STEM Diffraction Imaging Model 703.50 The STEM diffraction imaging (DI) module, model 703.50, combines the information rich nature of electron diffraction with the spatially resolved power of spectrum imaging (SI), enabling diffraction patterns to be acquired pixel-by-pixel as a 4D dataset. In direct analogy with elemental mapping from spectrum images, any feature that can be measured from a diffraction pattern (e.g., lattice parameter, strain, and composition) can, in principle, be mapped interactively from the acquired diffraction image data set. These and other possibilities make diffraction imaging a formidable technique for advanced material characterization. The STEM diffraction imaging software is an extension to our industry standard STEM SI suite, providing the ability to acquire, explore and analyze spatially resolved diffraction patterns in a fast and fully automated manner. A diffraction image is similar to a spectrum image, but with a diffraction pattern stored at each pixel location instead of a spectrum. Data acquisition in STEM DI is performed via the same interface as a regular STEM SI, and can be performed simultaneously with compatible signals (e.g., energy dispersive x-ray spectroscopy (EDS)). Once acquired, the diffraction image can be viewed and manipulated both online and offline within the DigitalMicrograph ® (DM) environment using the 4D viewer. This viewer provides a wide range of 4D visualization tools enabling intuitive visualization and mapping of diffraction pattern features in real-time. Hence regular bright field (BF), dark field (DF), annular dark field (ADF), and high angle ADF (HAADF) images can be mapped interactively post acquisition, allowing information for advanced materials characterization to be extracted from the complicated 4D data space in a fast and intuitive manner. Benefits • Fast, fully automated data acquisition • Easy to use interface • Simultaneous capture of compatible signals (e.g., EDS, SE) • Robust spatial drift correction • Intuitive, interactive 4D visualization tools • Real-time bright field, dark field, annular dark field, and high angle ADF mapping • Compatible with all Gatan CCD cameras, including GIF ® camera Applications • Material science Figure 1. Images clockwise, starting top left: A diffraction image example taken from a semiconductor gate device. Using an ADF survey image (left), an energy-filtered diffraction image was acquired from the region marked in green (shown inset) using a GIF Tridiem ® system. A convergent beam electron diffraction (CBED) diffraction pattern, extracted from point marked in red is shown in the center image. Using the interactive 4D viewer tools it is possible to generate an image from any feature or angular range in the diffraction space in real-time. Shown is a RGB composite image (right) computed in this way comprising of a BF image (red), an ADF image (green, 60 – 65 mrad), and a HAADF image (blue, 120 – 130 mrad). ADF Survey
Welcome message from author
This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Transcript
STEM Diffraction ImagingModel 703.50
The STEM diffraction imaging (DI) module, model 703.50, combines the information rich nature of electron diffraction with the spatially resolved power of spectrum imaging (SI), enabling diffraction patterns to be acquired pixel-by-pixel as a 4D dataset. In direct analogy with elemental mapping from spectrum images, any feature that can be measured from a diffraction pattern (e.g., lattice parameter, strain, and composition) can, in principle, be mapped interactively from the acquired diffraction image data set. These and other possibilities make diffraction imaging a formidable technique for advanced material characterization.
The STEM diffraction imaging software is an extension to our industry standard STEM SI suite, providing the ability to acquire, explore and analyze spatially resolved diffraction patterns in a fast and fully automated manner. A diffraction image is similar to a spectrum image, but with a diffraction pattern stored at each pixel location instead of a spectrum. Data acquisition in STEM DI is performed via the same interface as a regular STEM SI, and can be performed simultaneously with compatible signals (e.g., energy dispersive x-ray spectroscopy (EDS)).
Once acquired, the diffraction image can be viewed and manipulated both online and offline within the DigitalMicrograph®
(DM) environment using the 4D viewer. This viewer provides a wide range of 4D visualization tools enabling intuitive visualization and mapping of diffraction pattern features in real-time. Hence regular bright field (BF), dark field (DF), annular dark field (ADF), and high angle ADF (HAADF) images can be mapped interactively post acquisition, allowing information for advanced materials characterization to be extracted from the complicated 4D data space in a fast and intuitive manner.
Benefits
• Fast, fully automated data acquisition
• Easy to use interface
• Simultaneous capture of compatible signals (e.g., EDS, SE)
• Robust spatial drift correction
• Intuitive, interactive 4D visualization tools
• Real-time bright field, dark field, annular dark field, and high angle ADF mapping
• Compatible with all Gatan CCD cameras, including GIF® camera
Applications
• Material science
Figure 1. Images clockwise, starting top left: A diffraction image example taken from a semiconductor gate device. Using an ADF survey image (left), an energy-filtered diffraction image was acquired from the region marked in
green (shown inset) using a GIF Tridiem® system. A convergent beam electron diffraction (CBED) diffraction pattern, extracted from point marked in red is shown in the center image. Using the interactive 4D viewer tools it is possible to generate an image from any feature or angular range in the diffraction space in real-time. Shown is a RGB composite image (right) computed in this way comprising of a BF image (red), an ADF image (green, 60 – 65 mrad), and a HAADF image (blue, 120 – 130 mrad).
ADF Survey
STEM Diffraction Imaging, Model 703.50
www.gatan.com© 2015 Gatan, Inc. All rights reserved. Gatan, Gatan Logo and all other trademarks are property of Gatan, Inc.unless otherwise specified.
DS-STEM-DI-703.50-FL4-CA-Jan16
Requirements
Product Systemrequirements
Suggestedconfiguration
STEM diffraction
imaging
DigitalMicrograph software
Gatan CCD camera(including GIF camera)
DigiScan™ I or II equipped with an annular DF detector1
2 GB RAM or greater
4D viewer DigitalMicrograph software
2 GB RAM or greater
1 Supported DigiScan compatible detectors include the model 805 BF/DF STEM detector and the model 806 HAADF detector. Note: Detector must be in an appropriate position for use while CCD camera is inserted. Also, spatial drift correction is only supported for GIF cameras.
Specifications are subject to change.
Ordering
Model Description
703.50 STEM diffraction imaging software (includes 4D viewer software and DIFPACK)
703.00P Spectrum imaging base package (if not already present at customer site)
The offline 4D visualization components can be ordered as:
703.60 4D viewer software
703.00P01C Spectrum imaging base offline (if not already present on the system)
Figure 2. Screenshot of STEM DI acquisition in progress. Spatial drift correction is enabled, and the ADF signal is being acquired simultaneously.
Related Documents
