Submillimeter spectroscopic diagnostics in a semiconductor processing plasma Yaser H. Helal , Christopher F. Neese, Jennifer A. Holt, Frank C. De Lucia Department of Physics The Ohio State University Paul R. Ewing, Phillip J. Stout, Michael D. Armacost Applied Materials Sunnyvale, CA June 19, 2013
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Submillimeter spectroscopic diagnostics in a semiconductor processing plasma Yaser H. Helal, Christopher F. Neese, Jennifer A. Holt, Frank C. De Lucia.
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Submillimeter spectroscopic diagnostics in a semiconductor
processing plasmaYaser H. Helal, Christopher F. Neese, Jennifer A. Holt,
Frank C. De LuciaDepartment of Physics
The Ohio State University
Paul R. Ewing, Phillip J. Stout, Michael D. ArmacostApplied MaterialsSunnyvale, CA