Technical Digest of the 16th International Vacuum Microelectronics Conference July 7-11,2003 IVMC 2003 Senri Life Science Center Toyonaka, Osaka, Japan Editors Mikio Takai Yasuhito Gotoh Junzo Ishikawa LECTRON VICES IETY* UB/TIB Hannover 89 124 968 104
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Technical Digest of the16th International
Vacuum Microelectronics Conference
July 7-11,2003
IVMC 2003
Senri Life Science CenterToyonaka, Osaka, Japan
EditorsMikio Takai
Yasuhito GotohJunzo Ishikawa
LECTRON
VICES
IETY*
UB/TIB Hannover 89124 968 104
Table of Contents
Session 1: Fundamentals of Field EmissionII-1 Ab Initio Study of Field Emission from Atomic-Scale Surfaces
K. Watanabe, S. Watanabe, M. Araidani, and Y. Gohda 1
01-1 Theories of Low-Macroscopic-Field Electron EmissionRichard G. Forbes 3
Ol -2 Emission Characteristics of NbC/Nb Field EmittersFrancis Charbonnier, Larry Southall, and William A. Mackie 5
01-3 Local Work Function of Transition Metal Nitrides and Carbides Measuredby Kelvin Probe Microscopy
04-5 Lifetime Improvement of Si Field Emitter Arrays by HfC CoatingM. Nagao, T. Sato, D. Nicolaescu, T. Matsukawa, S. Kanemaru,andJ.Itoh 33
04-6 Measurement of Field Emission Characteristics from Transition MetalNitride and Carbide Thin Films
Y. Gotoh, M. Y. Liao, H. Tsuji, and J. Ishikawa 35
04-7 Organic TFT Controlled Organic Field EmitterIoannisKymissisandAkintundel. Akinwande 37
Session 5: Field Emission Display and Related Technology II15-1 Large Scale Under-Gate CNT Cathode for HD-TV Applications
Chun Gyoo Lee, Byung Gon Lee, Sung Yeon Hwang, Sang Jo Lee,Sang Jin Lee, Jung Woo Kim, Tae 111 Yoon, Eung Joon Chi,Sung Hee Cho, Ho Su Han, Sung Hwan Jin, Sang Hyuck Ann,Kyung Sun Ryu, Hyoung Cheol Seo, Yong Wan Jin, Jae Eun Jung,Jong Sik Choi, Tae Sik Oh, Sung Kee Kang, and Jong Min Kim 39
O5-1 Large Screen CNT Composites Cathode for FEDShi YongSheng and Chang-Chun Zhu 41
O5-2 Double Gates Structure Carbon Nonotube Field Emission DisplayQilong Wang, Wei Lei, Baoping Wang, Xiaobing Zhang,XuedongZhou, and Min Liu 43
05-3 New Driving Method for Triode CNT-FEDChun-Tao Lee, Yung-Chiang Lan, Bing-Yue Tsui, andCheng-Chung Lee 45
15-2 Carbon Nanotube Emitters for Field Emission DisplaysSashiro Uemura, Junko Yotani, Takeshi Nagasako, Hiroyuki Kurachi,Hiromu Yamada, Tomotaka Ezaki, Tsuyoshi Maesoba,Takehiro Nakao, Masaaki Ito, Yahachi Saito, and Motoo Yumura 47
O5-4 Fabrication of CNT-FED Panel Using Polymer InsulatorKunihiko Nishimura, Zhiying Shen, Masahiro Fujikawa,Akihiko Hosono, Noritsuna Hashimoto, Satoru Kawamoto,Shoyu Watanabe, and ShuheiNakata 49
05-5 Low Temperature Carbon Nanotubes for Field Emission DisplaySimon Kang, Craig Bae, William Son, M. H. Kim, Jonathan Yi,Aaron Chang, J. J. Kim, and C. R. Lee 51
O5-6 Luminescent Properties of SrGa2S4:Sm Thin Film Phosphors underLow Voltage Excitation
O7-2 Design of A CMOS-Compatible Field-Emission Magnetic Sensor withAdjustable Sensitivity
D. M. Garner, P. J. French, G. Hui, and A. Fung 71
17-2 Carbon Nanotubes/Nanofibers for Microwave Amplifiers and Parallele-Beam Lithography
P. Vincent, L. Gangloff, E. Minoux, G. Pirio, J. P. Schnell, D. Pribat,P. Legagneux, K. B. K. Teo, R. Lacerda, M. Chhowalla, D. G. Hasko,H. Ahmen, G. A. J. Amaratunga, O. Greening, V. Semet, V. T. Binh,W. H. Bruenger, J. Eichholz, H. Hanssen, D. Friedrich, M. Castignolles,and A. Loiseau 73
