Smart Photonic Systems for healthy and secure living€¦ · Fraunhofer Institute for Photonic Microsystems Maria-Reiche-Strasse 2 01109 Dresden / Germany Email: [email protected]

Fraunhofer Institute for Photonic Microsystems

Maria-Reiche-Strasse 2

01109 Dresden / Germany

Email: [email protected]

Web: www.ipms.fraunhofer.de

© Fraunhofer IPMS

Smart Photonic Systems for healthy and secure living

Dr. Michael Scholles Head of “Business Development & Strategy”

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 2 For internal use only

1992 Foundation of the Dresden part of the Fraunhofer Institute for Microelectronic Circuits and Systems (IMS)

2003 Foundation of the Fraunhofer Institute for Photonic Microsystems (IPMS)

2007 Opening of a new clean room 2011 Budget: 19.5 Mio € (9.7 Mio € by direct industrial commissions) Staff: 200 employees & scientific assistants

Fraunhofer IPMS at a glance

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 3 For internal use only

1500 m², class 10, industry-type (MES)

complete 6” Wafer line for CMOS & MEMS

R&D and fabrication

3 shift (5 x 24) operations

ISO 9001:2008 certification since 2003

Infrastructure

MEMS Technologies Dresden

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 4 For internal use only

Vision:

Fraunhofer IPMS is the international leading R&D service provider in the fields of Photonic Microsystems, Micro Systems Technologies, and Microsystems for Wireless Transmission.

Main Business Model:

Product Development

Full Value Chain:

R&D Prototyping Pilot Fabrication Volume Manufacturing

Customer driven

We offer MEMS foundry service

Business Model

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 5 For internal use only

Consulting service & feasibility studies

Simulation & design

Development of complete processes

Fabrication of demonstrators & prototypes

Characterization & Test

Pilot-Fabrication of small and medium volume

Fraunhofer IPMS offers services from R&D to fabrication

MEMS- Cleanroom •Department Engineering •Department Fabrication

MEMS scanner for: •Rotation& Translation •1D& 2D-scanner •Bar code Scanner •Projection displays •Optical path length modulator •…

Spatial Light Modulators

µMirror arrays for: •Microlithography •Mask writing systems •Piston type mirrors for phase shift for image correction •…

MEMS Foundry / External Customers

Active Micro Optical Components and

Systems

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 6 For internal use only

column lines m m+1 m+2 m+3

row line n-1

row line n

counter

electrode address

electrode

mirror

electrode

Spatial Light Modulators: Chip and Mirror architecture

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 7 For internal use only

Address- Electrode

Counter- Eletrode

Mirror- Electrode

Hinge

Mirror

counter

electrode address

electrode

mirror

electrode

1-Level Mirror

2-Level Mirror

Al-alloy mirrors alternative c-Si

Mirror architectures

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 8 For internal use only

Analog addressing DRAM-like architecture (analog storage cells)

200 x 240 pixel

40 µm pixel size

up to 1.0 µm stroke

mirror planarity < 10 nm RMS

Parallel programming of sub-arrays allows frame rates > 5 kHz

Phase-Shift Micro Mirror Arrays

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 9 For internal use only

Goal:

Real-Time Compensation of

Dynamic Wavefront

Distortions

Principle of AO image correction

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 10 For internal use only

Vision Correction of the Human Eye Objective measurement by

SHS wavefront sensing

RMS = 293 nm

RMS = 47 nm

Pupil: 5.4 mm

Correction of an average

complex eye aberration

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 11 For internal use only

SLM development and manufacturing led to extensive know-how in:

CMOS-MEMS integration

Surface micromachining

Sacrificial layer technology

Easy set-up for design and manufacturing of other (also non-photonic) MEMS

First example: CMUTs (Capacitive Micromachined Ultrasound Transducers)

Application know-how by key customers

Several medical applications of CMUTs

Exploitation of Technology Know-How

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 12 For internal use only

Micro Scanning Mirror Variants and Applications

1D rot.

translatory

2D rot.

Linear Scan

Grating

? Your Device

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 13 For internal use only

a) b) c) d)

diameter: 8 mm

glas fiber cover

glas fiber

(illumination)

MEMS scanner

optical

dome

MEMS scanner

substrate

Micro laser camera: Optical set-up

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 14 For internal use only

Source: Microvision

Scan-head: Ø 8 mm

SVGA resolution

full colour

frame rate: 30 Hz

112° x 84° optical scan

range

16 kHz / 1 kHz scan

frequency

Performance

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 15 For internal use only

Laser Micro Endoscope: Optical System Design

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 16 For internal use only

Microscope Tip diameter: 8mm

Image resolution: 200 x 200 pixels

Scan area: 3 mm x 3 mm

Lateral resolution: 15 µm per pixel

Frame rate: 20 Hz

Laser Micro Endoscope: Microscope Tip Assembly

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 17 For internal use only

SPECIFICATIONS

3D Fluorescence Microscope

17

■ Wavelength: λ = 488nm

■ Resolution: Δxy = 1.5μm

Δz = 3.0μm

■ Field of view: 600μm x 600μm

■ Objectiv: NA = 0.48

■ Size: 32cm x 20cm x 8cm

■ Weight: ~1.8kg

MEMS

Mirror

Kollimator

Mirror

Z-Shifter

Detector

Pinhole

Lens

Lens 2

Lens 1

Dichroic

Device

Objective

Mobile Authentification by Retina Scanning

M A R S

Cooperative Project adressing „Biometrics“ call of

R&D Program „Research for Civil Security“

Managed by VDI Technologiezentrum GmbH, Düsseldorf

Duration 1.1.2012 - 31.12.2014

Coordinated by M A R S Mobile Authentication by means of Retina Scanning

Project Goals

Enhanced methods for personal authentication

e-Banking

(e-Commerce)

Access to high security areas (airports, …)

Access to critical infrastructure und information

Security for private areas (Apartment, house, …)

Prevention of theft (cars, …)

…

Coordinated by M A R S Mobile Authentication by means of Retina Scanning

Biometric Modality: Blood vessels of human eye

„Retina Scanning“

Pattern of blood vessels as „finger print“

FAR = 1 : 1 Million with limited computing power

(mobile device !!)

Retina Scanning tamper-proof but non-invasive

Mobile device for retina scanning by MEMS optical

scanner of Fraunhofer IPMS (Image acquisition close

to the eye, Scanning through eye pupil)

Integration with Virtual Retinal Display (VRD) easily

possible in order to project information directly onto

the retina

VRD ensures cooperation of the user

Coordinated by M A R S Mobile Authentication by means of Retina Scanning

Simplified optical concept

Optics and required electronics will fit into mobile device

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 22 For internal use only

Fraunhofer IPMS business model:

Full value chain from R&D

to pilot fabrication

Customers have one partner for research, development, manufacturing

Several best practice examples with strategic key customers

Technologies:

Bulk micromachining

Surface micromachining

CMOS & „Active Silicon“

Summary

© Fraunhofer IPMS

Michael Scholles I July 12, 2012 I slide 23 For internal use only

THANK YOU FOR YOUR ATTENTION!

Michael Scholles; phone: +49-351-8823-201; email: [email protected]

PLEASE VISIT US AT BOOTH D20 !!