TCAD, EDA and IP to Support SOI technologiessoiconsortium.eu/wp-content/uploads/2017/08/Silvaco-FDSOI_0922_r5... · FinFET 3D NAND physical etch FD-SOI Transistor Cell Level 3D Structure

TCAD, EDA and IP to Support SOI technologies

Silvaco Overview

• 400+ customers in world wide

•Market Leadership Areas

• # 1 Full FPD Flow

• # 1 Radiation & Reliability

• # 2 Process & Device TCAD

• # 4 Full AMS/Power IC Flow

Leading TCAD, EDA and IP provider

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Expanding Worldwide Footprint

Santa Clara(HQ) Shanghai

offices in world wide12

Texas

BostonUK

Austria

France

India

SingaporeTaiwan

Japan

Korea

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Mergers are a key part of our Growth Strategy

May

2015

Dec

2015

May

2016

May

2016

Power integrity sign-off market

Advanced variation

aware design

Netlistanalysis & reduction

Enter IP market

Strengthen IP market

Aug

2017

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TCAD-to-Signoff

• Silvaco is only one provider

• TCAD

• Spice Modeling

• Custom Design CAD

• Signoff tools

• IP

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TCAD-to-Signoff Design Flow

Layout

Spice

Parasitic extraction

Spice modeling

Process

Device

Measured Data

Schematic

Spice

LVS

DRC

TCAD

Parasitic reduction

Modeling Design & Verification

Reliability Analysis

Variation Analysis

Simulation

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Vertical Solutions to End-User Market Applications

AMBA

JTAG

Wireless charging,

Lidar, drive train

Multiple form factor in-vehicle display

Device aging, EM/IR/Thermal,

soft errors

Rear camera, IR sensors

High sigma sense & control

PowerPC MCU, CAN-FD Flexible display, LAE

High perf servers & memory

ULP digital blocks

ColdfireMCU

USB

Automotive IoTMobile

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TCAD-to-Signoff Vertical Solutions

SOI available

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TCAD

• Process, Device, Stress Simulation

• 3D Rapid Prototyping and 2D/3D Detailed Simulation Capabilities

TCAD For Broad Application Space

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Victory Multi-purpose 3D Process & Device Simulator

• Detailed physical simulation

• User definable models

• Large structures

• Rapid prototyping

FinFET 3D NAND physical etch

FD-SOI Transistor

Cell Level 3D Structure

Ion Beam Etch STT-MRAM

3D NAND Block

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• Local oxidation to form silicon islands

• Shallow implant and RTA diffusion process steps

• Physical etching of silicon islands for accurate edge profiles

• Temperature dependent mobility and recombination models

• Oxide interface and bulk charge

• Impact ionization for breakdown and kink effect

• Physical capacitance extraction

• Quantum effects modeling: Schrodinger Approach and Density Gradient Model

• Self heating. Thermal and electrical effects are coupled through self-consistent calculations

• Coupled device simulation within a circuit in MixedMode

• Single event upset

TCAD include SOI specific features:

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Fully Depleted: Effect of Back Bias

20nm FDSOI by Victory Process

Effect of Back Bias. Reverse Body Bias (RBB) increases Vth but decreases leakage,Forward Body Bias (FBB) increases Leakage but decreases Vth (making the device faster)

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Fully Depleted: Lattice Heating and Quantum Confinement

IV curves simulated by Victory Device showing the impact of Lattice Heating, Quantum Correction and Energy Balance

20nm FDSOI by Victory Process

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Partially Depleted: Kink Effect

IV characteristics for long channel device.

Drain IV curves for long channel (left) and short channel (right) SOI devices. Negative conductance due to self-heating at high Vgs is seen in the short channel device. The kink effect is seen more prominently in the long channel device.

IV characteristics for short channel device.

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SPICE Portfolio

Supported SOI Compact Models in Silvaco Tools

PDSOI FDSOI UTBB-FDSOI

BSIM-SOIv3.0-3.2 and v4.0-4.5

BSIM-IMGv102.0-102.8

HiSIM_SOIv1.0.0-v1.3.0

HiSIM_SOTBv1.0.0-1.1.0

LETI-SOIv3.0-3.2 and v4.0

LETI-UTSOIv2.1

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UTMOST IV - Parameter Extraction & Optimization

90nm FDSOI device characterization using Verilog-A BSIMSOI 4.5 module

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SmartSpice and SmartSpice Pro

SmartSpice (red) vsSmartSpice Pro (blue)

Support negative bias condition to

provide accurate and reliable for SOI

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• Block to full chip level

• Pure SPICE accuracy for Transistor level

• Early (layout only) IR/EM analysis

Power Integrity and Reliability Analysis

InVar Power

InVar IR

InVar EM

InVar Thermal

Concurrent Power-Voltage-Thermal Analysis

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Invar Thermal

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Variation Manager Overview

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• 3 to 7+

• Fewer Monte Carlo samples

• Strong partner to FDSOI leaders for Memory and Std. Cell libraries

• Improved design margining

• Simulator Agnostic• SmartSpice

• HSPICE, CustomSim-XA

• Spectre, Spectre-RF

• Eldo, Eldo-RF, AFS

• MSIM

• SMASH

• Fast Monte Carlo

• Familiar use method

• 10X+ speedup, brute force MC accuracy

• Statistical corners, Local mismatch

Variation Manager for Analog

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FMC

MC

3X 10X

VX validation

Sense Amplifier, FDSOI 28nm:Variation Manager validated on 1M of MC runs

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Q-Q Plot (sigma vs performance)Brute Force MC validation