XI
O7-3 Nanostructural Field Emission Triodes as Active Componentsfor A Microwave Amplifier
N. I. TatarenkoandA.Yu.Vorobyev 75
07-4 Smith-Purcell Radiation at Optical Wavelength Using A Field-EmitterArray
K.Yokoo, H. Mimura, H. Shimawaki, A. Hosono, andH. Ishizuka 77
07-5 Integration of Field Emitters into Scanning Probe Microscopy SensorsUsing Focused Ion and Electron Beams
C. Lehrer, L. Frey, M. Schafer, Th. Sulzbach, S. Petersen, andH.Ryssel 79
17-3 Why Photomultiplier Tube?TeruoHiruma 81
07-6 Optimisation of Silicon FED Fabrication for Space ApplicationL. Wang, R. Stevens, S. E. Huq, I. Loader, B. J. Kent, K. L. Aplin,andJ. C.She 83
07-7 The Field Emitter Array for Neutralization of Positive Ion Charge in IonImplantation System,
T. Ikejiri, S. Sakai, S. Umisedo, K. Naito, N. Nagai, M. Nagao,S. Kanemaru, J. Ishikawa,Y. Gotoh, andH. Tsuji 85
07-8 Electrical Properties of Carbon Nanotube upon Adsorption ofSulfur-Containing Molecules
Seungkwang Roh, Jihoon Oh, Changsoo Lee, Jongmin Kim, andWhikunYi 87
Poster Session IP1 -01 More About the Extraction of Emission Area from Fowler-Nordheim
PlotsRichard G.Forbes 89
Pl-02 Comparison Field Emission Cathodes Characteristics Utilizing WorkingArea And Field Enhancement Factor Parameters
K. N. Nikolski, A. S. Baturin, V. S. Bormashov, R. G. Tchesov,A. I. Trufanov, E. P. Sheshin, V. B. Sharov 91
Pl-03 Characterization of Enhanced Field Emission from HfC-CoatedSi Emitter Arrays through Parameter Extraction
D. Nicolaescu, T. Sato, M. Nagao, V. Filip, S. Kanemaru, J. Itoh 93
PI-04 Prediction of Field-Emission Array Drive Characteristicsfrom Single-Tip I-V Data
Donald E. Patterson, Byron G. Zollars and Michael G. Durrett 95
PI-05 Aanlytical Model for Electron Field Emission from Capped CarbonNanotubes
V. Filip, D. Nicolaescu, M. Tanemura, and F. Okuyama 97
PI-06 Energy Distribution of Field-Emitted Electrons from Carbon NanotubesShi-Dong Liang and N.S.Xu 99
P1 -07 Study of Electric Field Distribution of Aligned Carbon-NanotubeBundle Arrays
J. B. Liu, S. Z. Deng, N. S. Xu, Jun Chen, and Y. L. Ke 101
— xii —
PI-08 Simulation on the Coherent Interference Behavior ofField Emission Electrons from Individual Carbon Nanotube,
P. Wu, S. Z. Deng, Jun Chen, X. F. Wang, and N. S. Xu 103
Pl-09 Field Emission Interference Fringes of A Carbon Nanotube Lying onSubstrate
P. Wu, S. Z. Deng, Jun Chen, J. C. She, and N. S. Xu 105
Pl-10 Finite Transverse Coherent Length of Electron Source Evaluatedby Interference Fringes with A Natural Bi-Prism,
Atsushi Yajima, Wataru Kobayashi, T. Ichimura, B. Cho, andC.Oshima 107
Pl-11 Field Electron Emission from High-Tc SuperconductorsI. Takano, T. Yamashita, Y. Mogami, T. Moriyama, Y. Mashita,andC.Oshima 109
PI-12 Incorporation of A Tungsten Pedestal Structure into the NanotriodeDevice
A. M. Blackburn, D. G. Hasko, D. A. Williams, and H. Ahmed 111
Pl-13 Effect of In Situ Cs Treatment on The Field Emission Characteristics ofAmorphous Diamond Films
W. G. Xie, J. Chen, S. Z. Deng, and N. S. Xu 113
PI-14 Observation of Low Energy Electron Diffraction Image and Work Functionof ZrO/W( 100) Surface
