SLME Linear Actuators Ball Screw Driven with Recirculating Ball Bearing Guide Precision Motion Control Positioning accuracy to 0.060 mm High repeatability of ± 0.005 mm Dynamic load capacity up to 27 kN Moment load capacity up to 1410 Nm Maximum speed: 1.05 m/s Application Semiconductor manufacturing Medical devices and laboratory automation Easy-to-install/configure into single or multi-axis systems Compact design for envelope constraints Adheres to high quality control standards Info 154 US Design Features Compact via gothic arch bearing configuration Minimal deflection with steel U-shaped guide rail Corrosion resistant surfaces ensure predictable life Cleanroom compatible with C-Grease lubrication Optional dust cover protects ball bearings from debris
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SLME Linear ActuatorsBall Screw Driven with Recirculating Ball Bearing Guide
Precision Motion ControlPositioning accuracy to 0.060 mm
High repeatability of ± 0.005 mm
Dynamic load capacity up to 27 kN
Moment load capacity up to 1410 Nm
Maximum speed: 1.05 m/s
ApplicationSemiconductor manufacturing
Medical devices and laboratory automation
Easy-to-install/configure into single or multi-axis systems
Compact design for envelope constraints
Adheres to high quality control standards
Info 154 US
Design FeaturesCompact via gothic arch bearing configuration
Minimal deflection with steel U-shaped guide rail
Corrosion resistant surfaces ensure predictable life
Cleanroom compatible with C-Grease lubrication
Optional dust cover protects ball bearings from debris
Festo...Your AutomationPartner Worldwide
As a global leader in industrialautomation components andsystems, with over $1.8 billionsales worldwide, Festo hasthe resources and applicationexperience to be your long-term partner for cost-effectiveautomation solutions.
• 55 independentsubsidiaries worldwide
• Representation in180 countries
• Worldwide networking for consistent standards of products, consultancy, sales and services.
• Worldwide support provided by over 10,500 team members
Festo Quality Assurance,ISO 9001 Certification
Festo Corporationis committed toprovide Festoproducts and services that willmeet or exceed our customers’requirements inproduct quality, delivery, customer service and satisfaction.
All Festo locations within the UnitedStates are registered to ISO 9001.
Online LiteratureLiterature in PDF format is available for download at: www.festo-usa.com/pdfindex.html
High Performance Handling Solutions
High Accuracy and RepeatabilityThe SLME utilizes a fine pitch ballscrew and recirculating ball bearing carriage to achieve highaccuracy and repeatability. The steelU-shaped body has ground bearingraces for the ball bearing carriageand ground mounting surfaces for the base and carriage to provide high positioning accuracy. Preloadedbearing and ball screw versions areavailable in the SLME23 and SLME30,providing a high repeatability of±0.005 mm.
High Load Capacity and RigidityThe ball tracks of the SLME each have 4 contact points, providing high dynamic load (up to 27 kN) andmoment (up to 1410 Nm) capacity.This allows you to design smaller and more compact equipment by eliminating separate guiding systems, thereby also reducing thenumber of parts and associated costs.
Long LifeSLME actuators come standard with RAYDENT® corrosion resistanttreatment that protects the guidingsurfaces for the life of the actuator.An optional dust cover protects theunit from debris.
Flexible DesignThe SMLE is available with two different ball screw leads for each of the three frame sizes:
Type Lead (mm)SLME23 2 or 5SLME30 5 or 10SLME46 10 or 20
Optional EnhancementsThe SLME is available with home and end-of-travel sensors. A cleanroom version with C-Grease is suitable for FS209E Class 100 use.
Typical ApplicationsThe SLME is an ideal linear actuatorsolution for such high-tech industriesas semiconductor manufacturing, laboratory automation, and electronic component assembly.
09/2005 – Subject to change – Info 154 US 3
SLME Linear Actuators
Guiding surface is ground into the steel body. This eliminatesthe need for separate internal guiding rails, allowing the unit to be compact in height and width.
RAYDENT treatment provides rust preventative surface on guide unit. RAYDENT is a thin-film surface treatment (1-2 micron) which is widely used in the electronic industry.
2 or 4 ball ways and 4 contact points allows for high load and moment capacity, while providing smooth operation.
Steel U-shaped guide rail provides high rigidity in all directions.
The SLME is so versatile it can be used for handling solutions in many high-tech industries.
Multiple screw options are available. Two different screw leads and precision rating per frame size.
Dust cover options
Home and end-of-travel sensor options
Suitable for cleanroom applications (with C-Grease)
Flexible Reliable Easy
High load and moment capacity of unit eliminates separate guiding systems on machines, therefore reducing number of parts and costs.