Red: 1M Monte Carlo

Blue: VX

Extremes

FDX 22nm SRAM Bitcell High Sigma shows results up to 8 sigma

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Q-Q Plot (sigma vs performance) DOE on Yield estimation

VDD (mV)

NBL 0mV

NBL -100mV

NBL -150mV

Netlist Management Products Overview

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• Post layout simulation critical at advanced nodes, but massive impact on simulation time

• Accuracy requirements set by user

• Selective reduction, temperature aware reduction, merge multi-finger devices

Jivaro Advanced Netlist Reduction

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Viso:Design Analysis

Belledonne and Viso LPE flows to save time

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Belledonne:Netlist Comparison

Design Data

LPE Netlist

Custom Design

OA iPDK Schematic/Layout

• Support OpenAccess D/B

• iPDK compatible

• Support tcl callback in PyCell

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Semiconductor IP

Silvaco IP Businesses

• Collaborations with Tier 1 semiconductor companies to unlock valuable IP for licensing to the entire semiconductor industry

IP Commercialization

• Collaborations with specialty IP providers to provide customers differentiated IP solutions

IP Industry Leadership

• Xena is a scalable cloud-based platform for managing IP inside semiconductor and IP companies

IP Management

• IP Fingerprinting and DNA analysis that allows for detection of IP in SoC devicesIP Compliance

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Silvaco IP Line up

CAN

CAD FD

MultiCAN

FlexCAN (FD) - New

FlexRay

TriCore Microcontroller

Multiprocessor Link Interface

MicroSecond Channel

Automotive

Interfaces

USB 1.1 Dev

USB 1.1 Host+Dev

USB 2.0 Dev

USB 2.0 Host+Dev

USB 2.0 PHY

USB 1.1 IO

Debug

IEEE 1149.7 cJTAG

Nexus 5001

Processors

ColdFire V1 Core (32-bit)

ColdFire V1 Platform (32-bit)


ColdFire V2 Platform(s) (32-bit)


ColdFire V4 Platform(s) (32-bit)

Power Architecture e200z0 (32-bit)




CR16 (16-bit)

C166S (16-bit)

M8051EW (8-bit)

HCS08 (8-bit)

AMBA Subsystem

Adv. Audio Interface

I2C

I3C

I2S

USART

GPIO

DMA

Interrupt Controller

SPI

Multi-Function Timer

Multi-Input Wakeup

RAM Controller

Timer & Watchdog

Versatile Timer

Realtime Clock

AHB Backbone

AHB-APB Bridge

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#1 Automotive IP Portfolio

Automotive Grade

Embedded Processors

IEEE Debug Standards

- 1149.7

FlexRay Networking

CAN Interfaces

I3C Sensor

Controllers

MultiLink Interface

MicroSecond Channel

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I3C Products

Dual-Role Master

Protocol Engine

Host Interface

I3C

APB

CDC

Advanced Slave

Protocol Engine

Host Interface

I3C

APB

CDC

Autonomous Slave

Protocol Engine

I3C

Autonomous

Registers

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• ESD and IO Design Experts• Broad Foundry and Process experience

• 1um to 16nm CMOS, SOI, LD-MOS, BCD in Si, GaAs, GaN, SiGe, SoS

• Key Expertise• RF ESD - Low cap, high protection integrated solutions

• Very High Voltage: >10V applications on low voltage 1.8/3.3V CMOS Process

• High Performance SerDes: 28Gb ESD, HDMI (5V Tolerant), LVDS, Ethernet, etc.

• Multi-Voltage GPIO’s, Fail-Safe IO’s, high performance GPIO’s

• Services and Products• Full Standard IO Libraries, Off-the-shelf IP

• ESD Only Design Kits, IO Template Libraries

• Custom ESD and IO Design Solutions

ESD IO and Custom IO

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Ecosystem

Silvaco is very Active in the Industry

Member of Si2 and CMC

Founding Member of Reuse – Semiconductor IP Tradeshow

Member of Global Semiconductor Alliance

Member of Society for Information Display

CDL/TUV Partnership: High Performance TCAD Program

Member of ESDA

SOI Industry Consortium Member

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http://www.cdg.ac.at/

http://www.tuwien.ac.at/

Foundry Partners

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• Silvaco collaborates with leading technology providers to deliver world-class solutions to our customers through the Silvaco Ecosystem Program.

3rd-Party Program

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SURGE Supporting our Customers Around the World

•Provider delivering complete TCAD-to-Signoff solutions for predictive and comprehensive design work before applying Money to Silicon

•New IP division with unique IP Fingerprint tools allow Silvaco to participate in the highest growth area of EDA

•Supporting the industry ecosystem

•Cost Effective partner to the FDSOI community

Summary

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TCAD, EDA and IP to Support SOI technologiessoiconsortium.eu/wp-content/uploads/2017/08/Silvaco-FDSOI_0922_r5... · FinFET 3D NAND physical etch FD-SOI Transistor Cell Level 3D Structure

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