Nobuo Miyamoto, Hiroshi Adachi, and Hideaki Nakane 115
P1 -15 Remarkably Low Value of Work Function on W( 100) Producedby Y-0 Composite Layer
T. Kawakubo, Y. Saito, N. Miyamoto, H. Nakane, and H. Adachi 117
PI-16 Electrons Resonant Tunnelling between A Metal Tip and UltrathinSilicon Oxide on Si (111)
K.Xue,J.B.Xu,J. An, and J.Chen 119
PI-17 Theoretical Analysis of Enhanced Field Electron Emissionfrom the Triple Junction
M. S. Chung, P. H. Cutler, and N. M. Miskovsky 121
PI-18 (withdrawn)
PI-19 Individual Emission Images and Energy Distribution of An N-type SiField Emitter Array
Y. Suzuki, Y. Imai, H. Shimawaki, H. Mimura, K. Yokoo, T. Minami,Y.Yamane, andH. Adachi 123
PI-20 Electric Field Effect on The Density of States of Open Single-WalledCarbon Nanotubes
N. Y. Huang, X. F. Wang, S. D. Liang, and N. S. Xu 125
PI-21 A Simplified Model for Field Emission through Open Carbon NanotubesX. F. Wang, F. Guan, Z. B. Li, and N. S. Xu 127
PI-22 Current-Voltage Equations under the Influence of Space Chargefor a Plane Paralle Vacuum Microelectronics Diode
B. X. Chen, G. Y. Liu, S. H. Xia, Y. G. Ding, J. F. Xu, J. S. Wu,J.Y.Wang, and Y.J.Lu 129
PI-23 Steady States of A Field-Emission-Limited Diode: Space-Charge EffectsMing Chieh Lin, Hao-Ming Chung, and Der-San Chuu 131
X111
PI-24 Simulations of Emission Characteristics of A Gated Single CarbonNanotube Field Emitter
Y. Hu, and C. H. Huang 133
Pl-25 Modelling of Emitted Current Distribution and Electron Trajectoriesin The Thin-Film Field-Emission Triode
D. M. Garner and P. J. French 135
Pl-26 Simulation Study of Carbon Nanotubes Field Emission Display withTriode Structure
Chun-Tao Lee, Yung-Chiang Lan, Yuan Hu, Cheng-Chung Le,Bing-Yue Tsui, and Tsang-Lang Lin 137
PI-27 Field Emission from Novel Room Temperture Grown MultilayeredNanocarbon Field Emitters
B. S. Satyanarayana, C. Kimura, H. Furuta, and S. Shibagaki 139
PI-28 Synthesis of Very Dense Carbon Nanotube Bundles Using Silica SupportedMetal Catalyst
Jong Hyuk Yim, Seungho Choi, Soonil Lee, and Ken Ha Koh 141
PI-29 Fabricate CNT Cathode by A Paste Without FritXue Dong Zhou, Lei Wei, Qi Long Wang, and Jun Tao Li 143
PI-30 Low Temperature Growth of Carbon Nanotube Emitters on SiliconSubstrates and ITO Glass
S. P. Chen, C. C. Chuang, K. W. Cheng, T. W. Huang, J. H. Huang,C. S.Hsiao,andJ.C.Kuo 145
PI-31 Carbon Nanotube Growth from Cu-Co Alloys for Field EmissionApplications
W. Hofmeister, W. P. Kang,Y. M. Wong, and J. L. Davidson 147
PI-32 Carbon-Nanotube Based Paste for Field Emission Display ApplicationH. Ren, S. Z. Deng, Jun Chen, and N. S. Xu 149
Pl-33 Manufacture of The Field Emission Emitters Using GEMMao-Ying Teng, Mao-HuaTeng, Kuo-Shung Liu, I-NanLin 151
PI-34 Micro and Nano Scale Electron Field Emission Properties of TransitionMetal-Fullerence Compound Ti@C6o Film
J. Chen, K. Xue, J. An, N. Ke, and B. Xua 153
PI-35 Electron Emission of Carbon NanonetsWang Weibiao, Xia Yuxeue, and Zhang Chuanping 155
PI-36 Synthesis and Field Emission Testing of Carbon Nanoflake EdgeEmitters
Jianjun Wang, Mingyao Zhu, Xin Zhao, Ron A. Outlaw,Denis Manos, Brian C. Holloway, and Victor P. Mammana 157
PI-37 Formation of Graphite Nanocones Using Metal Nanoparticlesas Plasma Etching Masks
Hyungjoon Park, Soonil Lee, and Ken Ha Koh 159