U Preloaded with oversize ball ≤ 0.005 mm [Available for SLME23 and SLME30 only]
Dustproof cover
Standard. Without cover
GA With dustproof cover Sensor package incl. rail, sensor lug on slide and 3 sensors
Standard. Without sensor package
PS With PNP sensors, both NO and NC connections
NS With NPN sensors, both NO and NC connections
Grease lubrication
Standard. With normal grease lubrication
RR Suitable for cleanroom application. With C-Grease
SLME – – –
Type Code
Size
23
30
46
Electromechanical linear actuator
Ball screw axial play [Rolled ball screw, class C7]
* Please check with Festo regarding stroke deflection.
Example – Type Code
SLME 46 - 10 - 800 - W GA PS
Linear ActuatorSize
Pitch
Stroke
With PNP Sensors
With Dustproof Cover
Ordering
1. Enter the codes in the boxes to build the type code.2. Use the type code to order the actuator.3. Call 1-800-99-FESTO to place your order.
Axial Play
09/2005 – Subject to change – Info 154 US 19
Motor Flanges and Custom Mounting KitsSLME Linear Actuators
Dimensioning
Maximum and Minimum Values for Sizing
In certain situations, under-sized or oversized motors maynot be able to be mounted to a particular actuator. The dimensions are based on asquare flanged motor design,
with thru holes and a straightshaft. Some dimensions may not be possible for round faced motors withtapped mounting holes.Please consult Festo in thesesituations.
Custom Motor Mounting Kits
Festo custom motor mountingkits provide a custom designedmotor flange adapter plate andcoupling to allow the mountingof some third-party motors.
Festo motor mounting kitsinclude a motor flangeadapter, coupling, and hardware specifically designedto mount to your motor.
Sizing A Motor
There are seven critical dimensions required in orderto physically size a mountingkit. The drawing below shows
these dimensions. Any onedimension can have an impacton the size or even feasibilityof designing a motor adapter.
Mounting Kits
A custom mounting kit shown with motor flange adapter plate,coupling, and hardware.
Motor
Series [W] SLME23
SLME30
SLME46
AC Matsushita MSMA3AZ 30
MSMA5AZ 50
MSMA01 100
MSMA02 200 - -
MSMA04 400 - -
Mitsubishi Electric
HC-KFS(MFS,PQ)053 50
HC-KFS(MFS,PQ)13 100
HC-KFS(MFS,PQ)23 200 - -
HC-KFS(MFS,PQ)43 400 - -
HA-FF053 50 -
HA-FF13 100 -
HA-FF23 200 - -
HA-FF33 300 - -
Yaskawa Electric
SGMAH(SGML)-A3 30
SGMAH(SGML)-A5 50
SGMAH(SGML)-01 100
SGMAH(SGML)-02 200 - -
SGML-03 300 - -
SGMAH(SGML)-04 400 - -
Sanyo Electric
P30B04003 30
P30B04005 50
P30B04010 100
P30B06020 200 - -
P30B06040 400 - -
P50B05005 50 -
P50B05010 100 -
P50B07020 200 - -
P50B07030 300 - -
P50B07040 400 - -
Chiba Precision
EA-2565 12 - -
EA-2580 20 - -
Hitachi ADMA-R5 50
ADMA-01 100
ADMA-02 200 - -
ADMA-04 400 - -
Tamagawa Seiki
TS4601 30
TS4602 50
TS4603 100
TS4606 100 - -
TS4607 200 - -
TS4609 400 - -
Fanuc β M0.2 50
β M0.3 100
Step- Oriental UPD534M-A - -
PMU33AH - -
PK(RK)54,AS4 -
PK(RK)56,AS6 -
UK26,UMK26,CSK26 - -
-
Available - Not available
Type
Motor Bracket Available
Servo Electric Motor Industrial
Industrial Equipment System
per Motor
Motor Supplier
Motor
Pre-Engineered Motor Flanges Available From Festo
Info 154 US – Subject to change – 09/200520
LubricationSLME Linear Actuators
the nut contains Multemp PS
No. 2 Grease as a lubricant.
Check the lubricant 2 to 3
months after the ball screw is
used for the first time. If it is
extremely dirty, wipe
off old grease and apply new
grease. Then, check and
supply the lubricant once
every year as a general rule.
However, as the service life
environment, adjust the
C-Grease
Fig. 1 shows the number of
dust particles from ball screw
(Particle diameter of more
Checking and Supplying
Lubricant.
