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Proceedings of the International Conference on Industrial Engineering and Operations Management Washington DC, USA, September 27-29, 2018
Structural and Ion Beam Analysis of Reactive Magnetron Sputtered Titanium Oxynitride Thin Films
Emmanuel Ajenifuja1, 2, 3*, Abimbola P. I. Popoola1, Olawale Popoola2 1Department of Chemical, Metallurgical and Materials Engineering, Tshwane University of Technology,
Pretoria, South Africa. 2Centre for Energy and Electric Power, Tshwane University of Technology, Pretoria, South Africa.
TiOxNy may combine the advantages of titanium oxides and nitrides in optimal conditions. Due to their physical and chemical versatility, titanium oxynitrides are gaining relevance in numerous applications such as optoelectronics, tribology and catalysis. In this study, titanium oxynitride thin film samples were grown at low sputtering pressure (1.07 Pa) on sodalime glass substrates using 99.99 % purity titanium target with argon working gas, pure nitrogen, background residual oxygen and constant sputtering power of 200 W. While other parameters were fixed at the optimum values, the deposition time was varied from 5 and 25minutes. Rutherford backscattering (RBS) spectrometry was used to determine the stoichiometry and areal density of the films. X-ray diffractometry (XRD) and optical microscopy were used to study the structural and microstructural characteristics of the films. Variations in the elemental concentrations of the films with respect to the N/O ratio were observed based on the thickness and deposition time. Diffraction analysis indicated enhancement in crystallinity of the film with thickness, as shown from the changes in peak intensities at the preferred crystallographic orientation. Stoichiometric results showed transition of the TiNx-Oy thin films from non-metallic oxide (TiOxNy) to metallic nitride (Ti2N) characteristics with increase in N/Ti and N/O ratios.
TiOxNy thin films of thickness ranging from 655.085 to 3103.178 x 1015 atoms/cm2 were sputtered on sodalime glass
substrates at relatively low sputtering in the presence of nitrogen and vacuum residual oxygen as reactive gases. With
ion beam analysis, the film thickness and stoichiometry was determined. The lattice parameters, interplanar spacing
and film crystallinity were observed to change with thickness and sputtering time. Meanwhile, sputtered film images
showed evolution in microstructural properties. For relatively thin samples deposited at 5 and 10 minutes, no distinct
crystallographic peak was detected, however, as the thickness increases, the film exhibited strong reflections
corresponding to (111) planar orientation, which as attributed to hexagonal titanium phase. With consistency in the
observed reflection intensity with film thickness, it indicates that it is the preferred orientation for the phase. It is
shown that sputtering time have a strong influence on the residual oxygen, nitrogen partial pressure and sputtering
mode. Hence, the fixed sputtering pressure and the varied time adopted remarkably favours the films transition from
oxide TiOxNy to metallic Ti2N. With proper sputtering time and pressure control, the vacuum residual oxygen was
utilized in a Ti-N system to prepared TiOxNy thin films with different physical and chemical properties.
Acknowledgements The authors acknowledges the support of the following: The World Academy of Science (TWAS) in collaboration with National Research Foundation (NRF), South Africa., and Center for Energy Research and Development, Obafemi Awolowo University, Ile-Ife, Nigeria. References Adeoye, A. E., Ajenifuja, E., Taleatu, B. A., & Fasasi, Y. A., Rutherford Backscattering
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Biographies Emmanuel Ajenifuja is currently on TWAS-NRF Postdoctoral Research Fellowship in the Department of Chemical, Metallurgical and Materials Engineering, Tshwane University of Technology, Pretoria, South Africa. He is also a Research Fellow in Center for Energy Research and Development, Obafemi Awolowo University, Ile-Ife, Nigeria. He earned his M.Sc. and Ph.D. in Engineering Physics from Obafemi Awolowo University, Ile-Ife, Nigeria. He has published journals and conference papers. Dr. Ajenifuja has worked extensively on thin films material for tribology and optoelectronic applications, and also on natural ceramics for environmental applications. His current research interests is on Co-based superalloys fabrication and nitride oxidation resistant layer for superalloy surface protection. Abimbola Patricia I. Popoola is a Full Professor, and the Leader, Advanced Engineering Materials and Surface Technologies Group in the Department of Chemical, Metallurgical and Materials Engineering, Tshwane University of Technology, Pretoria, South Africa. With a combination of qualifications that encompasses all areas of Metallurgical and Materials Engineering, she holds a National Diploma in Materials Technology, which deals with the study of Metals, Polymers, Ceramics, Glass and Cement Technology. She has a BSC (honours) degree in Metallurgical and Materials Engineering; Master’s and Doctoral degrees in Metallurgical Engineering. She worked on the Quantitative Analysis of Cementitious Materials using Non-destructive Ultrasonic Testing. She completed her Doctoral degree in Physical Metallurgy/Laser Materials Deposition at TUT. Prof Popoola has published a total of 220 peer-reviewed journal papers. Until date, she has made a lot of impact with her publications, which have been acknowledged both locally and internationally, her works has attained high viewership and citations by different authors within the research field /community. Her research collaborations transverse both local and international space. Olawale Popoola is a Senior Lecturer and the Director, Centre for Energy and Electric Power, Faculty of Engineering and the Built Environment Tshwane University of Technology, Pretoria, South Africa. He has published journals and conference papers. Dr Olawale Popoola has published several peer-reviewed journal papers and conference proceedings. He has made a lot of impact with his publications, which have been acknowledged both locally and internationally, and his works has attained high viewership and citations by different authors within the research field. His research collaborations transverse both local and international space. His skills and expertise include the following among others, material characterization, mechanical properties, renewable energy technologies and power electronics.