Pl-38 Experimental Studies on Field Emission characteristic of GraphiteNano-tips Arrays
K. Zhao, J. C. She, S. Z. Deng, Jun Chen, and N. S. Xu 161
P1 -39 Field Emission of Graphite Nano-Crystalline FilmWeibiao Wang, HongyanPeng, and Chuanping Zhang 163
— xiv —
PI-40 Fabrication of Low Gate Current Triode Field Emitters with PlanarCarbon Nanoparticle Cathodes
Woo Jong Seo, Seungho Choi, Soonil Lee, and Ken Ha Koh 165
Pl-41 Double-Gate Field Emitters with Planar Carbon-Nanoparticle Cathodes:Simulation Studies
Sungil Bae, Woo Jong Seo, Seungho Choi, Soonil Lee, and Ken Ha Koh 167
PI-42 Quadrupole-Mass-Spectroscopy Studies on Hot Filament Chemical VaporDeposition of Carbon Films with Nano-Sized Constituents
Seungho Choi, Soonil Lee, and Ken Ha Koh 169
PI-43 Low Field Electron Emission from Nanocluster Carbon Films GrownUsing A Pulsed Trigger Less Cathodic Arc Process
B. S. Satyanarayana 171
PI-44 Field Emission from Tetrahedral Amorphous Carbon Films GrownUsing A Trigger Less Pulsed Cathodic Arc Process
B. S. Satyanarayana, O. S. Panwar, and Alim Khan 173
PI-45 Field Emission from A Polymeric Precursor to Diamond-like Carbon (DLC)H. Busta, C. Partee, S. Joray, T. Lang, E. Edwards, and A. Feinerman 175
PI-46 (withdrawn)
PI-47 A Silicon Gated Field Edge CathodeN. A. Djuzhev, S. N. Beliaev, V. A. Vlasenko, A. A. Gogin,V. M. Gontar, V. V. Deniskin, A. A. Mazaev, A. B. Nevsky,Y. I. Tishin, and A. N. Shokin 177
PI-48 (withdrawn)
PI-49 From SOI Wafer to Micro Electron Field Emission Device with FocusLenses
Pl-53 MOLD Type Multifunctional FEA/SNOM DeviceJan Dzuiuban, Anna Gorecka-Drzazga, and Sylwester Bargiel 187
Pl-54 Effect of Temperature on Field Emission Properties from Nanoclustersof Tungsten Oxide on Silicon Carbide
S. Z. Deng, H. T. Xu, X. G. Zhen, Jun Zhou, Jun Chen, and N. S. Xu 189
PI-55 (withdrawn)
Pl-56 Field Emission from SiOx Films Deposited on Si and GaAs Tip ArraysA. A. Evtukh, V. G. Litovchenko, Yu. M. Litvin, H. Hartngagel,andO.Yilmazoglu 191
Pl-57 Electron Emission from Carbon Nanotube Films under Pulsed FieldsT. T. Zhou, S. Z. Deng, Y. Q. Zhang, J. Chen, and N. S. Xu 193
Pl-58 Low Voltage Operation of Cold Field Emitters at Elevated PressuresV. N. Tondare, C. W Hagen, and P. Kruit 195
Pl-59 The Growth of Aligned CU2S Nanowire Arrays with AAO Templateby Gas-Solid Reaction
Q. B. Wu, S. Ren, S. Z. Deng, Jun Chen, and N. S. Xu 197
PI-60 Development of an Electron Optical instrument for Evaluation ofMulti Emitters - Outline of the Instrument -
H. Shimoyama, H. Murata, T. Kimura, T. Matsui, A. Mogami,Y. Sakai, M. Kudo, M. Kato, K. Betsui, and K. Inoue 199
PI-61 Development of an Electron Optical Instrument for Evaluation ofMulti Emitters - Simultaneous Observation of LEEM and FEEM Imagesas Well as PEEM and FEEM Images -
H. Murata, H. Shimoyama, T. Kimura, T. Matsui, A. Mogami,Y. Sakai, M. Kudo, M. Kato, K. Betsui, and K. Inoue 201
Film and A Metal in An Applied VoltageL.G.irchenkoandV.V.Il'chenko 203
P2-02 Theoretical Investigation of Current-Voltage Characteristicsbetween Closely Spaced Metals
L. G. Il'chenko, V. V. Il'chenko, and R. M. Novosad 205
P2-03 The Effect of Bias Voltage on The Measurement of Local Barrier heightMichikoYoshitakeandShinjiroYagyu 207
