© 2013 Copyrights © Yole Développement SARL. All rights reserved. Status of the MEMS Industry 2013
Jan 15, 2015
© 2013
Copyrights © Yole Développement SARL. All rights reserved.
Status of the MEMS Industry 2013
© 2013• 2Copyrights © Yole Développement SARL. All rights reserved.
Content of the Report• About the authors … 4
• Glossary … 5
• Companies listed in the report … 6
• Key report features … 7
• What we saw, what we missed in 2012 edition … 8
• Who should be interested … 9
• Methodology & definitions … 10
• Executive Summary … 13
• MEMS Market update 2012-2018 … 48
• MEMS Players ranking … 57
• TOP 30 by Device Type … 68
• Automotive … 87
– MEMS markets in units/$M … 88
– Comments by device … 90
– Inertial … 98
– Pressure … 113
– Microphones … 124
– Infrared sensors … 127
• Consumer … 134
– MEMS markets in units/$M … 135
– Comments by device … 137
– Pressure … 147
– Microphones … 154
– Inertial … 161
– RF MEMS … 166
– Optical MEMS … 172
– IJHeads … 179
• Defense / Aeronautics … 183
– MEMS markets in units/$M … 184
– Comments by device … 186
– Pressure … 192
– Inertial … 197
– Infrared sensors … 207
– RF MEMS … 215
• Medical … 220
– MEMS markets in units/$M … 221
– Comments by device … 223
– Pressure … 233
– Microphones … 240
– Accelerometers … 244
– Gyros … 250
– Microfluidics … 254
– Infrared sensors … 263
– Micro dispensers … 267
– Flow meters … 277
– Emerging MEMS … 287
– Other MEMS … 292
• Industrial / telecom … 302
– MEMS markets in units/$M … 303
– Comments by device … 305
– Pressure … 310
– Inertial MEMS … 312
– Infrared sensors … 313
– Others MEMS for industry … 314
– Optical MEMS for telecommunications … 315
© 2013• 3Copyrights © Yole Développement SARL. All rights reserved.
Content of the Report
• MEMS Finance Analysis … 317
• ASIC MEMS … 331
• MEMS Manufacturing changes … 364
• Conclusions … 385
• Appendices … 387
• Forecast changes 2012/2011 … 388
– IJH … 389
– Pressure … 392
– Microphones … 396
– Consumer inertial … 399
– High performance inertial … 403
– RF MEMS & Oscillators … 407
– IR sensors & microbolometers … 411
– Optical MEMS … 418
– Micro displays … 420
– Auto Focus … 422
– Optical MEMS for fiberoptics … 425
– Pico projection … 428
– Microfluidics … 430
• Yole Développement presentation … 434
© 2013• 4Copyrights © Yole Développement SARL. All rights reserved.
Key Report Features
• The objectives of this report is to provide:
– Understanding of the MEMS markets & players dynamics.
– Market data on MEMS in units & $M for 2012-2018.
– MEMS Applications overview (automobile, consumer, defense &
aeronautics, medical, industry & telecommunications)
– ASIC MEMS analysis
– A&M analysis
– The challenges for MEMS manufacturing
© 2013• 5Copyrights © Yole Développement SARL. All rights reserved.
2004-2012: 8 years of MEMS history!• Since 2004 (year of our first « Status of the MEMS Industry » report, we anticipate many MEMS events:
– In 2005, consumer (named “IT & Telecoms”) was already about 50% of the MEMS market in value. This has been a
continuous growth since.
– In 2004, already more than 70% of the MEMS market was generated by a few MEMS devices: IJheads, micro-mirrors,
pressure sensors, accelerometers and gyros for auto and medical applications. IJHeads, pressure and inertial still
accounts for a large fraction of the market toady.
– We anticipated new market opportunities, e.g.:
• The use of gyros in smartphones.
• We believed large opportunities was coming for microphones in mobiles.
– Microfluidics / biochips were already developed on glass / polymer substrates.
– We anticipated the difficult technical & market challenges for RF MEMS
– Fabless models was emerging
– The MEMS law (“One MEMS, one process”) was already here!
• What we missed:
– The unsuccessful market entry of some MEMS devices; e.g. micro fuel cells (expected in 2007), micro motors …
– The slower market growth for uncooled IR imagers
– The quick growth of STMicroelectronics in the MEMS business
– The coming of MEMS microphones players in the top 10 of the MEMS ranking
– The unsuccessful growth of the MEMS foundry business (only a few players manage to have a successful business)
– The restriction of the CMOS MEMS technology to a few devices only
– The coming of combos
– The maturity of MEMS processes
© 2013• 6Copyrights © Yole Développement SARL. All rights reserved.
