Structure and Properties of Si Incorporated Tetrahedral Amorphous Carbon Films Prepared by Hybrid Filtered Vacuum Arc Process Churl Seung Lee a), b) , Kwang –Ryeol Lee a) , Kwang Yong Eun, Ki Hyun Yoon b) a) Thin Film Research Center, Korea Institute of Science and Technology b) Department of Ceramic Engineering, Yonsei University
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Structure and Properties of Si Incorporated Tetrahedral Amorphous Carbon Films Prepared by Hybrid Filtered Vacuum Arc Process Churl Seung Lee a), b), Kwang.
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Structure and Properties of Si IncorporatedTetrahedral Amorphous Carbon Films Prepared
by Hybrid Filtered Vacuum Arc Process
Churl Seung Lee a), b) , Kwang –Ryeol Lee a) , Kwang Yong Eun, Ki Hyun Yoon b)
a) Thin Film Research Center, Korea Institute of Science and Technologyb) Department of Ceramic Engineering, Yonsei University
a-C:H ta-C Diamond
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Introduction ta-C (Tetrahedral Amorphous Carbon)
– Advantages • High ratio of sp3 hybridized carbon bonds• Extreme hardness, smooth surface, thermal stability,
chemical inertness….
Har
dnes
s (G
Pa)
Introduction
ta-C (Tetrahedral Amorphous Carbon)– Disadvantage
• High residual compressive stress → poor adhesion• Many attempts have been reported