Cleanroom Version with
When ordering the cleanroom
ball screw, plus C-Grease.
comes with RAYDENT on the
Unless otherwise specified,
Standard Lubrication and C-Grease
Standard Lubrication
intervals accordingly.
version, the SLME linear actuator
fluorine grease.
C-Grease meets the need for
cleanliness in semiconductor
manufacturing environments,
in laboratory automation
settings, and in electronic
component assembly lines.
C-GREASE offers cleanliness,
stable torque characteristics,
high lubricating performance,
and excellent rust prevention,
not available from conventional
of lubricants varies with
operating conditions and
than 0.13 µm). Therefore,
C-Grease is suitable for FS209E
Class 100 applications.
Test Conditions
- Ball screw shaft diameter: 20 mm
- Pitch: 20 mm
- Preload: 800 N
- Number of revolutions: 1200 per min
- Stroke: 250 mm
- Amount of grease: 1 cc
- Measurement interval: 1 hour [h]
Fig. 1
09/2005 – Subject to change – Info 154 US 21
Corrosion ProtectionSLME Linear Actuators
many organic compounds,
mounting FA, etc., and is
leading the industry. The
exceeding conventional
technical concepts of JIS
(Japan Industrial Standard).
A certain amount of fine grains
film receives pressure on its
surface (it does not peel off
white grease, it is combined
with the grease and maintains
lubrication, so that it never
cleanliness is lowered. Even if
processing was implemented
can be kept from rust for
– Super precise class, thin
black rust-preventive film
resistance lasts more than
– No cracking and peeling
– No thermal influence to
materials because the film
is processed under low
preventive of individual
parts, semiconductor
manufacturing machines,
machines for export, etc.
even when bent up to a
The RAYDENT film shows
product with a RAYDENT treated
RAYDENT's Rust Resistance
powerful rust resistance
surface has maintained long-
term rust prevention for more
RAYDENT Film on the Contact
Side of Sliding Parts
come off when the RAYDENT
like plating). But by mixing into
happens that a dry piece of the
film scatters, nor that the film
RAYDENT Processing
(The effect of rust
10 years)
hairpin angle
temperature
– Suitable as thin film rust
RAYDENT and Raydent are registered trademarksof Raydent Industrial Co., Ltd.
RAYDENT Technology
Raydent technology offers
a method for designing
improved metal surface
properties.
high precision, and
superior rust resistance.
it is widely used in the
surface processing system,
As a next-generation
the side on which RAYDENT
the film comes off completely,
several years of normal use
because it is treated with a
long-term rust preventive.
RAYDENT's
amorphous diffusion
film is ultra thin, but
has super adhesion to
There is evidence to show that a
than 20 years, even with some
wear on the film surface.
mthickness 1µm-2µ
Raydent LSL (BL) Film
– Simply use as a joint
with plastics, rubber, etc.
aircraft, machine tools,
field of precision electrooptic
semiconductors, liquid crystal,
equipment including
can be called a landmark
Research and Development
achievement in this field,
based on its demonstrated
performance for more than
30 years.
RAYDENT technology,
established in Kyoto, Japan,
by Ken Ogawa in 1964,
broke new ground in Faraday's
electrolysis law and
RAYDENT Surface Treatment
Measure stop position of slide
block and halve the maximum
difference between obtained
ends of the stroke. The highest
measured value.
Feed the slide block, read test
indicator when it is slightly
moved and use the reading as
reference value. Move slide
block from this state in the
same direction at prescribed
load and measure difference
value. Perform this measure-
ends of traveling distance and
use maximum value among
measured value.
l1
l2
l3
ln
Backlash ∆ l
Return
Feed by feed screw
Load Displacement
value will be used as the
value of ln)]
readings.
at the center and both
Perform this measurement
± ½ [(max. value of ln)- (min. ∆ l
values so obtained as the
between reading of test indicator
Perform repeat positioning of
slide block in the same direction
seven times. ment at the center and both
without load and reference
Info 154 US – Subject to change – 09/200522
Engineering SupportSLME Linear Actuators
Backlash Repeatability
Positioning Accuracy Traveling Parallelism
Fix indicator at center of slide
block and apply it to surface
plate equipped with guide rail.
Move slide block across the
guide and obtain the
maximum distance among
readings.
properly and use the position
as datum point. Then position
the slide block in the same
direction and measure the
difference between actual
traveling distance of slide
block from datum point and
the distance supposed to be
traveled by the slide block
from datum point. Perform this
measurement throughout the
stroke length and use the
Act
ua
l tr
av
eli
ng
dis
tan
ce
vs
Inst
ruct
ed
tra
ve
lin
g
∆ l
1
∆ l
2
∆ l
3
Traveling distance
∆ l
n
Traveling parallelism
(∆ ln)max
Position the slide block
maximum value among all
the values obtained.