MEMS Market Historical Data2004-2012 in US$M
2004 2005 2006 2007 2008 2009 2010 2011 2012
$M $5 240 $5 630 $6 350 $7 200 $6 800 $7 538 $8 880 $9 934 $10 930
$0
$2 000
$4 000
$6 000
$8 000
$10 000
$12 000
2004 - 2012 MEMS Markets ($M)Source Yole Développement
© 2013• 7Copyrights © Yole Développement SARL. All rights reserved.
MEMS markets by application
© 2013• 8Copyrights © Yole Développement SARL. All rights reserved.
MEMS markets by application
© 2013• 9Copyrights © Yole Développement SARL. All rights reserved.
First implementations of MEMS pressure
sensors in smartphones & tablets
• Motorola Xoom Tablet
– Bosch Sensortec BMP085
• Galaxy Note Tablet
– STMicroelectronics LPS331AP
• Galaxy Nexus Smartphone
– Bosch Sensortec BMP180
• Galaxy S3/4 Smartphone
– STMicroelectronics LPS331AP
Motorola Xoom Tablet
Source: Motorola
Galaxy Note Tablet
Source: Samsung
Galaxy Nexus
Smartphone
Source: Samsung
BMP085
Source: Bosch Sensortec
LPS331AP
Source: ST Microelectronics
BMP180
Source: Bosch Sensortec
LPS331AP
Source: STMicroelectronics
Galaxy SIII/ IV
Smartphone
Source: Samsung
© 2013• 10Copyrights © Yole Développement SARL. All rights reserved.
Sampling
/ R&D
High
volume
Small
production
MEMS value proposition in mobile devices
DelfMEMS switch
Freescale pressure sensorPolight MEMS
autofocus
Sensirion Humidity
Sensor
AudioPixel microspeaker
Sand 9 MEMS
Oscillator
NextInput SoftTouch
interface
TI temperature sensor versus
a competing thermopile
sensor
Wispry antenna tuner on cell
phone board
Thermal imager MuOptics
Mirasol display
STM 9-axis
Knowles microphones
Scanning mirror from
Lemoptix
Improved
visual
experience
Navigation &
environment
sensing
Sound
quality
Better communication
performances
New tactile
interface
Infrared sensing
Increased battery lifetime
Nectar fuel cell
© 2013• 11Copyrights © Yole Développement SARL. All rights reserved.
Example of MEMS device description:
Inertial combos for consumer
Market description:
• Provides accelerometer and / or gyroscopes and / or magnetometer functionalities
• With software: can provide higher added value functionalities: pointing, activity monitoring, pedestrian
navigation…
Main Device Manufacturers:
ST, Bosch Sensortec, InvenSense, Freescale...
Main trends:
• E-compass volumes increased significantly in 2012 with the involvement of Bosch and ST
• 6-axis IMUs are being accepted by the market since 2012: most growing type of integration
• 9-axis products started to be released in 2012. There are remaining challenges for such multi-sensor
modules but the market takes off this year
• Pressure sensing could be integrated in 10-axis combos but this is not likely for the near term
• Increasing importance of software (can be integrated in the combo or sold for integration in the sensor
hub / application processor)
• More and more suppliers: the competition is increasing
Market data:
2013: $451M; 472 Munits
2018: $1.40B; 3333 Munits
CAGR2013-2018: 30% (in value)
Main System Integrators:
Cellphone / tablet makers (Samsung, Apple…), set top box / remote control OEMs, sports companies…
© 2013• 12Copyrights © Yole Développement SARL. All rights reserved.