P2-04 Distinguishing The Dependence of The Apparent Local Barrier Heighton Measurement Conditions
ShinjiroYagyuandMichikoYoshitake 209
P2-05 (withdrawn)
P2-06 Visualization of The Temperature Distribution of Carbon NanotubeField Emitters Using Thermochromic Liquid Crystal Sheets
E. Edwards, H. Busta, and A. Feinerman 211
P2-07 (withdrawn)
P2-08 (withdrawn)
P2-09 Field Emission from Alligned Carbon Nanotubes Grown on PatternedOxide Layers
B. S. Satyanarayana, B. Q. Wei, Y. Jung, G. Ramanath, andP.M.Ajayan 213
P2-10 Field Emission from Graphite Platelet Nanofibers (GPNs)X. Chen, R. Ruoff, H. Busta, E. Edwards, and A. Feinerman 215
P2-11 Efficient Electron Emissions from Printed CNTs by Surface TreatmentsKwang-Bok Kim, Yoon-Ho Song, Chi-Sun Whang, Chung-Hui Chung,Jin-Ho Lee, In-Su Choi, and Jae-Hong Park 217
P2-12 Fabrication of Carbon Nanotubes Array and Its Field Emission PropertyHideaki Sato, Hitoshi Takegawa, Yahachi Saito, Hiroki Yamaji,Hideto Miyake, and Kazumasa Hiramatsu 219
P2-13 Field - Emission Characteristics from Carbon Nanotube Field EmitterArrays (CNT FEAs) Grown on Silicon Emitters
P2-14 Relationship between Field Emission Property and Composition ofCarbon Nanotube Paste for Large Area Cold Cathode
Jong Hyung Choi, Sung Kee Kang, Jae-Hee Han, Ji-Beom Yoo,Chong-Yun Park, Joong-Woo Nam, andJ. M. Kim 223
P2-15 Enhanced Electron Emission from Carbon Nanotube Paste after FiringJoong-Woo Nam, Jong Hyung Choi, Jae-Hee Han, Ji-Beom Yoo,Chong-Yun Park, Sung Kee Kang, J. E. Jung, and J. M. Kim 225
P2-16 Field Emission Characteristic of Carbon Nanotube Grown fromScreen-printed Organic Paste with Co2+
P2-17 Experimental Observation of Ultra-High Field Emission Currentfrom Single Carbon Nanotube Emitter
J. C. She, N. S. Xu, S. Z. Deng, Jun Chen, H. Bishop, S. E. Huq,and L.Wang 229
P2-18 (withdrawn)
P2-19 Comparison of Field Electron Emission from Carbon Nanotube FilmsProduced by Different Techniques
A. V. Karabutov, V. I. Konov, E. D. Obraztsova, V. V. Pereverzev,S. M. Pimenov, A. S. Pozharov, S. V. Terekhov, P. Ya. Detkov,E. V. Shorokhov, and E. N. Loubnin 231
P2-20 Field Emission From A Single Carbon NanocoilShinya Sugimoto, Phan Ngoc Minh, Takahito Ono, andMasayoshi Esashi 233
P2-21 Fabrication and Characterization of Lateral Field Emission Device Basedon Carbon Nanotubes
C. C. Tsai, C. P. Juan, K. J. Chen, K. H. Chen, L. C. Chen, andH.C.Cheng 235
P2-22 Peculiarities of Field Electron Emission from Nitrogen-DopedUltrananocrystalline Diamond Films
A. V. Karabutov, V. I. Konov, 1.1. Vlasov, S. M. Pimenov,E. N. Loubnin, J. A. Carlisle, D. M. Gruen, and J. Birrell 237
P2-23 Electron Emission from CVD Diamond Film Deposited on Pre-SeededSi Substrate with Large Area and Low Interface State Density
C. Z. Gu, S. L. Yue, andY. Dou 239
P2-24 Electron Emission from Diamond Tube ArraysC. Z. Gu, W. Liu, A. Z. Jin, andY. Dou 241
P2-25 Field Emission Properties of Single Crystal Diamond EmittersY. Nishibayashi, Y. Ando, N. Tatsumi, A. Nanba, andT. Imai 243
P2-26 Field Emission Characteristics of CVD Diamond Thin Films with SnO2as Overlayer
P. M. Koinkar, J. R. Mahajan, P. P. Patil, and M. A. More 245
P2-27 A Schottky Emitter Using Boron-Doped DiamondJoon Hyung Bae, Phan Ngoc Minh, Takahito Ono, andMasayoshiEsashi 247