VLSI TECHNOLOGYFundamentals, Practice and ModelingBy Plummer, Deal & Griffin
Advantages and Challenges Associated with the Introduction of 450mm Wafers :A position paper report submitted by the ITRS Starting Materials Sub-TWG, June 2005.
SILICON VLSI TECHNOLOGYFundamentals, Practice and ModelingBy Plummer, Deal & Griffin
Moore’s LawOn April 19, 1965 Electronics Magazine published a paper by Gordon Moore in which he made a prediction about the
i d i d h h b h ff f l dsemiconductor industry that has become the stuff of legend.
“The number of transistors incorporated in a chipwill approximately double every 24 months.”pp y y
Known as Moore's Law, his prediction has enabled widespread proliferation of technology worldwide, and today h b h th d f id t h l i l hhas become shorthand for rapid technological change.
SILICON VLSI TECHNOLOGYFundamentals, Practice and ModelingBy Plummer, Deal & Griffin
VD(V)nanotube devices, all use basic silicon technology for fabrication.
Introduction - Chapter 1
Summary of Key Ideas• ICs are widely regarded as one of the key components of the information age.
• Basic inventions between 1945 and 1970 laid the foundation for today's silicon industry.
• For more than 40 years, "Moore's Law" (a doubling of chip complexity every 2-3 years) has held true.
• CMOS has become the dominant circuit technology because of its low DC• CMOS has become the dominant circuit technology because of its low DC power consumption, high performance and flexible design options. Future projections suggest these trends will continue at least 15 more years.
• Silicon technology has become a basic “toolset” for many areas of science andengineering.
• Computer simulation tools have been widely used for device, circuit and system Computer simulation tools have been widely used for device, circuit and system design for many years. CAD tools are now being used for technology design.
• Chapter 1 also contains some review information on semiconductor materials i d t d i Th t i ill b f l i l t h t f th t t
SILICON VLSI TECHNOLOGYFundamentals, Practice and ModelingBy Plummer, Deal & Griffin