Terrestrial short wavelength metrology for solar science. Focus of research: EUV sources & metrology Industrially relevant EUV applications Reflectometry Nanostructuring Imaging. Reflectometer. High power EUVL source. High brightness metrology source. Laboratory exposure tool. - PowerPoint PPT Presentation
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Terrestrial short wavelength metrology for solar science Focus of research:
1) EUV sources & metrology
2) Industrially relevant EUV applications
Reflectometry
Nanostructuring
Imaging
Stefan HerbertScientific Detector Workshop 20139th October 2013, Florence, Italy