Top-Down Approach: Estimated Sales per
MEMS Product for MEMS Companies
PLAYERSSales 2012
($M)IJH
Pressure
µphones
Accelero
GyrosMagnetometers
Inertial combos
µboloProjecti
onµfluidics RF
Others (mass flow…)
foundry
1 STMICROELECTRONICS $1 000 $32 $22 $279 $382 $83 $0 $203
2 ROBERT BOSCH $842 $268 $17 $299 $136 $0 $99 $21 $2
3 TEXAS INSTRUMENTS $825 $811 $0 $14
4 HEWLETT PACKARD $645 $645 $0
5 KNOWLES ELECTRONICS $440 $440 $0
6 PANASONIC $386 $35 $15 $336 $0
7 DENSO $356 $187 $162 $7 $0
8 CANON $279 $279 $0
9 AVAGO TECHNOLOGIES $276 $276 $0
10 FREESCALE SEMICONDUCTOR $268 $72 $195 $1 $0
11 ANALOG DEVICES $266 $35 $161 $70 $0
12 AKM $249 $243 $6 $0
13 SEIKO EPSON $247 $215 $32 $0
14 INFINEON TECHNOLOGIES $187 $98 $58 $31 $0
15 INVENSENSE $187 $145 $41 $0
16 MURATA $179 $4 $97 $42 $36 $0
17 SENSATA $178 $178 $0
18 HONEYWELL $161 $41 $59 $40 $16 $0 $5
19 GE SENSING $152 $152 $0
20 TRIQUINT $130 $130 $0
21 LEXMARK $93 $93 $0
22 UTC AEROSPACE $91 $32 $46 $0 $14
23 SONY $83 $18 $0 $65
24 FLIR SYSTEMS $81 $81 $0
25 MEASUREMENT SPECIALTIES INC. $81 $81 $0
26 KIONIX $75 $75 $0
27 AAC ACOUSTICS $65 $65 $0
28 OMRON $60 $37 $9 $6 $9
29 ULIS $60 $60 $0
30 MEMSIC $54 $33 $20 $1
© 2013• 13Copyrights © Yole Développement SARL. All rights reserved.
Example:
MEMS-based Fundraising2011 & 2012 database
2011 Company Product categoryAmount raised (US
$M)Investment type
June Lilliputian Systems Fuel cell (microfluidics) 21 8th / 7th round (Serie B)April Qualtre Gyroscopes (inertial) 10 3rd roundApril Calient Technologies Optical MEMS for telecom 19.4 13th / r4laterMay SiTime Oscillator, Resonator (RF MEMS) 17.8 4th / 3rd roundMay PoLight MEMS Auto-Focus (emerging MEMS) 15.4 3rd / 2nd roundJune Cavendish Kinetics RF MEMS variable capacitors 10 3rd / laterJune Wispry RF MEMS variable capacitors 3.6 10th / bridge
September Discera Oscillator, Resonator (RF MEMS) 2 7th / bridgeSeptember GnuBIO DNA sequencing technology (microfluidics) 5 2nd round
September Alphabet Energy Thermoelectric energy harvesting (emerging MEMS) 12 3rd / 1st round
September Telecardia pH sensor for industrial and medical (muicrofluidics) 1.5 NA (1st ?)
October Sand 9 Oscillator, Resonator (RF MEMS) 5.9 4th roundNovember Wispry RF MEMS variable capacitors 14.1 11th / 7th round
Not included (not MEMS centric)
KAIAM Corporation (packaging of optical components for telecom)…
2012 Company Product categoryAmount raised (US
$M)Investment type
January Senova Systems Carbon based solid state pH sensor (microfluidics / medical) 6.7 Series B financing
January Owl biomedical Cell sorting platform based on MEMS (microfluidics / medical) 3 NA (early stage)
February Rheonix Microfluidic platform for the molecular diagnostics(microfluidics / medical) 6 3rd round
April Wasatch MicrofluidicsProtein analysis equipment for the drug discovery and research market
(microfluidics / medical)0.47 3rd round
May Micropelt Thermoelectric generators (emerging MEMS) 6.5 3rd roundMay OrthoSensor Orthopedic sensing solutions (microfluidics / medical) 15 Series BJune Sand 9 Silicon MEMS timing devices (RF MEMS) 23 5th roundJuly Pyreos MEMS -based infrared sensor array (optical MEMS) 9.71 4th roundJuly Movea Motion sensor software solutions (inertial) 7.4 Series C
September Microgen Piezo MEMS energy harvester (emerging MEMS) 2.6 Serie ASeptember Sand 9 Silicon MEMS timing devices (RF MEMS) 3 6th round (Serie C)September Lilliputian Systems MEMS -based solid oxide fuel cell (emerging MEMS) 40 8th roundSeptember CrossFiber MEMS-based photonic switches (optical MEMS) 13.3 Serie D
October Boston MicrofluidicsMicrofluidic-based device for sample collection and processing
(microfluidics / medical)0.1 NA (early stage)
October SensimedMEMS-based contact lens for glaucoma detection (pressure / emerging
MEMS)13.2 Serie C
© 2013• 14Copyrights © Yole Développement SARL. All rights reserved.