Service Life
Bearing Guide Service Life
Nominal Life (Km) =Dynamic Load Rating
Applied Load
Nominal life is the total running distance that 90% of
identical SLME guide actuator units in a group, when
operated independently of each other, under the same
conditions, without external contamination, can achieve
Switches or Sensors Required? [Yes/No] _______________________________________________________
End of Travel __________________ Home __________________
Brake Required [Yes/No] _________________
OrientationHorizontalVerticalInclined [angle from horizontal] [θ] ________ °
Motion Profile
Speed [Max] ___________________ [in/sec/mm/sec]
Total Cycle Time ________________ [sec]
Acceleration Time ______________ [sec]
Deceleration Time ______________ [sec]
Number of Cycles _______________
Move Distance _________________ [in/mm]
Info 154 US – Subject to change – 09/200524
Application WorksheetSLME Linear Actuators (page 1 of 2)
For technical assistance from our team of expert automation engineers, please photocopy pages 24 and 25, fill in as much information as possible and fax to 1-800-96 FESTO.
Environmental Considerations
Ambient Temperature Range
Min. ________ [°F/°C] Max. ________ [°F/°C]
Contaminants [Yes/No] ____________________
Type ___________________________________
________________________________________
Conditions [Cleanroom, etc.] ________________
________________________________________
________________________________________
θ
09/2005 – Subject to change – Info 154 US 25
Motor Information
Festo Motor Type: ______________________________________________
Third-party Motor Model Number: _____________________________________
If third-party, is motor drawing provided? [Yes/No] _____________________________
If no, please specify dimensions [inches/millimeters]:Shaft Diameter [U] _______________________________________________________
Stepper controls, servo pneumatic and servo electric systems
Design, documentation, assembly/testing
Cabinets are designed, manufactured, assembled, and tested per NEMA, UL, and IEC standards
Standard and stainless steel enclosures
Festo Product Range
Integrated Systems Control Systems
ISO and NFPA cylinders
Linear and rotary actuators
Standard, precision, and micro grippers plus accessories
Pneumatic Actuators and Grippers
Belt and ball screw driven linear actuatorsHigh accuracy and repeatabilityHigh rigidity and speed
Electromechanical Actuators
ValvesIn-line/sub-base directional control valvesOSHA compliant lockout valvesProportional valves
Valve ManifoldsDirect, multi-pin, and fieldbus manifolds
Pneumatic Valves and Valve Manifolds
Inductive, optical, mechanical,pressure and vacuum sensors
PLCs and IPCs
Remote access panels [HMI]
Counters, timers and gauges
Sensors and Control Technology
Filters
Regulators
Lubricators
DryersCombination units
Air Preparation
Vacuum generators
Suction cups and suction grippers
A variety of suction cup typesand materials are available
Vacuum Components
Inch/metric fittings, hybrid fittings, and flow controls
Inch/metric tubing(various materials and colors)
Fittings and Tubing
Cylinders, manifolds, tubing and fittingsfor use in washdown environments
Linear/rotary actuators with and without a process valve; diaphragm valves, Namur valves
Industry Specific Solutions
For more information about the entire Festo product range, includingtechnical specifications, CAD models, product selection software,and access to our on-line store, visit us at www.festo.com/us.
09/2005 – Subject to change – Info 154 US 27
While every effort is made to ensure that all dimensions and specifications are correct,any printing errors not rectifiedare outside the control of Festo, who cannot be held responsiblefor the same. For Liability andWarranty conditions, refer to our standard “Conditions ofSale”, available on request from your local Festo office.
All rights reserved. No part of this publication may be reproduced or transmittedin any form or by any means, electronic, mechanical, photocopying or otherwise, without the prior written permission of Festo. All technical data subjectto change according totechnical update.
Length or Distancem > ft = x 3.281mm > inch = ÷ 25.4
Volumecm³ > in³ = x 0.061
Massg > lb = x 0.002kg > lb = x 2.2046
Pressurebar > psi = x 14.7
TemperatureC° > F° = x [1.8] + 32
Flowl/min > Cv = x 0.001l/min > scfm = x 0.0353
ForceN > lbf = x 0.2248kgf > N = x 9.80665
MomentNm > in-lb = x 8.8507Nm > ft-lb = x 0.7376
Moment of Inertiakg·cm² > lb-in² = x 0.3417kg·m > lb-ft = x 7.233kg·m² > oz-in² = x 5.4675
Conversion FactorsThe conversion table belowincludes the most commonly usedfor designing a system. They aregiven to enable the user to makenecessary calculations.