ASIC MEMS 2012 Market Value
• The ASIC market is 29% of the MEMS module market (packaged die).
• 43% of the market is in the hands of IDMs with MEMS business (STM, Infineon,
Bosch …) while 57% is outsourced to IC foundries.
57%
43%
Estimated 2012 out-sourced ASIC MEMS % (TOTAL~$3.5B)
IDM MEMS IC Foundries (TSMC, UMC …)
29%
32%
35%
4%
2012 MEMS Market Value Breakdown (TOTAL~$10B)
ASIC Die Market value MEMS Die Market Value Packaging, Assembly & Test Value Yield losses
© 2013• 15Copyrights © Yole Développement SARL. All rights reserved.
Example:
ASIC MEMS Market
2012 2013 2014 2015 2016 2017 2018
Others $5 $13 $29 $54 $74 $100 $148
Oscillators $27 $40 $85 $187 $336 $504 $655
RF MEMS $229 $306 $398 $497 $622 $776 $947
Projection systems (small size) $14 $36 $110 $189 $281 $388 $607
Projection systems (large size) $321 $356 $396 $439 $488 $541 $600
Micro displays $1 $1 $2 $14 $42 $74 $110
PIR & Thermopiles $129 $151 $175 $241 $307 $417 $715
Microbolometers $26 $32 $39 $48 $62 $76 $96
Inertial combos $92 $278 $558 $924 $1 285 $1 637 $1 951
Digital Compass $289 $401 $515 $595 $635 $633 $579
Gyroscopes $879 $1 139 $1 332 $1 402 $1 469 $1 551 $1 593
Accelerometers $534 $600 $640 $631 $605 $548 $475
Microphones $154 $196 $229 $267 $316 $356 $409
Pressure Sensors $154 $181 $211 $264 $329 $407 $514
InkJet Heads $419 $405 $391 $379 $367 $356 $342
$0
$2 000
$4 000
$6 000
$8 000
$10 000
$12 000
US$
M
ASIC MEMS 2012-2018 Market Value
© 2013• 16Copyrights © Yole Développement SARL. All rights reserved.
About the Authors of this Report
• Dr Eric Mounier, Senior Analyst
– In 1998, he cofounded Yole Dévelopement. Eric is in charge of market analysis
for MEMS, equipment & material. He is Chief Editor of MEMSTrends &
Micronews magazines. Before joining Yole Développement, Eric worked as a
market analyst at CEA Leti. He has a PhD in microelectronics from the INPG in
Grenoble.
– Contact: [email protected]
• Laurent Robin, Activity Leader
– He is in charge of the MEMS & Sensors market research at Yole
Développement with a focus on inertial sensors & RF MEMS related
technologies. Laurent holds a Physics Engineering degree from the National
Institute of Applied Sciences in Toulouse, plus a Masters Degree in
Technology & Innovation Management from EM Lyon Business School,
France
– Contact: [email protected]
© 2013• 17Copyrights © Yole Développement SARL. All rights reserved.
Available MEMS Reports
Trends in MEMS
Manufacturing &
Packaging
MEMS Cosim+
MEMS Manufacturing
Cost Simulation Tool
Ferro-Electric
Thin Films
MEMS
Microphone
Permanent Wafer
BondingThin Wafer
Handling
Infrared Detector
Market, Applications
and Technology
Trends
Technology Trends
for Inertials MEMS
RF Filters, PAs,
Antenna Switches &
Tunability for Cellular
Handsets
Trends in MEMS
Manufacturing &
Packaging
Ferro-Electric
Thin Films
Motion Sensors for
Consumer & Mobile
applications
Uncooled Infrared
Imaging: Commercial &
Military Applications
IMU & Gyro for
Defense, Aerospace
& Industrial
Status of the
CMOS Image
Sensors
3-Axis Consumer
Gyroscopes
New!
Emerging Energy
Harvesting
Devices
New!
MEMS Front-End
Manufacturing
Trends
New!
MEMS Pressure
Sensor
Sensor fusion of
acceleros, gyros &
magnetometers
MEMS for Cell
Phones and
Tablets
New!
© 2013• 18Copyrights © Yole Développement SARL. All rights reserved.
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